Please use this identifier to cite or link to this item:
http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/78222
Title: | 光反射與外差干涉術應用於波長與微小角度變化量測 The Application of Light Reflection and Heterodyne Interferometer in the Measurement of Wavelength and Small Angle Variations |
Authors: | Meng Chang Hsieh 謝孟璋 |
Advisor: | 張家歐 |
Keyword: | 波長變化,微小角度,(1 0 0)矽晶片,外差干涉,六角反射鏡,光學機構設計, wavelength shifts,small-angle,(1 0 0) silicon wafer,heterodyne interferometer,hexagonal mirror,optomechanical design, |
Publication Year : | 2015 |
Degree: | 博士 |
Abstract: | 精密定位與定位控制和半導體曝光之波長控制,常是工業用機器與半導體加工的重要議題。為了使加工與製造機具有更高的精度,測量的精度要求,在許多領域便更為重要,如:力學感測、半導體工業、以及光纖通信。
本文提出了光學感測器用於測量波長變化和小角度變化的方法。測量波長變化系統,包括一光柵、一全反射稜鏡與外差干涉儀。外差光束通過光柵,便產生正一階衍射光束,光入射稜鏡內以大於臨界角作全內反射。波長變化將影響正一階光束的衍射角度,使光束於稜鏡內的全反射角度變化,便產生s與p偏振的相位變化。實驗結果和理論模擬證明,其系統靈敏度與解析度優於5°/ nm和0.006 nm與3.1°/ nm和0.0095 nm,可以個別在2nm與5nm的範圍內來實現。 在外差干涉微小角度測量系統,使用光學材料為(1 0 0)矽晶片,建構於微小角度感測器的結構。微小角度測量中,因入射矽晶片的角度變化而產生s與p偏振的相位變化,並使用共光程的方式來比較測試光和參考光訊號;微小角度可因評估相位差而準確地測量。實驗結果呈現,其解析度與靈敏度優於2×10-4°和150(°/ °),量測範圍在0.45°內。在此,同時也提出外差干涉高靈敏系統與多層膜反射結構,它們的優點是可調整的靈敏度與良好的靈敏度。 在六角反射鏡角度測量的系統,提出一新型並可簡單架設之光學測量角度系統;其結構為:氦氖雷射光通過一衰減片並進入分光鏡器,分為兩束光。其反射光作為強度校準光,定義為參考光。透射光作為測試光並進入了一個六角反射鏡,爾後入射至光強度感應器。當六角反射鏡產生一個小的角度旋轉時,雷射光束便產生平移。此雷射光束平移運動將影響光強度感應器上的光斑的面積,而改變量測到的光強度,因於利用光強度變化而辨識角度的變化。為減少在量測中,雷射光源強度不穩定所造成的影響,將測試光強度除以參考光來消除光源不穩定的影響因子。實驗結果解析度與靈敏度優於7.7×10-5°與13000 μW/°,於範圍0.25°內。 Precision positioning, position control, and wavelength control of semiconductor exposure machine are usually critical to industrial-use processing machines and semiconductor industry. To facilitate fabrication components with greater precision, the precision measurements are important in many research fields, such as mechanical sensing, semiconductor industry, and optical fiber communication. This thesis presents methods of the optical sensor for measuring wavelength shifts and small angle variations. The measuring wavelength shifts system consists of a diffraction grating and a total internal reflection heterodyne interferometer. As a heterodyne light beam passes through a grating, the +first-order diffraction beam is generated. The light penetrates into a total internal reflection prism at an angle larger than the critical angle. The wavelength variation will affect the diffractive angle of the + first-order beam, thus inducing phase difference variations of the diffractive light beam emerging from the total internal reflections inside the trapezoid prism. The experimental results and theoretical simulation demonstrated that the sensitivity and resolution levels are superior to 5 deg/nm and 0.006 nm, respectively, can be achieved in a dynamic range of 2 nm, and are superior to 3.1 deg/nm and 0.0095 nm in the range of 5 nm. In the small angle measurement heterodyne interferometer system, the optical material is the crystal orientation (1 0 0) silicon wafer applied to compose a new architecture of small-angle sensor. The small-angle measurement used the phase difference which is dependent on the incident angle at the silicon wafer surface to deduce the angular variation. The proposed architecture is using the common path method and comparing the test and reference signals; thus small-angles can be easily and accurately measured by estimating the phase difference. The experimental results demonstrate the feasibility of this method. The angular resolution and sensitivity levels superior to 2×10−4 deg (3.5×10−6 rad) and 150 (deg/deg), respectively, were attainable in a dynamic range of 0.45 deg. In addition, this thesis also presented two additional measurement systems: highly sensitive heterodyne interferometer system and multi-layered film structure; they achieved the advantage of adjustable and good sensitivity. In the hexagonal mirror small angle measurement system, a new and simple optical mechanism for varying light intensity is proposed to measure small angle variations. A He-Ne laser light beam was passed through an attenuator and into a beam splitter. The reflected light was used as a reference light for calibrating the measurement of intensity. The transmitted light as the test light entered a hexagonal mirror and was reflected by the hexagonal mirror before entering a power detector. When the hexagonal mirror was rotated by a small angle, the motion of the laser beam was translated and hit the sensing zone of power detector. The translational shift of laser beam affects the hitting area of sensing zone in the detector, thereby varying the detection intensity. This variation in light intensity can be employed to measure small-angle variations. In order to reduce the effect of instable source intensity during angular measurements, the test light intensity divided by the reference light. The experimental results demonstrate the feasibility of this method. Angular resolution was 7.7×10−5 deg, within a range of 0.25 deg. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/78222 |
DOI: | 10.6342/NTU201600533 |
Fulltext Rights: | 有償授權 |
Appears in Collections: | 應用力學研究所 |
Files in This Item:
File | Size | Format | |
---|---|---|---|
ntu-104-D00543001-1.pdf Restricted Access | 2.76 MB | Adobe PDF |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.