請用此 Handle URI 來引用此文件:
http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/78222
完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 張家歐 | |
dc.contributor.author | Meng Chang Hsieh | en |
dc.contributor.author | 謝孟璋 | zh_TW |
dc.date.accessioned | 2021-07-11T14:46:37Z | - |
dc.date.available | 2021-10-17 | |
dc.date.copyright | 2016-10-17 | |
dc.date.issued | 2015 | |
dc.date.submitted | 2016-06-28 | |
dc.identifier.citation | [1] Q. Zhang, N. Liu, T. Fink, H. Li, W. Peng, and M. Han, “Fiber-optic pressure sensor based on π-phase-shifted fiber Bragg grating on side-hole fiber,” IEEE Photonics Technology Letters 24, 1519-1522 (2012).
[2] C.H. Lee, and J. Lee, “Characteristics of a Fiber Bragg grating temperature sensor using the thermal strain of an external tube” Journal of the Korean Physical Society 59, 3188-3191 (2011). [3] S. C. Gupta, Textbook on optical fiber communication and its applications (Phi Learning Pvt. Ltd, 2012). [4] J.A. Stone, S.D. Phillips and G.A. Mandolfo, “Corrections for wavelength variation in precision interferometric displacement measurements,” Journal of Research of National Institute Standars and Technology 101, 671-674 (1996). [5] Kung-Huang Chen, Cheng-Chih Hsu, and Der-Chin Su, “ Measurement of wavelength shift by using surface plasmon resonance heterodyne interferometry,” Optics Communications 209,167-172 (2002). [6] B. Culshaw and J. Dakin, Optical fiber Sensors: Components and subsystems (Artech House Norwood, 1996). [7] N. K. Berger, B. Levit, A. Bekker, and B. Fischer, “Real-time optical spectrum analyser based on chirped fibre Bragg gratings,” Electronics Letter 36, 1189 –1191 (2000). [8] M. G. Davis and R. F. O'Dowd, ”Time-resolved spectral measurement system using a Fabry-Perot interferometer,” Optical Engineering 33, 3937-3941 (1994). [9] D. A. Flavin, R. McBride, and J. D. C. Jones, “Short scan interferometric and multiplexing of fiber Bragg grating sensors” Optics Communications 170, 347-353 (1999). [10] M.C. Hsieh, J.Y. Lin, Y.F. Chen and C.O. Chang, “Measurement of small wavelength shifts based on total internal reflection heterodyne interferometry” Chinese Optics Letters 14, (2016). [11] S. T. Lin, and Y. R. Cheng, “Wavelength shift determination using a dual-path heterodyne Mach-Zehnder interferometer,” Optics Communications 266, 50-54(2006). [12] S. M. Melle. K Liu and R.M. Measures, “A Passive Wavelength Discrimination System for Guidedwave Bragg Gratings”, IEEE Photonics Technology Letters 4, 516-518 (1992). [13] Ju-Yi Lee and Der-Chin Su, “Common-path heterodyne interferometric detection scheme for measuring wavelength shift ”, Optics Communications 162, 7-10 (1999). [14] A. D. Kersey, T. A. Berkoff, and W. W. Morey, “Fiber-optic Bragg grating strain sensor with drift-compensated high-resolution interferometric wavelength-shift detection” Optics Letters 18, 72-74 (1993). [15] R. M. A. Azzam and N. M. Bashara, “Application of generalized ellipsometry to anisotropic crystals,” Journal of the Optical Society of America 64, 128 -133 (1974). [16] J. Y. Lin, K. H. Chen, and J. H. Chen, “Simple method for measuring small wavelength differences,” Optical Engineering 46, 113605-113608 (2007). [17] M. C. Hsieh, Y. H. Chiu, S. F. Lin, J. Y. Chang, C. O. Chang, and H. K. Chiang, “Amplification of the Signal Intensity of Fluorescence-Based Fiber-Optic Biosensors Using a Fabry-Perot Resonator Structure,” Sensors 15, 3565-3574 (2015). [18] C. M. Wu, “Periodic nonlinearity resulting from ghost reflections in heterodyne interferometry,” Optics Communications 215, 13–17 (2003). [19] W. Hou, “Optical parts and the nonlinearity in heterodyne interferometers,” Precision Engineering 30, 337–346 (2006). [20] Y. Liu, C. Kuang,Y. Ku, “Small angle measurement method based on the total internal multi-reflection,” Optics & Laser Technology 44, 1346–1350 (2012). [21] S.F. Wang, M.H Chiu, C.W. Lai, and R.S. Chang, “High-sensitivity small-angle sensor based on the SPR technology and heterodyne interferometry,” Applied Optics 45, 6702-6707(2006). [22] T. Iwasaki, T. Takeshita, Y. Arinaga, and R. Sawada, “Torque measurement device using an integrated micro displacement sensor,” Sensors and Materials 25, 601-608 (2013). [23] X. Xiao, Y. Gao, J. Xiang, and F. Zhou, “Laser-induced thermal effect in surface plasmon resonance,” Analytica Chimica Acta 676, 75-80 (2010). [24] J. Y. Lin and Y. C. Liao, “Small-angle measurement with highly sensitive total-internal-reflection heterodyne interferometer,” Applied Optics 53, 1903-1908 (2014). [25] T. Nakata and M. Watanabe, “Common-path double-pass optical interferometry using a wire-grid polarizer as a reference mirror,” Opticsl Review 15, 276-279 (2008) [26] J.Y. Lin, K.H. Chen, and J.H. Chen, “Measurement of small displacement based on surface plasmon resonance heterodyne interferometry,” Optics and Lasers in Engineering 49, 811–815 (2011). [27] A. Yariv and P. Yeh, Optical waves in crystals (John Wiley & Sons, Inc., 1984). [28] M.A. Green and M.J. Keevers, “Optical properties of intrinsic silicon at 300 K,” Progress in Photovoltaics 3, 189 – 192 (1995). [29] G. E. Jr. Jellison, “Optical functions of silicon determined by two-channel polarization modulation ellipsometry,” Optical Materials 1, 41-47 (1992). [30] M.C. Hsieh, J.Y. Lin, Y.F. Chen and C.O. Chang, “Measurement of small angle based on a (1 0 0) silicon wafer and heterodyne interferometer,” Optical Review 23, 478-491 (2016). [31] E. A. Bahaa Saleh and Carl Teich. Malvin, Fundamentals of Photonics (John Wiley & Sons, Inc. 1991). [32] W. Hou and G. Wilkening, “Investigation and compensation of the nonlinearity of heterodyne interferometers,” Precision Engineering 14, 91-98 (1992). [33] C. M. Wu and R. D. Deslattes, “Analytical modeling of the periodic nonlinearity in heterodyne interferometry,” Applied Optics 37, 6696-6700 (1998). [34] M. H. Chiu, J. Y. Lee, and D. C. Su, “Complex refractive-index measurement based on Fresnel’s equations and the uses of heterodyne interferometry,” Applied Optics 38, 4047-4052 (1999). [35] C. Palmer and E. Loewen, Diffraction grating handbook (Newport, 2005). [36] W. Nasalski, “Elegant Hermite-Gaussian and Laguerre-Gaussian beams at a dielectric interface,” Optica Applicata 40, 615–622 (2010). [37] M. Pisani and M. Astrua, “Angle amplification for nanoradian measurements” Applied Optics 45 1725-1729 (2006). [38] B. Li and J. W. Liang, “Effects of polarization mixing on the dual-wavelength heterodyne interferometer” Applied Optics 36 3668-3672 (1997). [39] K.P. Huang, C. H. Shen, and J. H. Chen, “Common-path Heterodyne Interferometric and Magnetic Sensitivity-enhanced Surface Plasmon Resonance Carbon Monoxide gas sensor” IEEE Seventh International Conference on Sensing Technology 406-408 (2013). [40] Ju-Yi Lee, Li-Wei Mai, Cheng-Chih Hsu, and Yuan-Yuan Sung “Enhanced sensitivity to surface plasmon resonance phase in wavelength-modulated heterodyne interferometry” Optics Communications 289, 28–32 (2013). | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/78222 | - |
dc.description.abstract | 精密定位與定位控制和半導體曝光之波長控制,常是工業用機器與半導體加工的重要議題。為了使加工與製造機具有更高的精度,測量的精度要求,在許多領域便更為重要,如:力學感測、半導體工業、以及光纖通信。
本文提出了光學感測器用於測量波長變化和小角度變化的方法。測量波長變化系統,包括一光柵、一全反射稜鏡與外差干涉儀。外差光束通過光柵,便產生正一階衍射光束,光入射稜鏡內以大於臨界角作全內反射。波長變化將影響正一階光束的衍射角度,使光束於稜鏡內的全反射角度變化,便產生s與p偏振的相位變化。實驗結果和理論模擬證明,其系統靈敏度與解析度優於5°/ nm和0.006 nm與3.1°/ nm和0.0095 nm,可以個別在2nm與5nm的範圍內來實現。 在外差干涉微小角度測量系統,使用光學材料為(1 0 0)矽晶片,建構於微小角度感測器的結構。微小角度測量中,因入射矽晶片的角度變化而產生s與p偏振的相位變化,並使用共光程的方式來比較測試光和參考光訊號;微小角度可因評估相位差而準確地測量。實驗結果呈現,其解析度與靈敏度優於2×10-4°和150(°/ °),量測範圍在0.45°內。在此,同時也提出外差干涉高靈敏系統與多層膜反射結構,它們的優點是可調整的靈敏度與良好的靈敏度。 在六角反射鏡角度測量的系統,提出一新型並可簡單架設之光學測量角度系統;其結構為:氦氖雷射光通過一衰減片並進入分光鏡器,分為兩束光。其反射光作為強度校準光,定義為參考光。透射光作為測試光並進入了一個六角反射鏡,爾後入射至光強度感應器。當六角反射鏡產生一個小的角度旋轉時,雷射光束便產生平移。此雷射光束平移運動將影響光強度感應器上的光斑的面積,而改變量測到的光強度,因於利用光強度變化而辨識角度的變化。為減少在量測中,雷射光源強度不穩定所造成的影響,將測試光強度除以參考光來消除光源不穩定的影響因子。實驗結果解析度與靈敏度優於7.7×10-5°與13000 μW/°,於範圍0.25°內。 | zh_TW |
dc.description.abstract | Precision positioning, position control, and wavelength control of semiconductor exposure machine are usually critical to industrial-use processing machines and semiconductor industry. To facilitate fabrication components with greater precision, the precision measurements are important in many research fields, such as mechanical sensing, semiconductor industry, and optical fiber communication.
This thesis presents methods of the optical sensor for measuring wavelength shifts and small angle variations. The measuring wavelength shifts system consists of a diffraction grating and a total internal reflection heterodyne interferometer. As a heterodyne light beam passes through a grating, the +first-order diffraction beam is generated. The light penetrates into a total internal reflection prism at an angle larger than the critical angle. The wavelength variation will affect the diffractive angle of the + first-order beam, thus inducing phase difference variations of the diffractive light beam emerging from the total internal reflections inside the trapezoid prism. The experimental results and theoretical simulation demonstrated that the sensitivity and resolution levels are superior to 5 deg/nm and 0.006 nm, respectively, can be achieved in a dynamic range of 2 nm, and are superior to 3.1 deg/nm and 0.0095 nm in the range of 5 nm. In the small angle measurement heterodyne interferometer system, the optical material is the crystal orientation (1 0 0) silicon wafer applied to compose a new architecture of small-angle sensor. The small-angle measurement used the phase difference which is dependent on the incident angle at the silicon wafer surface to deduce the angular variation. The proposed architecture is using the common path method and comparing the test and reference signals; thus small-angles can be easily and accurately measured by estimating the phase difference. The experimental results demonstrate the feasibility of this method. The angular resolution and sensitivity levels superior to 2×10−4 deg (3.5×10−6 rad) and 150 (deg/deg), respectively, were attainable in a dynamic range of 0.45 deg. In addition, this thesis also presented two additional measurement systems: highly sensitive heterodyne interferometer system and multi-layered film structure; they achieved the advantage of adjustable and good sensitivity. In the hexagonal mirror small angle measurement system, a new and simple optical mechanism for varying light intensity is proposed to measure small angle variations. A He-Ne laser light beam was passed through an attenuator and into a beam splitter. The reflected light was used as a reference light for calibrating the measurement of intensity. The transmitted light as the test light entered a hexagonal mirror and was reflected by the hexagonal mirror before entering a power detector. When the hexagonal mirror was rotated by a small angle, the motion of the laser beam was translated and hit the sensing zone of power detector. The translational shift of laser beam affects the hitting area of sensing zone in the detector, thereby varying the detection intensity. This variation in light intensity can be employed to measure small-angle variations. In order to reduce the effect of instable source intensity during angular measurements, the test light intensity divided by the reference light. The experimental results demonstrate the feasibility of this method. Angular resolution was 7.7×10−5 deg, within a range of 0.25 deg. | en |
dc.description.provenance | Made available in DSpace on 2021-07-11T14:46:37Z (GMT). No. of bitstreams: 1 ntu-104-D00543001-1.pdf: 2830573 bytes, checksum: 97e0fc3c5ffbac5de576d4c325717363 (MD5) Previous issue date: 2015 | en |
dc.description.tableofcontents | 口試委員會審定書 α
誌謝 i 摘要 ii ABSTRACT iii CONTENTS v LIST OF FIGURES vii Chapter 1 Introduction 1 Chapter 2 Principle 4 2.1 Heterodyne Interferometer 4 2.2 Light Reflection 6 2.3 Total Internal Reflection 9 2.4 The Jones Matrix of Wave Plate 10 2.5 Hexagonal Mirror 11 2.6 Second Harmonic Error and Polarization Mixing Error 12 2.7 Normal Incidence on a Diffraction Grating 14 Chapter 3 Experimental Method 15 3.1 Wavelength Variations Measurement 15 3.2 Mechanical Small Angle Variations Measurement 19 3.2.1 Small Angle Measurement Using the Highly Sensitive Total Internal Reflection 19 3.2.2 Small Angle Measurement Using the Light Reflection 21 3.2.3 Small Angle Measurement Using the Hexagonal Mirror 24 3.2.4 Small Displacement Measurement Based on the Photo Array 27 Chapter 4 Results and Discussion 29 4.1 Wavelength Variations Measurement 29 4.2 Mechanical Small Angle Variations Measurement 33 4.2.1 Small Angle Measurement Using the Highly Sensitive Total Internal Reflection 33 4.2.2 Small Angle Measurement Using the Light Reflection 36 4.2.3 Small Angle Measurement Using the Hexagonal Mirror 44 4.2.4 Small Displacement Measurement Based on the Photo Array 48 Chapter 5 Conclusions and Future Prospects 50 5.1 Conclusion 50 5.2 Future Prospects 51 Reference 52 | |
dc.language.iso | en | |
dc.title | 光反射與外差干涉術應用於波長與微小角度變化量測 | zh_TW |
dc.title | The Application of Light Reflection and Heterodyne Interferometer in the Measurement of Wavelength and Small Angle Variations | en |
dc.type | Thesis | |
dc.date.schoolyear | 104-2 | |
dc.description.degree | 博士 | |
dc.contributor.oralexamcommittee | 謝發華,林俊佑,張簡文添,沈志雄 | |
dc.subject.keyword | 波長變化,微小角度,(1 0 0)矽晶片,外差干涉,六角反射鏡,光學機構設計, | zh_TW |
dc.subject.keyword | wavelength shifts,small-angle,(1 0 0) silicon wafer,heterodyne interferometer,hexagonal mirror,optomechanical design, | en |
dc.relation.page | 55 | |
dc.identifier.doi | 10.6342/NTU201600533 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2016-06-28 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 應用力學研究所 | zh_TW |
顯示於系所單位: | 應用力學研究所 |
文件中的檔案:
檔案 | 大小 | 格式 | |
---|---|---|---|
ntu-104-D00543001-1.pdf 目前未授權公開取用 | 2.76 MB | Adobe PDF |
系統中的文件,除了特別指名其著作權條款之外,均受到著作權保護,並且保留所有的權利。