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標題: | 製備高靈敏度半導體奈米環氣體感測薄膜 Highly sensitive semiconductor nano-ring array based gas sensing layer by using nanosphere lithography |
作者: | Yi-Wen Chen 陳意雯 |
指導教授: | 沈弘俊(Horn-Jiunn Sheen) |
關鍵字: | 奈米球微影術,氧化鋅,金屬氧化物氣體感測器,氣體響應,UV光激發, Nanosphere lithography,ZnO,Gas sensors,UV irradiation, |
出版年 : | 2013 |
學位: | 碩士 |
摘要: | 本研究成功地以奈米球微影術製備了偵測揮發性有機化合物氣體的感測薄膜,主要的優勢在於製作成本低廉且製程簡便,以氧化鋅作為感測材料,並針對此種材料特性,以紫外光進行激發產生光觸媒增加氣體感測訊號。
此感測薄膜具有良好的靈敏度,且在無結構以及具有奈米環結構的基板測試中,本研究所製備的奈米環結構明顯具有較突出的感測效能,此結果顯示本結構有效地增進揮發性有機化合物氣體的偵測訊號。此外,在較低濃度範圍的測試中,此結構所反映出的訊號亦與濃度呈現性關係。 另外,有別以往製備奈米感測薄膜的製程,本研究以製程相對簡單的奈米微影術製備出大面積的單層奈米週期性結構,成功地將此技術與氣體感測結合,製備出高靈敏度的氣體吸附感測薄膜。 In this research, a novel volatile organic compound (VOC) sensing layer was fabricated. The advantage of the fabrication is the low cost and the simple equipment. We use the Zinc Oxide (ZnO) as the sensing material to detect the reduction gas. By the characteristic of oxidation of the surface of ZnO, the oxygen ion will become reduction when the surface is in the environment with volatile organic compound. The sensing layer performance was high sensitivity. By comparison of the substrate with the nano-ring structure and without the structure, the sensitivity of the nano-ring structure was much higher the substrate without structure. Therefore, we can tell from theses detection results that the research did fabricate the useful and efficient gas sensing layer. Besides, during the test of low concentration gas, the signal of the nano-ring structure was linear with the different concentration. On the other hand, we use the nanosphere lithography to fabricate the large monolayer which is different than the other methods and apply this technology to gas sensing area successfully. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/61859 |
全文授權: | 有償授權 |
顯示於系所單位: | 應用力學研究所 |
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