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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 沈弘俊(Horn-Jiunn Sheen) | |
dc.contributor.author | Yi-Wen Chen | en |
dc.contributor.author | 陳意雯 | zh_TW |
dc.date.accessioned | 2021-06-16T13:16:05Z | - |
dc.date.available | 2018-08-08 | |
dc.date.copyright | 2013-08-08 | |
dc.date.issued | 2013 | |
dc.date.submitted | 2013-07-29 | |
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dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/61859 | - |
dc.description.abstract | 本研究成功地以奈米球微影術製備了偵測揮發性有機化合物氣體的感測薄膜,主要的優勢在於製作成本低廉且製程簡便,以氧化鋅作為感測材料,並針對此種材料特性,以紫外光進行激發產生光觸媒增加氣體感測訊號。
此感測薄膜具有良好的靈敏度,且在無結構以及具有奈米環結構的基板測試中,本研究所製備的奈米環結構明顯具有較突出的感測效能,此結果顯示本結構有效地增進揮發性有機化合物氣體的偵測訊號。此外,在較低濃度範圍的測試中,此結構所反映出的訊號亦與濃度呈現性關係。 另外,有別以往製備奈米感測薄膜的製程,本研究以製程相對簡單的奈米微影術製備出大面積的單層奈米週期性結構,成功地將此技術與氣體感測結合,製備出高靈敏度的氣體吸附感測薄膜。 | zh_TW |
dc.description.abstract | In this research, a novel volatile organic compound (VOC) sensing layer was fabricated. The advantage of the fabrication is the low cost and the simple equipment. We use the Zinc Oxide (ZnO) as the sensing material to detect the reduction gas. By the characteristic of oxidation of the surface of ZnO, the oxygen ion will become reduction when the surface is in the environment with volatile organic compound.
The sensing layer performance was high sensitivity. By comparison of the substrate with the nano-ring structure and without the structure, the sensitivity of the nano-ring structure was much higher the substrate without structure. Therefore, we can tell from theses detection results that the research did fabricate the useful and efficient gas sensing layer. Besides, during the test of low concentration gas, the signal of the nano-ring structure was linear with the different concentration. On the other hand, we use the nanosphere lithography to fabricate the large monolayer which is different than the other methods and apply this technology to gas sensing area successfully. | en |
dc.description.provenance | Made available in DSpace on 2021-06-16T13:16:05Z (GMT). No. of bitstreams: 1 ntu-102-R00543070-1.pdf: 7162857 bytes, checksum: d7222d31725f6eb4ce4d0b3e4a207bd6 (MD5) Previous issue date: 2013 | en |
dc.description.tableofcontents | 致謝 II
摘要 III Abstract IV 目錄 V 圖目錄 IX 表目錄 XIII 第1章 緒論 1 1.1 研究動機 1 1.2 微影技術(Lithography)的發展 1 1.2.1 電子束微影技術(Electron-beam lithography) 2 1.2.2 X-ray微影技術(X-ray lithography) 3 1.2.3掃描探針微影技術 3 1.3 奈米球微影技術(Nanosphere lithography; NSL) 4 1.4 自組裝 7 1.4.1 各種自組裝技術 8 1.5 論文架構 12 第2章 自組裝原理及感測機制 13 2.1 自組裝過程作用力分析 13 2.1.1微奈米球體自組裝機制 13 2.2 金屬氧化物氣體感測機制 17 2.2.1 半導體金屬氧化物表面捕捉氣體機制 17 2.2.2氧化鋅材料特性 18 2.2.3 揮發性有機氣體特性 18 2.2.4 氧化鋅光催化反應機制 19 第3章 實驗步驟及設備原理 21 3.1 聚苯乙烯奈米球模板及ZnO網狀結構製備 21 3.1.1基板前處理 22 3.1.2藥品配置 22 3.1.3奈米球塗佈(Polystyrene coating) 23 3.1.4氧化鋅(ZnO)薄膜蒸鍍 24 3.1.5奈米球舉離 24 3.1.6氣體感測 25 3.2 實驗設備原理 25 3.2.1旋轉塗佈機(Spin coater) 26 3.2.2反應式離子蝕刻機(RIE) 26 3.2.3電子束蒸鍍機 27 3.2.4掃描式電子顯微鏡 28 3.2.5四點探針 29 3.2.6 氣相生成系統 31 3.2.7 影像分析軟體 32 3.2.8光吸收量測 33 第4章 實驗結果與討論 34 4.1 ZnO奈米環結構製備 34 4.1.1奈米球自組裝結果討論 34 4.1.2 奈米球蝕刻分析 36 4.1.3 奈米球沉積ZnO膜討論 45 4.1.4奈米球舉離結果 47 4.2 氣體感測 47 4.2.1 光吸收量測 48 4.2.2 UV光增益後,ZnO網狀結構氣體感測結果 49 4.2.3 無結構vs. ZnO網狀結構氣體感測結果 53 4.2.4不同濃度氣體感測結果 54 第5章 結論與未來展望 55 5.1 結論 55 5.2 未來展望 55 Appendix 60 | |
dc.language.iso | zh-TW | |
dc.title | 製備高靈敏度半導體奈米環氣體感測薄膜 | zh_TW |
dc.title | Highly sensitive semiconductor nano-ring array based gas sensing layer by using nanosphere lithography | en |
dc.type | Thesis | |
dc.date.schoolyear | 101-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 田維誠,魏培坤,劉舜維 | |
dc.subject.keyword | 奈米球微影術,氧化鋅,金屬氧化物氣體感測器,氣體響應,UV光激發, | zh_TW |
dc.subject.keyword | Nanosphere lithography,ZnO,Gas sensors,UV irradiation, | en |
dc.relation.page | 60 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2013-07-29 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 應用力學研究所 | zh_TW |
顯示於系所單位: | 應用力學研究所 |
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