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Title: | 放電加工製作彩色氧化鈦薄膜之製程開發與光學色彩研究 The Study of The Optics Characteristics of Colorful Titanium Oxide Thin Layer Manufactured by EDM Process |
Authors: | Pei-Lun Song 宋沛倫 |
Advisor: | 蔡曜陽(Yao-Yang Tsai) |
Keyword: | 氧化鈦反應膜,開路電壓,色彩,一氧化二鈦, Titanium oxide reacted film,Open voltage,Color,Bititanium oxide, |
Publication Year : | 2009 |
Degree: | 碩士 |
Abstract: | 鈦及其合金因具有良好的機械與化學性質而廣泛應用於汽車、航太與生醫等工業,近年來開始應用於民生工業上。鈦金屬的氧化物,除了有耐磨與化學性質穩定的特性,當其為薄膜時更是有著多種色彩,有可觀的商業應用價值。
本研究改良一般商業用放電加工機,使用銅電極加工純鈦工件,介電液為自來水,探討放電加工主要參數對氧化鈦放電反應膜之影響,探討參數包含加工時間、開路電壓、放電電流、放電脈衝時間、放電休止時間、放電發數、放電間隙,以此研究基礎開發不傷害材料表面,僅產生彩色氧化鈦的製程。 研究結果顯示,隨著設定的開路電壓升高,形成的氧化鈦反應膜厚度依序增厚;氧化鈦反應層之顏色會隨電壓從10到240V依序呈現土黃色(10V)、紫色(20V)、靛色(30V)、黃色(70V)、桃紅色(100V)、藍色(130V)、黃綠色(180V)、粉紅色(240V),其餘開路電壓則為前後兩色的過度色彩;放電脈衝時間與放電休止時間的增加均會造成氧化鈦反應層的色彩不均勻;放電電流對氧化鈦反應層色彩沒有影響,但放電電流大於2A後會造成材料產生移除性加工,留下凹坑;放電間隙會影響氧化鈦反應層擴散範圍的大小。 本實驗所形成的氧化鈦反應膜結構,經由XRD與EDS分析為一氧化二鈦,推論本製程為綜合熱化學氧化反應與電化學氧化反應。反應膜厚度在200nm內,折射率隨著光的波長增加而降低,並且隨著反應膜厚度增厚,折射率變化曲線整體向上提昇;而膜厚超過200nm之後,折射率隨著光波長增加的變化趨勢較為平緩;所有氧化鈦反應膜的吸收率則保持穩定。 本研究成功開發氧化鈦放電反應膜製程,相較於陽極處理,產生色彩相似,但本製程簡單、加工速度快、生產效率高、成本低、介電液環保、危險性低。 Titanium and its alloys have been used widely in automotive, aerospace, and biomedical industries for a long time due to its excellent mechanical and chemical properties. They were used in civil industry just in recent years. The oxide of titanium not only has good wear resistance and chemical stabilization, but also displays various colors when it is in thin film form. These attractive and various colors of titanium oxide thin film make itself have considerable commercial benefit. In this study, a commercial EDM machine was reformed to use. The electrode were copper, the workpiece were pure titanium, and dielectric fluid were just tap water. This study investigated the influence of EDM parameters on making titanium oxide reacted thin film by EDM process, including processing time, open voltage, pulse duration, pulse interval, peak current, gap. Finally, colorful titanium oxide thin film manufacturing process without damage on workpiece surface was developed by using the database of this study. The result shows that the reacted film became thicker while higher open voltage. The colors of titanium oxide reacted films were changed by the following open voltage, from 0 to 240 volts: yellow(10V)、purple(20V)、indigo(30V)、golden yellow(70V)、peach(100V)、blue(130V)、yellow green(180V)、pink(240V). The other open voltage produced transitive color which was between the colors produced by the neighbor open voltage. The increasing of pulse duration and pulse interval caused the non-uniform color distribution. The peak current did not influence the color of reacted film. But while peak current was higher then 2A, the craters appeared on the worked surface. The gap influenced the expending area of reacted film. And the results of XRD and EDS analysis show that the structure of reacted film is . This process was inferred that it includes electrochemistric reaction and thermochemistric reaction. Using ellipsometer, we got the variation of index of refraction and absorption in visible light range with different film thickness. Compared with anodizing process, the colorful titanium oxide reacted film with EDM process we developed is simpler, faster, cheaper, having advantages in environment protection and lower hazard. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/43985 |
Fulltext Rights: | 有償授權 |
Appears in Collections: | 機械工程學系 |
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