奈米定位平面運動平台之結構設計與改良

Abstract

本文主要針對高精度平面運動平台之結構設計與傾斜補償設計進行研究。首先，介紹一種現有的高精度平面運動平台。接著透過有限元素分析與實驗，得到此運動平台之結構特性。現有運動平台結構之各種結構響應，諸如運動平台底座之變形量等，便可經由分析取得。另經由溫度分佈實驗得到運動平台於工作達到穩態時之溫度分佈，便可利用有限元素分析得到運動平台之熱變形情形。並發展一套參數化實體模型繪圖程式以自動化更新此運動平台結構模型之主要設計參數，並配合最佳化程式，對運動平台之載台結構進行最佳化設計。最後提出一傾斜補償設計，利用磁力來校正載台移動時的水平度。並由實驗驗證此設計可確實改善載台移動時的傾斜角度。

This thesis studies the structural design and tilt compensation mechanism of a high-precision nano-positioning planar motion stage. First, a high-precision planar motion stage is designed, and structural characteristics of the stage are obtained through finite element analyses and verified with experiment measurements. Structural responses of the stage, such as the deformation of carriage, can be acquired through analyses. Moreover, steady-state temperature distribution of the stage can also be obtained through temperature distribution experiment. With the temperature distribution, thermal deformation of the stage can be analyzed by using finite element analysis. To change the main parameters of the stage conveniently, a parametric drawing program of the stage is developed, and by combining the parametric drawing program and optimum methods, optimum design of the stage carriage can be carried out. At last, a tilt compensation design is proposed to calibrate the levelness of the moving carriage with magnetic forces, and this design is verified from the tilt angle reduction of the moving carriage.