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???org.dspace.app.webui.jsptag.ItemTag.dcfield??? | Value | Language |
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dc.contributor.advisor | 鍾添東(Tien-Tung Chung) | |
dc.contributor.author | Hsun-Fu Chian | en |
dc.contributor.author | 江洵甫 | zh_TW |
dc.date.accessioned | 2021-06-07T17:48:58Z | - |
dc.date.copyright | 2013-03-15 | |
dc.date.issued | 2013 | |
dc.date.submitted | 2013-02-05 | |
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dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/15623 | - |
dc.description.abstract | 本文主要針對高精度平面運動平台之結構設計與傾斜補償設計進行研究。首先,介紹一種現有的高精度平面運動平台。接著透過有限元素分析與實驗,得到此運動平台之結構特性。現有運動平台結構之各種結構響應,諸如運動平台底座之變形量等,便可經由分析取得。另經由溫度分佈實驗得到運動平台於工作達到穩態時之溫度分佈,便可利用有限元素分析得到運動平台之熱變形情形。並發展一套參數化實體模型繪圖程式以自動化更新此運動平台結構模型之主要設計參數,並配合最佳化程式,對運動平台之載台結構進行最佳化設計。最後提出一傾斜補償設計,利用磁力來校正載台移動時的水平度。並由實驗驗證此設計可確實改善載台移動時的傾斜角度。 | zh_TW |
dc.description.abstract | This thesis studies the structural design and tilt compensation mechanism of a high-precision nano-positioning planar motion stage. First, a high-precision planar motion stage is designed, and structural characteristics of the stage are obtained through finite element analyses and verified with experiment measurements. Structural responses of the stage, such as the deformation of carriage, can be acquired through analyses. Moreover, steady-state temperature distribution of the stage can also be obtained through temperature distribution experiment. With the temperature distribution, thermal deformation of the stage can be analyzed by using finite element analysis. To change the main parameters of the stage conveniently, a parametric drawing program of the stage is developed, and by combining the parametric drawing program and optimum methods, optimum design of the stage carriage can be carried out. At last, a tilt compensation design is proposed to calibrate the levelness of the moving carriage with magnetic forces, and this design is verified from the tilt angle reduction of the moving carriage. | en |
dc.description.provenance | Made available in DSpace on 2021-06-07T17:48:58Z (GMT). No. of bitstreams: 1 ntu-102-R94522634-1.pdf: 4087147 bytes, checksum: f92923a0c702a727e660ae4f241be5dd (MD5) Previous issue date: 2013 | en |
dc.description.tableofcontents | 口試委員會審定書 i
誌謝 iii 中文摘要 v ABSTRACT vii CONTENTS ix LIST OF FIGURES xiii LIST OF TABLES xvii LIST OF SYMBOLS xix Chapter 1 Introduction 1 1.1 Paper Review 1 1.2 Research Objective 10 1.3 Thesis Outline 12 Chapter 2 Basic Theories of Structural Analyses and Optimum Design 13 2.1 Static Structural Characteristics in Finite Element Analysis 13 2.2 Natural Frequency and Mode Shape in Finite Element Analysis 13 2.3 Evaluation of Heat Generation and Air Convection Coefficients 14 2.4 Thermal Deformation in Finite Element Analysis 17 2.5 Optimization Design 21 Chapter 3 Structural Analyses of Planar Motion Stage 23 3.1 Configuration of Planar Motion Stage 23 3.2 Finite Element Model of Planar Motion Stage 26 3.3 Prototype of Planar Motion Stage 28 3.4 Modeling of Air Bearings and Experiment 29 3.5 Modal Analysis and Modal Test of Carriage 33 3.5.1 Modal Analysis of carriage 33 3.5.2 Modal Test of Carriage 36 3.6 Thermal Analysis and Experiments 42 3.6.1 Temperature Distribution Analysis 42 3.6.2 Thermal Deformation Analysis 44 3.6.3 Temperature Distribution Measurement 45 Chapter 4 Design Improvement and Fabrication of Planar Motion Stage 51 4.1 Carriage Tilt Problem 52 4.2 Tilt Angle Measurement of Planar Motion Stage 55 4.3 Carriage Tilt Compensation Design 58 4.4 Optimization of New Carriage with Tilt Compensation Design 67 4.5 Carriage Tilt Compensation Experiment of Original Design 70 4.6 Prototype of Improvement Design 73 4.7 Carriage Tilt Compensation Experiment of Improvement Design 74 Chapter 5 Conclusions and Suggestions 77 5.1 Conclusions 77 5.2 Suggestions 77 REFERENCE 79 Appendix A 83 Appendix B 89 B-1 Static Structural Analysis 90 B-2 Modal Analysis 93 Appendix C 97 C-1 *.bat File 97 C-2 *.txt File 97 C-3 AutoCAD LISP File 99 C-4 ANSYS Macro File 100 Vita 101 | |
dc.language.iso | en | |
dc.title | 奈米定位平面運動平台之結構設計與改良 | zh_TW |
dc.title | Structural Design and Improvement of a Nano-Positioning Planar Motion Stage | en |
dc.type | Thesis | |
dc.date.schoolyear | 101-1 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 劉正良(Cheng-Liang Liu),史建中(Chien-Jong Shih) | |
dc.subject.keyword | 平面運動平台,空氣軸承,有限元素法,傾斜補償, | zh_TW |
dc.subject.keyword | Planar motion stage,finite element analysis,tilt compensation,optimum design, | en |
dc.relation.page | 101 | |
dc.rights.note | 未授權 | |
dc.date.accepted | 2013-02-06 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
Appears in Collections: | 機械工程學系 |
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ntu-102-1.pdf Restricted Access | 3.99 MB | Adobe PDF |
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