以市售紅外線距離感測器進行平面壓電馬達的路徑補償控制

Abstract

本研究旨在開發一平面壓電馬達的路徑補償控制系統，以突破過去針對壓電馬達結構設計及驅動參數優化之瓶頸。利用市售平價之紅外線距離感測器，提升補償控制系統之經濟效益，傳統應用於壓電馬達的感測器通常價格高昂，難以符合實驗成本。本研究採用四個市售之平價紅外線距離感測器作為系統之感測部分，透過使用電動推拉力機及雷射位移計的多次反覆測量進行校準，使其能足夠準確判斷平面壓電馬達的即時移動狀況，並使用myRIO-1900 (National Instruments) 作為控制器，實現感測、控制及驅動平面壓電馬達之功能。基於團隊先前研發的二維壓電致動器設計，本研究將其套用至開發的路徑補償控制系統中進行驗證，透過希爾伯特轉換分析方法，最佳化壓電馬達的驅動參數，並使用數值模擬分析與有限元素模擬驗證希爾伯特轉換分析方法的可行性，再利用雷射測振儀觀察壓電馬達結構表面的振動波形，成功驗證最佳化之驅動參數，透過調整路徑補償控制系統中不同修正頻率及平面壓電馬達的總輸入電壓，觀察補償控制系統內之壓電馬達之行走準確度、行走速度及載重能力。相對於開迴路未控制的狀態，本研究所開發之路徑補償控制系統顯著的降低了平面壓電馬達在不同運動方向上的偏移誤差，於+x運動方向的誤差減少了85.9%；於-x運動方向的誤差減少了84.2%；於+y運動方向的誤差減少了41.54%，而於-y運動方向的誤差減少了70.81%，且其最大負載連同結構於-x運動方向能達到160 g荷重，該荷重下的平均速度為-4.69 mm/s，最大偏移誤差為-0.8 mm，驗證了本研究所提出的路徑補償控制系統之可行性。

This study aims to develop a trajectory compensation control system for a planar two-dimensional piezoelectric motor, addressing the previous bottlenecks in piezoelectric motor structural design and driving parameter optimization. It investigates the feasibility of using commercially available, low-cost IR distance measuring sensors to enhance the economic efficiency of the control system, given that traditional sensors for piezoelectric motors are usually expensive and thus do not meet experimental cost constraints. Four IR sensors were calibrated through multiple iterative measurements by an electric push-pull force machine and a laser displacement meter. This enabled accurate real-time assessment of the planar two-dimensional piezoelectric motor's movement. myRIO-1900 (National Instruments) was employed as the controller for control and driving functions. Building on our team's previous two-dimensional piezoelectric actuator design, we integrated it into a trajectory compensation control system for validation. We optimized its driving parameters using Hilbert transform analysis, and its effectiveness was validated through numerical simulations, finite element analysis, and laser vibrometer observations. Compared to an open-loop system, the closed-loop system significantly reduced displacement errors. In the +x direction, the error was reduced by 85.9%, in the -x direction by 84.2%, in the +y direction by 41.54%, and in the -y direction by 70.81%. This reduction in errors is significant as it demonstrates the improved accuracy and precision of the compensation system. The system also achieved a maximum load capacity, including the structure, of 160 g in the -x direction, with an average speed of - 4.69 mm/s and a maximum displacement error of -0.8 mm.