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http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/64208| Title: | 雙端固定石英振盪器研製 Study on the Fabrication of Double-ended Quartz Resonator |
| Authors: | Chia-Ming Chen 陳嘉明 |
| Advisor: | 周傳心 |
| Co-Advisor: | 張簡文添 |
| Keyword: | 低溫石英,蝕刻速率,石英振盪器, α-quartz,etch rates,quartz oscillator, |
| Publication Year : | 2012 |
| Degree: | 碩士 |
| Abstract: | 本文所探討的是以微機電製程在Z-cut低溫石英晶圓(α-Quartz)製作石英振盪器，並設計石英振盪器所需的光罩尺寸，以及電極層的陰影光罩，再利用微機電製程在石英振盪器上鍍上電極，並測量頻率，最後再討論如何改良製程以及減少可能發生的問題。 The purpose of this thesis is to study Z-cut α-Quartz by using MEMS process technology to finish the quartz oscillator. We can design the size of mask for quartz oscillator and the shadow mask for electrode layer. We use MEMS process technology to evaporate metal on quartz oscillator ,and we test the frequency. Finally ,we will discuss how to improve our processes and reduce the problems which may be occur. |
| URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/64208 |
| Fulltext Rights: | 有償授權 |
| Appears in Collections: | 應用力學研究所 |
Files in This Item:
| File | Size | Format | |
|---|---|---|---|
| ntu-101-1.pdf Restricted Access | 5.37 MB | Adobe PDF |
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