以陽極氧化鋁基板製備自組裝多孔隙氧化鋅奈米結構應用於氣體感測增益

Abstract

本研究利用自製的氧化鋁模版，藉由電子束蒸鍍的方式製備自組裝氧化鋅薄膜，最後並應用於有機揮發氣體的感測增益上。研究內容依序可分為三個部分：(1)陽極氧化鋁膜的製程探討、(2)多孔隙氧化鋅薄膜的沉積過程、(3)尋找前述實驗的最佳化參數應用於有機揮發氣體感測上。特性分析的量測使用掃描式電子顯微鏡(SEM)觀察陽極氧化鋁的表面形貌與孔洞深度、氣相生成系統配合四點探針進行氣體感測。本研究證實陽極氧化鋁的奈米孔洞結構會影響氧化鋅薄膜的蒸鍍結果，從原本連續性薄膜變成多孔隙的奈米桿狀氧化鋅結構。應用在氣體感測上，除了能有效增加氣體接觸面積，不規則的多孔隙結構也提升光捕捉的效率，進而增加UV光增益的效果。

Fabrication of self-organized Zinc oxide (ZnO) nanorods shaped by an anodic aluminum oxide (AAO) template for volatile organic compounds (VOCs) gas sensing is presented. ZnO films were deposited on porous AAO templates by electron beam evaporator. The rim of AAO pores could prevent ZnO atoms from forming continuous films. In the applications of gas sensing, because the surface to volume ratio of the isolated nanorods is larger than that of the conventional continuous films, the sensitivity can be markedly increased. The evaporation-coated ZnO films were characterized by field-emission scanning electron microscopy (FE-SEM) to illustrate the morphologies. Four-point probe analysis was conducted to evaluate the gas sensing performance.