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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
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dc.contributor.advisor | 沈弘俊(Horn-Jiunn Sheen) | |
dc.contributor.author | Hao-Chun Chang | en |
dc.contributor.author | 張皓鈞 | zh_TW |
dc.date.accessioned | 2021-06-16T13:24:50Z | - |
dc.date.available | 2018-08-23 | |
dc.date.copyright | 2013-08-23 | |
dc.date.issued | 2013 | |
dc.date.submitted | 2013-07-23 | |
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dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/62045 | - |
dc.description.abstract | 本研究利用自製的氧化鋁模版,藉由電子束蒸鍍的方式製備自組裝氧化鋅薄膜,最後並應用於有機揮發氣體的感測增益上。研究內容依序可分為三個部分:(1)陽極氧化鋁膜的製程探討、(2)多孔隙氧化鋅薄膜的沉積過程、(3)尋找前述實驗的最佳化參數應用於有機揮發氣體感測上。特性分析的量測使用掃描式電子顯微鏡(SEM)觀察陽極氧化鋁的表面形貌與孔洞深度、氣相生成系統配合四點探針進行氣體感測。本研究證實陽極氧化鋁的奈米孔洞結構會影響氧化鋅薄膜的蒸鍍結果,從原本連續性薄膜變成多孔隙的奈米桿狀氧化鋅結構。應用在氣體感測上,除了能有效增加氣體接觸面積,不規則的多孔隙結構也提升光捕捉的效率,進而增加UV光增益的效果。 | zh_TW |
dc.description.abstract | Fabrication of self-organized Zinc oxide (ZnO) nanorods shaped by an anodic aluminum oxide (AAO) template for volatile organic compounds (VOCs) gas sensing is presented. ZnO films were deposited on porous AAO templates by electron beam evaporator. The rim of AAO pores could prevent ZnO atoms from forming continuous films. In the applications of gas sensing, because the surface to volume ratio of the isolated nanorods is larger than that of the conventional continuous films, the sensitivity can be markedly increased. The evaporation-coated ZnO films were characterized by field-emission scanning electron microscopy (FE-SEM) to illustrate the morphologies. Four-point probe analysis was conducted to evaluate the gas sensing performance. | en |
dc.description.provenance | Made available in DSpace on 2021-06-16T13:24:50Z (GMT). No. of bitstreams: 1 ntu-102-R00543014-1.pdf: 7344025 bytes, checksum: 40807ec4275518bc1beddd6efe5f0cea (MD5) Previous issue date: 2013 | en |
dc.description.tableofcontents | 口試委員會審定書 #
致謝 1 中文摘要 2 ABSTRACT 3 目錄 4 圖目錄 6 表目錄 8 第一章 緒論 9 1.1 研究動機 10 1.2 研究目的 10 1.3 論文架構 11 第二章 理論與文獻回顧 12 2.1 多孔性陽極氧化鋁膜 12 2.1.1 成長機制 13 2.1.2 化學反應式 14 2.1.3 操作變數 15 2.1.4 拋光前處理 16 2.1.5 多次陽極化處理 17 2.2 薄膜沉積理論 17 2.3 氧化鋅氣體感測機制 19 第三章 實驗方法 22 3.1 實驗流程與步驟 22 3.1.1 製備陽極氧化鋁模版 22 3.1.2 製備自組裝奈米多孔隙氧化鋅結構 24 3.1.3 有機揮發氣體量測 25 3.2 實驗材料與儀器 27 3.2.1 實驗材料 27 3.2.2 掃描式電子顯微鏡(SEM)量測原理 28 第四章 結果與討論 31 4.1 陽極氧化鋁模版 31 4.1.1 拋光 31 4.1.2 擴孔 32 4.1.3 蝕刻氧化鋁層 35 4.1.4 分支型陽極氧化鋁 36 4.1.5 薄膜式陽極氧化鋁 37 4.2 自組裝奈米多孔隙氧化鋅結構 38 4.2.1 多孔隙氧化鋅形成過程 38 4.2.2 孔洞大小對沉積結果影響 40 4.3 有機氣體量測 43 4.3.1 孔洞大小對氣體量測的影響 43 4.3.2 濃度對飽和時間與靈敏度的影響 44 4.3.3 UV光對氣體響應的增益 45 第五章 結論與未來展望 49 5.1 結論 49 5.2 未來展望 49 References 51 | |
dc.language.iso | zh-TW | |
dc.title | 以陽極氧化鋁基板製備自組裝多孔隙氧化鋅奈米結構應用於氣體感測增益 | zh_TW |
dc.title | Improved sensing performance of self-organized ZnO nanostructures by using anodic aluminum oxide substrate | en |
dc.type | Thesis | |
dc.date.schoolyear | 101-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 田維誠,魏培坤,劉舜維 | |
dc.subject.keyword | 陽極氧化鋁模版,自組裝氧化鋅,氣體感測,四點探針, | zh_TW |
dc.subject.keyword | Anodic aluminum oxide,self-organized ZnO,Gas sensing,4-point probe, | en |
dc.relation.page | 53 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2013-07-24 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 應用力學研究所 | zh_TW |
顯示於系所單位: | 應用力學研究所 |
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