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標題: | 以利薩茹層疊式局部掃描實現高速大範圍之原子力顯微鏡 Based on Lissajous Hierarchical Local Scan to Realize High Speed and Large Range Atomic Force Microscopy |
作者: | Jim-Wei Wu 吳俊緯 |
指導教授: | 傅立成 |
關鍵字: | 原子力顯微鏡,利薩茹掃描軌跡,內部模型原理,互補式順滑模式控制,類神經網路,適應性控制, Atomic force microscopy,Lissajous scan trajectory,internal model principle,complementary sliding mode control,neural network,adaptive control, |
出版年 : | 2013 |
學位: | 博士 |
摘要: | 原子力顯微鏡是一種非常有用的精密量測儀器,此儀器具有奈米等級的解析能力並適用於導體與非導體樣本且不受使用環境所限制,為目前不可或缺的微奈米量測工具。然而,傳統原子力顯微鏡所使用的掃描方式,在軌跡上容易造成掃描器的機械共振問題,且無法去除不必要的掃描區域,因此,對於一個大範圍與高解析度的影像要求,必須要以一個更長的掃描時間來達成,無法給予一個有效率的掃描表現,為目前原子力顯微鏡應用上的主要缺陷。在本論文中, 將以自行開發之原子力顯微鏡系統從三個不同的層面來克服上述問題。
首先,我們採用順滑式利薩茹軌跡並搭配適合此軌跡的先進控制法則,可在不引起水平掃描器震動的情況下提高掃描速率與精度。其次,針對此順滑軌跡的路徑特徵,撰寫掃描路徑演算法則,並利用探針橫過樣本後迴授的高度資訊去除不必要的掃描區域,藉此減少掃描所需時間。 最後,考慮樣本表面形貌的變化情形,在表面劇烈變化的地方提供一個更高解析度的掃描,藉此改善掃描影像的品質,從實際的掃描應用可以證實上述方法之效果。 Atomic force microscopy (AFM) is a very useful measurement instrument. It can scan the conductive and nonconductive samples and without any restriction in the environments of application. Therefore, it has become an indispensable micro/nano scale measurement tool. However, because the raster scan method of the conventional AFM could easily induce the mechanical resonance of the scanner and cannot remove the scan area which is not our interest. Under a requirement for a large range and high resolution sample image which however needs excessive scan time, how to overcome such hurdles becomes the main challenge for AFM applications. In this thesis, we try to approach and resolve these problems with self-designed AFM system from three aspects. First, we use a smooth Lissajous scan trajectory, and apply an advanced controller to realize this kind of trajectory. Since vibration of the lateral scanner will not be induced easily, the scan rate and scan accuracy can thus be increased accordingly. Next, based on the path characteristics of the smooth Lisajous trajectory, we propose a suitable scan algorithm, which initially employs the information on the sample height which the probe is traversing the scan area, and them select the sub-areas of our interest for next phase scan. Overall, such two phase scan reduce the scan time. Finally, considering the varying of sample topography, we provide higher resolution scan on the severe area to improve the scan performance so that a better scan image can be obtained. To validate the effectiveness of the proposed scan methodology, we have conducted extensive experiments and promising results have been acquired. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/5957 |
全文授權: | 同意授權(全球公開) |
顯示於系所單位: | 電機工程學系 |
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檔案 | 大小 | 格式 | |
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ntu-102-1.pdf | 5.13 MB | Adobe PDF | 檢視/開啟 |
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