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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 傅立成 | |
dc.contributor.author | Jim-Wei Wu | en |
dc.contributor.author | 吳俊緯 | zh_TW |
dc.date.accessioned | 2021-05-16T16:18:46Z | - |
dc.date.available | 2017-01-27 | |
dc.date.available | 2021-05-16T16:18:46Z | - |
dc.date.copyright | 2014-01-27 | |
dc.date.issued | 2013 | |
dc.date.submitted | 2013-12-02 | |
dc.identifier.citation | [1] G. Binning, C. F. Quate, and C. Gerber, 'Atomic force microscope,' Physical Review Letters, vol. 56, pp. 930-933, 1986.
[2] F. de Lange, A. Cambi, R. Huijbens, B. de Bakker, Wouter Rensen, Maria Garcia-Parajo, Niek van Hulst and Carl G. Figdor, 'Cell biology beyond the diffraction limit: near-field scanning optical microscopy, ' Journal of Cell Science, 114, 4153-4160, 2001. [3] H. Yamashita, A. Taoka, T. Uchihashi, T. Asano, T. Ando, and Y. Fukumori, 'Single-Molecule Imaging on Living Bacterial Cell Surface by High-Speed AFM,' Journal of Molecular Biology, vol. 422, pp. 300-309, 2012. [4] J. Rouhi, S. Mahmud, S. D. Hutagalung, and N. Naderi, 'Field emission in lateral silicon diode fabricated by atomic force microscopy lithography,' Electronics Letters, vol.48, pp.712 -714, 2012. [5] B. P. Lathi, Linear Systems and Signals, 2nd ed. London, U.K.: Oxford Univ. Press, 2004. [6] D. Croft, G. Shed, and S. Devasia, 'Creep, Hysteresis, and Vibration Compensation for Piezoactuators: Atomic Force Microscopy Application,' Journal of Dynamic Systems Measurement and Control, vol. 123, pp.35-43, 2001. [7] A. Sinno, P. Ruaux, L. Chassagne, S. Topcu, Y. Alayli, G. Lerondel, S. Blaize, A. Bruyant, and P. Royer, 'Enlarged atomic force microscopy scanning scope: Novel sample-holder device with millimeter range,' Review of Scientific Instruments, vol. 78, pp. 095107-7, 2007. [8] J. E. Brian, 'Design of a large measurement-volume metrological atomic force microscope (AFM),' Measurement Science and Technology, vol. 20, p. 084003, 2009. [9] C. Werner, P. C. J. N. Rosielle, and M. Steinbuch, 'Design of a long stroke translation stage for AFM,' International Journal of Machine Tools and Manufacture, vol. 50, pp. 183-190, 2010. [10] Gaoliang Dai, Helmut Wolff, Frank Pohlenz, and Hans-Ulrich Danzebrink, 'A metrological large range atomic force microscope with improved performance,' Review of Scientific Instruments, 80, 043702, 2009. [11] Tong Guo, Longlong Wang, Jinping Chen, Xing Fu and Xiaotang Hu, 'Development of a large-range atomic force microscope measuring system for optical free form surface characterization,' Measurement Science and Technology, 23, 115401, 2012. [12] B. Bhikkaji and S. O. Reza Moheimani, Integral Resonant Control of a Piezoelectric Tube Actuator for Fast Nanoscale Positioning, IEEE/ASME IEEE Transactions on Mechatronics, VOL. 13, NO. 5, OCTOBER 2008 [13] Yuen K. Yong, Bilal Ahmed, and S. O. Reza Moheimani, Atomic force microscopy with a 12-electrode piezoelectric tube scanner, Review of Scientific Instruments 81, 033701, 2010. [14] Takeshi Fukuma,Yasutaka Okazaki, Noriyuki Kodera, Takayuki Uchihashi, and Toshio Ando, High resonance frequency force microscope scanner using inertia balance support, Applied Physics Letters, 92, 243119, 2008. [15] Brian J. Kenton and Kam K. Leang, Design and Control of a Three-Axis Serial-Kinematic High-Bandwidth Nanopositioner, IEEE/ASME IEEE Transactions on Mechatronics, VOL. 17, NO. 2, 2012. [16] Y.K. Yong, S.O.R. Moheimani, and I.R. Petersen, ' High-speed cycloid-scan atomic force microscopy,' Nanotechnology, vol. 21, 365503, 2010. [17] Shao-Kang Hung, 'Spiral Scanning Method for Atomic Force Microscopy,' Journal of Nanoscience and Nanotechnology, vol.10, no.7, pp.4511-4516, 2010. [18] T. Tuma, J. Lygeros, V. Kartik, A. Sebastian, and A. Pantazi ' High-speed multiresolution scanning probe microscopy based on Lissajous scan trajectories,' Nanotechnology, vol. 23, 185501, 2012. [19] B. Song, N. Xi, R. Yang, K. Wai, C. Lai, and C. Qu, 'On-line sensing and visual feedback for atomic force microscopy (AFM) based nano-manipulations,' 2010 IEEE Nanotechnology Materials and Devices Conference (NMDC), vol., no., pp.71,74, 12-15 Oct. 2010. [20] P. I. Chang, H. Peng, J. Maeng, and S. B. Andersson, 'Local raster scanning for high-speed imaging of biopolymers in atomic force microscopy,' Review of Scientific Instruments , vol.82, no.6, pp.063703,063703-7, Jun 2011. [21] G. Li, Y. Wang, and L. Liu, 'Drift Compensation in AFM-Based Nanomanipulation by Strategic Local Scan,' IEEE Transactions on Automation Science and Engineering, vol.9, no.4, pp.755,762, Oct. 2012. [22] Hui Xie and S. Régnier, 'High-Efficiency Automated Nanomanipulation With Parallel Imaging/Manipulation Force Microscopy,' IEEE Transactions on Nanotechnology, vol.11, no.1, pp.21,33, Jan. 2012. [23] Jim-Wei Wu, Kuan-Chia Huang, Ming-Li Chiang, Mei-Yung Chen, and Li-Chen Fu, 'Modeling and Controller Design of a Precision Hybrid Scanner for Application in Large Measurement-Range Atomic Force Microscopy,' IEEE Transactions on Industrial Electronics, In press. [24] J. Curie and P. Curie, 'Développement, par pression, de l’électricité polaire dans les cristaux hémièdres à faces inclinées,' Comptes rendus, vol. 91, pp. 294-295, 1880. [25] P. J. Chen and S. T. Montgomery, 'A macroscopic theory for the existence of the hysteresis and butterfly loops in ferroelectricity,' Ferroelectrics, vol. 23, pp. 199-207, 1980. [26] Y.-K. Wen, 'Method for Random Vibration of Hysteretic Systems,' Journal of the Engineering Mechanics Division, vol. 102, pp. 249-263, 1976. [27] M. J. Todd and K. L. Johnson, 'A model for coulomb torque hysteresis in ball bearings,' International Journal of Mechanical Sciences, vol. 29, pp. 339-354, 1987. [28] B. D. Coleman and M. L. Hodgdon, 'A constitutive relation for rate-independent hysteresis in ferromagnetically soft materials,' International Journal of Engineering Science, vol. 24, pp. 897-919, 1986. [29] F. Preisach, 'Über die magnetische Nachwirkung,' Zeitschrift für Physik A Hadrons and Nuclei, vol. 94, pp. 277-302, 1935. [30] M. Goldfarb and N. Celanovic, 'Modeling piezoelectric stack actuators for control of micromanipulation,' IEEE Transactions on Control Systems, vol. 17, pp. 69-79, 1997. [31] E.-T. Hwu, K.-Y. Huang, S.-K. Hung, and I.-S. Hwang, 'Measurement of Cantilever Displacement Using a Compact Disk/Digital Versatile Disk Pickup Head,' Japanese Journal of Applied Physics, vol. 45, pp. 2368-2371, 2006. [32] P. K. Hansma, J. P. Cleveland, M. Radmacher, D. A. Walters, P. E. Hillner, M. Bezanilla, M. Fritz, D. Vie, H. G. Hansma, C. B. Prater, J. Massie, L. Fukunaga, J. Gurley, and V. Elings, 'Tapping mode atomic force microscopy in liquids,' Applied Physics Letters, vol. 64, pp. 1738-1740, 1994. [33] B. Francis and W. Wonham, 'The internal model principle of control theory,' Automatica, vol. 12, pp. 457-465, 1976. [34] Y.-S. Lu, 'Sliding-Mode Disturbance Observer with Switching-Gain Adaptation and Its Application to Optical Disk Drives,' IEEE Transactions on Industrial Electronics, vol.56, no.9, pp.3743-3750, Sept. 2009. [35] S. Galeani, L. Menini, and A. Potini, 'Robust Trajectory Tracking for a Class of Hybrid Systems: An Internal Model Principle Approach,' IEEE Transactions on Automatic Control, vol.57, no.2, pp.344-359, Feb. 2012. [36] R. Doraiswami and L. Cheded, 'Kalman filter for parametric fault detection: an internal model principle-based approach,' IET Control Theory & Applications, vol.6, no.5, pp.715-725, March 15 2012. [37] S. Polit, and J. Dong, 'Development of a High-Bandwidth XY Nanopositioning Stage for High-Rate Micro-/Nanomanufacturing,' IEEE/ASME Transactions on Mechatronics, vol.16, no.4, pp.724,733, Aug. 2011. [38] P. R. Dahl, and R. Wilder, “Math model of hysteresis in piezoelectric actuators for precision pointing system,” in Proceedings of the Eighth Annual Rocky Mountain Conference. Keystone, CO, UNITED STATES: Guidance and control 1985, Feb 1985, pp. 61–88. [39] B. Cappella and G. Dietler, 'Force-distance curves by atomic force microscopy,' Surface Science Reports, vol. 34, pp. 1-104, 1999. [40] B. V. Derjaguin, V. M. Muller, and Y. P. Toporov, 'Effect of contact deformations on the adhesion of particles,' Journal of Colloid and Interface Science, vol. 53, pp. 314-326, 1975. [41] J. N. Israelachvili, Intermolecular and surface forces / Jacob N. Israelachvili. London ; San Diego: Academic Press, 1991. [42] S. Ciraci, E. Tekman, A. Baratoff, and I. P. Batra, 'Theoretical study of short- and long-range forces and atom transfer in scanning force microscopy,' Physical Review B, vol. 46, pp. 10411-10422, 1992. [43] 范光照 and 張郭益, '精密量測, 5th ed.,' 高立, 2007. [44] C. D. Frank, 'High-resolution, high-speed, low data age uncertainty, heterodyne displacement measuring interferometer electronics,' Measurement Science and Technology, vol. 9, p. 1024, 1998. [45] L.-S. Chen, 'Servo System Design and Analysis for Fabricating Large Area Sub-Micron-Period Interference Gratings,' MS, NTU, 2008. [46] A. Bazaei, Y. K. Yong, and S. O. Reza Moheimani, 'High-speed Lissajous-scan atomic force microscopy: Scan pattern planning and control design issues,' REVIEW OF SCIENTIFIC INSTRUMENTS, 83, 063701 2012. [47] S. Moon, S-W Lee, M. Rubinstein, Brian J. F. Wong, and Z. Chen, 'Semi-resonant operation of a fiber-cantilever piezotube scanner for stable optical coherence tomography endoscope imaging, 'Opt. Express,18, 21183, 2010. [48] S. A. Hojjatoleslami and J. Kittler, 'Region Growing: A New Approach,' IEEE TRANSACTIONS ON IMAGE PROCESSING, VOL. 7, NO. 7, 1998. [49] P. A. Ioannou and J. Sun, Robust adaptive control: PTR Prentice-Hall, 1996. [50] Kuan-Lin Hung, Yuan-Zhi Peng, Jim-Wei Wu, Mei-Yung Chen, and Li-Chen Fu, 'Design and implementation of an electromagnetically damped positioner with flexure suspension,' 2011 IEEE International Conference on Control Applications (CCA), , 2011, pp. 1062-1067. [51] J.-P. Su and C.-C. Wang, 'Complementary sliding control of non-linear systems,' International Journal of Control, vol. 75, pp. 360-368, 2002/01/01 2002. [52] S.-J. Huang, K.-S. Huang, and K.-C. Chiou, 'Development and application of a novel radial basis function sliding mode controller,' Mechatronics, vol. 13, pp. 313-329, 2003. [53] M. Chen and W.-H. Chen, 'Sliding mode control for a class of uncertain nonlinear system based on disturbance observer,' International Journal of Adaptive Control and Signal Processing, vol. 24, pp. 51-64, 2010. | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/5957 | - |
dc.description.abstract | 原子力顯微鏡是一種非常有用的精密量測儀器,此儀器具有奈米等級的解析能力並適用於導體與非導體樣本且不受使用環境所限制,為目前不可或缺的微奈米量測工具。然而,傳統原子力顯微鏡所使用的掃描方式,在軌跡上容易造成掃描器的機械共振問題,且無法去除不必要的掃描區域,因此,對於一個大範圍與高解析度的影像要求,必須要以一個更長的掃描時間來達成,無法給予一個有效率的掃描表現,為目前原子力顯微鏡應用上的主要缺陷。在本論文中, 將以自行開發之原子力顯微鏡系統從三個不同的層面來克服上述問題。
首先,我們採用順滑式利薩茹軌跡並搭配適合此軌跡的先進控制法則,可在不引起水平掃描器震動的情況下提高掃描速率與精度。其次,針對此順滑軌跡的路徑特徵,撰寫掃描路徑演算法則,並利用探針橫過樣本後迴授的高度資訊去除不必要的掃描區域,藉此減少掃描所需時間。 最後,考慮樣本表面形貌的變化情形,在表面劇烈變化的地方提供一個更高解析度的掃描,藉此改善掃描影像的品質,從實際的掃描應用可以證實上述方法之效果。 | zh_TW |
dc.description.abstract | Atomic force microscopy (AFM) is a very useful measurement instrument. It can scan the conductive and nonconductive samples and without any restriction in the environments of application. Therefore, it has become an indispensable micro/nano scale measurement tool. However, because the raster scan method of the conventional AFM could easily induce the mechanical resonance of the scanner and cannot remove the scan area which is not our interest. Under a requirement for a large range and high resolution sample image which however needs excessive scan time, how to overcome such hurdles becomes the main challenge for AFM applications. In this thesis, we try to approach and resolve these problems with self-designed AFM system from three aspects.
First, we use a smooth Lissajous scan trajectory, and apply an advanced controller to realize this kind of trajectory. Since vibration of the lateral scanner will not be induced easily, the scan rate and scan accuracy can thus be increased accordingly. Next, based on the path characteristics of the smooth Lisajous trajectory, we propose a suitable scan algorithm, which initially employs the information on the sample height which the probe is traversing the scan area, and them select the sub-areas of our interest for next phase scan. Overall, such two phase scan reduce the scan time. Finally, considering the varying of sample topography, we provide higher resolution scan on the severe area to improve the scan performance so that a better scan image can be obtained. To validate the effectiveness of the proposed scan methodology, we have conducted extensive experiments and promising results have been acquired. | en |
dc.description.provenance | Made available in DSpace on 2021-05-16T16:18:46Z (GMT). No. of bitstreams: 1 ntu-102-D96921004-1.pdf: 5258122 bytes, checksum: 1a0d1b80a43cbc5da7004c529c6a89b6 (MD5) Previous issue date: 2013 | en |
dc.description.tableofcontents | 摘要 i
Abstract ii Table of Content iv Table of Acronyms vii List of Figures viii List of Tables xii Chapter 1 Introduction 1 1.1 Motivation 1 1.2 Literature Survey 3 1.2.1 Large range AFM 3 1.2.2 High speed AFM 6 1.2.3 Local scan AFM 10 1.3 Contribution 13 1.4 Thesis Organization 15 Chapter 2 Preliminary 17 2.1 Fundamentals of Electromagnetic Actuation 17 2.1.1 Lorentz force principle 18 2.1.2 Properties of permanent magnet 19 2.2 Fundamentals of Piezoelectric Actuation 23 2.2.1 Piezoelectric effect 23 2.2.2 Hysteresis phenomenon 24 2.3 Basic Principles of CD/DVD Pickup Head 26 2.3.1 Sensing metrodology 28 2.3.2 Focusing and tracking actuator 30 2.4 Operation Principle of AFM System 31 2.5 Internal Model Principle (IMP) 34 Chapter 3 System Design and Dynamic Modeling 37 3.1 AFM Measuring System 38 3.1.1 Probe oscillating system 39 3.1.2 Probe dynamic detection 41 3.2 AFM Scanning System 42 3.3 Dynamic Modeling and Formulation 44 3.3.1 Modeling od xy-hybrid scanner 45 3.3.2 AFM scanning disturbance 50 3.3.3 System identification 54 3.4 Laser Interferometer Sensing System 58 3.5 Hardware Equipments 60 Chapter 4 Lissajous Hierarchical Local Scan (LHLS) 63 4.1 Scan Trajectory Analysis 64 4.1.1 Conventional raster scan trajectory 65 4.1.2 Smooth Lissajous scan trajectory 67 4.2 Lissajous Scan Trajectory Formulation 68 4.2.1 Trajectory fundamental principle 68 4.2.2 Mapping Lissajous points to raster points 73 4.3 Lissajous Hierarchical Local Scan Algorithm 76 4.3.1 First layer scan 78 4.3.2 Second or higher layer scan 84 Chapter 5 Controller Design 89 5.1 Scan Trajectory Assignment for xy-Hybrid Scanner 89 5.2 IMP based Adaptive Complementary Sliding Mode Control 91 5.2.1 Problem formulation 92 5.2.2 Control algorithm 94 5.2.3 Stability analysis 97 5.3 IMP based Neural Network Complementary Sliding Mode Control 103 5.3.1 Problem formulation 104 5.3.2 Control algorithm 107 5.3.3 Stability analysis 110 Chapter 6 Experiments 115 6.1 Experimental Setup 115 6.2 Hysteresis Compensation 117 6.3 Scan Trajectory Tracking 118 6.3.1 Triangular waveform with PI control 118 6.3.2 Cosine waveform with PI control 120 6.3.3 Cosine waveform with IMP based NNCSMC 121 6.4 Numerical Simulation of Lissajous Hierarchical Local Scan 123 6.5 AFM Scanning Application 129 6.5.1 Standard Grating with Raster Scan 129 6.5.2 Standard Grating with Lissajous Scan 131 6.5.3 Human blood cells with Lissajous Hierarchical Local Scan 133 Chapter 7 Conclusions 139 Reference 141 List of Publication 146 | |
dc.language.iso | en | |
dc.title | 以利薩茹層疊式局部掃描實現高速大範圍之原子力顯微鏡 | zh_TW |
dc.title | Based on Lissajous Hierarchical Local Scan to Realize High Speed and Large Range Atomic Force Microscopy | en |
dc.type | Thesis | |
dc.date.schoolyear | 102-1 | |
dc.description.degree | 博士 | |
dc.contributor.oralexamcommittee | 范光照,周至宏,洪紹剛,連豊力,蔡清池 | |
dc.subject.keyword | 原子力顯微鏡,利薩茹掃描軌跡,內部模型原理,互補式順滑模式控制,類神經網路,適應性控制, | zh_TW |
dc.subject.keyword | Atomic force microscopy,Lissajous scan trajectory,internal model principle,complementary sliding mode control,neural network,adaptive control, | en |
dc.relation.page | 147 | |
dc.rights.note | 同意授權(全球公開) | |
dc.date.accepted | 2013-12-02 | |
dc.contributor.author-college | 電機資訊學院 | zh_TW |
dc.contributor.author-dept | 電機工程學研究所 | zh_TW |
顯示於系所單位: | 電機工程學系 |
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