CMOS MEMS生醫感測系統單晶片

Abstract

對於未來更有效率的醫療服務提升, 本篇論文提出4種整合生醫感測致動技術, 微機電半導體後製程與CMOS系統單晶片(System on a Chip, SoC)電路設計之生醫感測系統。在第一顆晶片CMOS MEMS連續式血糖感測SoC (ISCAS 2012)中, 一個9 mm2的CMOS感測晶片透過CMOS MEMS技術將葡萄糖敏感之高分子Hydrogel材料整合於 MEMS Capacitive Bio-sensor中, 透過血糖濃度變化所造成Hydrogel的膨脹收縮特性改變Bio-sensor電容值, 能連續監測血糖變化. 第二顆晶片為智慧CMOS MEMS全血快速篩檢SoC (ISSCC 2015), 在8.89mm2的面積內實現Highly Integrated Lab-on-a Chip, 並透過Chopper Amplifier類比感測電路與微控器實現智慧全自動血液快速篩檢晶片, 搭配不同之Bio-probe抗體能夠快速檢測多種Biomarkers. 第三顆晶片透過電解液體生成氣泡進而產生動力, 此具移動力量之CMOS Locomotive SoC (ISSCC 2014)提供了一個能夠搭載Bio-sensor & Bio-actuator的體內移動式醫療晶片平台, 欲用於植入式醫療應用. 而在基礎醫學研究探討上, 我們嘗試建立利用液態金屬電極GaIn之非侵入式果蠅心電(ECG)訊號感測系統(PLoS One 2014)。在系統架構上本篇論文是利用整合生醫感測器(Biosensor), 類比前端電路(Analog front end circuit), 類比數位轉換器(Analog-to-digital converter), 微控制器(Microcontroller)與數位訊號處理單元(Digital signal processing unit)和無線收發機(Wireless transceiver)成一生醫感測系統, 並透過0.35與0.18um製程實現晶片實作。 預期利用這些生醫感測SoC晶片能為人類提供下一世代的醫療服務技術，並提升醫療資源使用之效率。

To improve efficiency of future medical service, this paper proposes four integrated biomedical system on a chip (SoC) by using MEMS post-process and CMOS IC technology. In the first chip, a 9 mm2 CMOS MEMS continuous glucose sensing SoC (ISCAS 2012) has been designed by integrating glucose-sensitive molecular hydrogel material with a MEMS capacitive bio-sensor by using CMOS MEMS technology. Hydrogel's expansion and contraction characteristics caused by glucose concentration changes can change capacitance of biosensor. By continuously reading out the capacitance change, human’s glucose concentration can be monitored preciously and continuously. The second chip is the smart CMOS assay SoC (ISSCC 2015), which implements the highly integrated Lab-on-a Chip technologies in an area of 8.89 mm2 die. With using different antibodies, the chip integrated chopper amplifier and microcontroller can quickly detect a variety of biomarkers of human’s whole blood. The third chip is a locomotive SoC (ISSCC 2014). By applying voltage on the water, the electrolysis generates bubbles, which provides the energy for chip’s movement. The locomotive SoC can be integrated with biosensors and bio-actuators as an medical platform for the advanced implantable application in the future. In the forth part, for the fundamental medical research, we have attempted to establish a non-invasive drosophila electrocardiogram (ECG) signal sensing system (PLoS One 2014) by using liquid metal electrode GaIn. The structure of this paper is based on integrating the biosensor, analog front-end circuit, analog-to-digital converter, microcontroller, digital signal processing unit and the wireless transceiver as biomedical sensing SoCs for different medical applications. To implement the SoCs, the CMOS 0.35 and 0.18 um technologies are adopted in this paper. It is expected that using these biomedical sensing SoC can provide next-generation medical services, and improving the efficiency of the use of medical resources.