旋塗式玻璃微透鏡應用在紫外光發光二極體取光效率提升

Abstract

本論文中我們提出一個低成本的製程方法將旋塗式玻璃微透鏡製作至紫外光發光二極體上。旋塗式玻璃微透鏡是利用光阻熱處理及多次翻模技術製程，這能有效的降低製程成本。在我們的實驗中，我們製作了不同直徑大小的旋塗式玻璃微透鏡，分別有200, 150, 100及50微米的直徑，並且得到光萃取率提升分別為7.31%, 10.35%, 14.01% 及21.86%。同時，我們也製作了不同形狀的微透鏡，分別有圓形、正方形及六角形，並且得到光萃取率提升分別為7.31%, 9.6%及13.8%。我們利用透鏡圖形的優化，實驗上能有效地將光萃取率提升至21.86%，並且不會破壞任何紫外光發光二極體的電性。

In this paper, we present a cost-effective method to fabricate spin on glass microlens array (SOG MLA) on ultra-violet light emitting diodes (UV LEDs). SOG microlens array was formed by thermal reflow technique and multiple replication processes which can reduce the cost of solution process. In our experiments, we fabricated different diameter size SOG microlens arrays whose diameter of each size was about 200, 150, 100 and 50 μm. The light extraction efficiency is improved by 7.31%, 10.35%, 14.01% and 21.86%, respectively. We also fabricated the different shape SOG microlenses, which was circular, square and hexagonal. The light extraction efficiency is improved by 7.31%, 9.6% and 13.8% for circular, square and hexagonal SOG MLA, respectively. By applying optimized lens pattern, an increase of 21.86% in improved light extraction efficiency is achieved experimentally, without detrimental effect to the electrical performance of the UV LEDs.