二維奈米碳管應變感測器

Abstract

自從1991年發現奈米碳管後，相關研究得知奈米碳管受到應變時電性會改變，我們欲利用此項特性來設計、製作出可量測兩個方向應變的感測器。 經由有限元素軟體模擬來設計出二維方向的奈米碳管應變感測器，設計出尺寸為4mm* 4mm* 0.5mm，且每個感測器上可量測到八組訊號，我們可透過奈米機電製程技術和化學氣相沈積法來製作出所設計的二維奈米碳管應變感測器。 將二維奈米碳管應變感測器黏著於待測物上，當待測物產生應變時，感測器上的電訊號會有相對應的反應，我們記錄下應變和電訊號，計算後可以得知二維奈米碳管應變感測器的應變規因子最大為740左右，最小的應變解析度可達0.0000099。

Since carbon nanotubes were found in 1991, the researches related to carbon nanotubes have discovered that the electric property of carbon nanotubes would change when the carbon nanotubes subjected to strains. We want to use this special electric character to design and fabricate a strain sensor which can detect two dimension strains. Through finite element software, we can simulate and design the two dimension carbon nanotubes strain gauge. The size of device is 4mm* 4mm* 0.5mm, and eight electric signals will be obtained in one device. Using Nano-Electric-Mechanical-systems technology and Chemical Vapor Deposition, we can fabricate the two dimension carbon nanotubes strain gauge. The device is attached to the material, and the electric signals of the device will change when the material is subjected to strains. According the data of the electric signals and the strains from the experiments, we can get the maximum Gauge Factor is about 740 and the minimum resolution of strain can reach 0.0000099.