Please use this identifier to cite or link to this item:
http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/30910
Title: | 矽奈米線的定向成長與場效電晶體的製作 The Electric-Field-Directed Growth of SiNW and the Fabrication of SiNW Field Effect Transistor |
Authors: | Jiann-Kai Wang 王建凱 |
Advisor: | 李嗣涔(Si-Chen Lee) |
Keyword: | 矽奈米線, SiNW, |
Publication Year : | 2007 |
Degree: | 碩士 |
Abstract: | 本篇論文以VLS 機制於低壓化學氣相沈系統中成長矽奈米線(SiNW)。其次,在成長過程中外加電場來達到定位、定向的效果。最後,我們成功利用矽奈米線製備不摻雜和P 型場效電晶體,並量測矽奈米線場效電晶體的各種電性加以比較。 The growth of silicon nanowires (SiNWs) with different diameters of Au nanoparticles as catalyst has been systematically investigated via vapor-liquid-solid (VLS) mechanism using the low pressure chemical vapor deposition. The electric-field-directed growth SiNWs were developed to orient the SiNW to grow in a fixed direction and to the designed position by Coulomb electric force. The SiNWs FET was fabricated successfully. Single crystal undoped and p-type SiNWs have been prepared and characterized by current-voltage measurements. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/30910 |
Fulltext Rights: | 有償授權 |
Appears in Collections: | 電子工程學研究所 |
Files in This Item:
File | Size | Format | |
---|---|---|---|
ntu-96-1.pdf Restricted Access | 11.87 MB | Adobe PDF |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.