以高速伺服提升原子力顯微鏡之奈米加工性能

Abstract

本論文藉由原子力顯微鏡進行奈米加工之控制設計。過去本實驗室以成功設計控制器使原子力顯微鏡於2D方向進行奈米圖形加工，並使用不同演算法使樣品表面的材料有推擠、排開的效果；但奈米加工的過程需花費較多時間。本篇論文顯示，經由調整控制器，可明顯增快加工速度，並且設計LQG with I控制器，經由模擬、實驗，證明可有效降低因增快加工速度而產生的振動，此外本篇文已成功實驗做出3D奈米加工。

This thesis first time demonstrated the use of scanning probe microscope (SPM) lithography for three-dimensional nano-machining. The previous researches have applied different AFM tip forces to produce scraping marks with different depths. Our previous study also showed the need of high performance servo to produce even scraping marks. In this thesis, we first introduced the procedure for high performance tip servo design. The results with different servo controllers showed a dramatic difference when the controller was not properly tuned. The system was then used to produce square marks at different depths. With the limited working depth for the SPM lithography, our experiments showed very clear distinction among the different depth marks. With very careful tool path design, we showed how to machine slanted surfaces and eventually the machining of a pyramidal structure.