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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 顏家鈺 | |
| dc.contributor.author | Hsu-Yu Chang | en |
| dc.contributor.author | 張旭佑 | zh_TW |
| dc.date.accessioned | 2021-06-13T01:22:11Z | - |
| dc.date.available | 2008-07-24 | |
| dc.date.copyright | 2007-07-24 | |
| dc.date.issued | 2007 | |
| dc.date.submitted | 2007-07-16 | |
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Rugar, “Thermomechanical writing with an atomic force microscope,” Appl. Phys. Lett., Vol. 61, 1992. [22] Mamin H., “Thermal writing using a heated atomic force tip,” Appl. Phys. Lett. Vol. 69, 1996 [23] Vettiger P., G. Cross, M. Despont, U. Drechsler, U. Dürig, B. Gotsmann, W. Häberle, M. A. Lantz, H. E. Rothuizen, R. Stutz, and G. K. Binnig “The “Millipede”-Nanotechnology Entering Data Storage,” IEEE Transactions on Nanotechnology, Vol. 1, No. 1, March 2002. [24] Vettiger P., M. Despont, U. Drechsler, U. Du¨rig, W. Ha¨ berle, M. I. Lutwyche, H. E. Rothuizen, R. Stutz, R. Widmer, G. K. Binnig, “More Than One Thousand Tips for Future AFM Data Storage,” IBM J. Res. Develop. Vol. 44, No. 3, MAY 2000. [25] M. Ashhab, M. V. Salapaka, M. Dahleh, and I. Mezic, “Control of Chaos in Atomic Force Microscopes,” Proceedings of the American Control Conference, Albuquerque, New Mexico June 1997 [26] F. M. Battiston, M. Bammerlin, C. Loppacher, R. Luthi, E. Meyer, and H.-J. 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| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/29862 | - |
| dc.description.abstract | 本論文藉由原子力顯微鏡進行奈米加工之控制設計。過去本實驗室以成功設計控制器使原子力顯微鏡於2D方向進行奈米圖形加工，並使用不同演算法使樣品表面的材料有推擠、排開的效果；但奈米加工的過程需花費較多時間。本篇論文顯示，經由調整控制器，可明顯增快加工速度，並且設計LQG with I控制器，經由模擬、實驗，證明可有效降低因增快加工速度而產生的振動，此外本篇文已成功實驗做出3D奈米加工。 | zh_TW |
| dc.description.abstract | This thesis first time demonstrated the use of scanning probe microscope (SPM) lithography for three-dimensional nano-machining. The previous researches have applied different AFM tip forces to produce scraping marks with different depths. Our previous study also showed the need of high performance servo to produce even scraping marks. In this thesis, we first introduced the procedure for high performance tip servo design. The results with different servo controllers showed a dramatic difference when the controller was not properly tuned. The system was then used to produce square marks at different depths. With the limited working depth for the SPM lithography, our experiments showed very clear distinction among the different depth marks. With very careful tool path design, we showed how to machine slanted surfaces and eventually the machining of a pyramidal structure. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-13T01:22:11Z (GMT). No. of bitstreams: 1 ntu-96-R94522807-1.pdf: 19398991 bytes, checksum: c96b7826cdd09cfadddd21aa0bab89ba (MD5) Previous issue date: 2007 | en |
| dc.description.tableofcontents | 摘要 I
ABSTRACT II 目錄 III 表目錄 V 圖目錄 VI 第一章 緒論 1 1.1 前言 1 1.2 文獻回顧 2 1.3 研究動機與貢獻 4 1.4 論文架構 5 第二章 原子力顯微鏡系統 6 2.1 原子力顯微鏡介紹 6 2. 2 原子力顯微鏡硬體架構 7 2.2.1 AFM作用原理 7 2.2.2 壓電圓管 9 2.2.3 探針懸臂樑 11 2.2.4 光位移感測器(Position Sensitive Photo Detector, PSPD) 12 2. 3 實驗硬體與軟體設備 13 2.3.1 硬體設備 13 2.3.2 軟體設備 20 第三章 控制器設計與模擬 23 3.1 系統識別 23 3.2 PI控制器設計與模擬 26 3.3 LQG with I控制器設計與模擬 30 第四章 實驗結果 41 4.1 各軸步階測試 41 4.1.1 PI控制器的結果 41 4.1.2 LQG with I控制器的結果 48 4.2 平面加工測試 55 4.2.1 圓與三角波微影（PI控制） 55 4.2.2 方陣微影（PI控制和LQG with I控制） 58 4.2.3 字型微影（PI控制和LQG with I控制） 62 4.3 立體加工測試 64 4.3.1 階梯1微影（PI控制和LQG with I控制） 64 4.3.2 階梯2微影（PI控制和LQG with I控制） 68 4.3.3 金字塔微影（PI控制和LQG with I控制） 71 4.4 掃描試片測試 76 4.4.1 標準試片掃描 76 4.4.2 微影字型掃描 78 第五章 結論與未來展望 80 參考文獻 81 | |
| dc.language.iso | zh-TW | |
| dc.subject | LQG with I控制器 | zh_TW |
| dc.subject | 原子力顯微鏡(AFM) | zh_TW |
| dc.subject | 安定時間 | zh_TW |
| dc.subject | 振動 | zh_TW |
| dc.subject | settle time | en |
| dc.subject | Atomic Force Microscope(AFM) | en |
| dc.subject | LQG with I Controller | en |
| dc.subject | vibration | en |
| dc.title | 以高速伺服提升原子力顯微鏡之奈米加工性能 | zh_TW |
| dc.title | A High Speed Servo Design for AFM Nano-machining | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 95-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 吳光鐘,李志法,郭志暐 | |
| dc.subject.keyword | 原子力顯微鏡(AFM),安定時間,振動,LQG with I控制器, | zh_TW |
| dc.subject.keyword | Atomic Force Microscope(AFM),settle time,vibration,LQG with I Controller, | en |
| dc.relation.page | 83 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2007-07-18 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
| 顯示於系所單位： | 機械工程學系 | |
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