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Title: | 應用於顯示器之電熱驅動雙平衡位置光學微機電開關的設計與量測 Electrothermally Actuated Micro Electro Optical Switches with Double Equilibrium Positions for Displays - Designs and Measurement |
Authors: | Shao-An Chien 簡紹安 |
Advisor: | 蔡睿哲 |
Keyword: | 微機電系統,光開關,栓鎖卡榫,雙穩態結構樑,電熱驅動, Microelectromechanical systems,optical switch,latching mechanism,bistable beam structure,electrothermal actuation, |
Publication Year : | 2015 |
Degree: | 碩士 |
Abstract: | 在這篇論文中將展示一個透過SOIMUMPs製程製作的雙穩態光學微機電開關晶片,此製程是由美國MEMSCAP公司提供。此光學微機電開關晶片預期應用於平面顯示器,取代目前液晶顯示器中的液晶調光層。晶片中包含光學微機電開關中不同功能的測試性元件、栓鎖卡榫式微機電開關及雙穩態結構樑式微機電開關。不同功能的測試性元件所量測之特性將是未來整合微機電開關的基礎;栓鎖卡榫式微機電開關已成功展示出其具有雙穩態特性,不須提供任何能量即可保持於穩定平衡狀態,而能量的消耗僅用於穩態間的切換;雙穩態結構樑式微機電開關目前則不具有雙穩態特性。此光學微機電開關分別在全開與全關的狀態下量測到的光功率為32.26 μW及5.842 μW,對比度達5.522。 In this thesis, we will demonstrate a bistable optical MEMS switch fabricated with the SOIMUMPs process. The process is developed by MEMSCAP Inc.. The bistable optical MEMS switch will be used in flat display panel to replace the liquid crystal layer which currently used in liquid crystal display. The different functional testing components, latching optical switch and bistable optical switch are included in this research. The test result of different functional components are the foundation of integrating all testing components to optical switch in the future. Latching optical switch has demonstrated the concept of bistable effect. It requires no power input at the stable position The power will be consumed only when the stable state being changed. In the experiment, bistable optical switch have not shown the concept of bistable effect. The optical power of the optical switch is evaluated at 32.26 μW when switched on and 5.842 μW when switched off. The contrast ratio is 5.522. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/19759 |
Fulltext Rights: | 未授權 |
Appears in Collections: | 光電工程學研究所 |
Files in This Item:
File | Size | Format | |
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ntu-104-1.pdf Restricted Access | 3.95 MB | Adobe PDF |
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