請用此 Handle URI 來引用此文件：
http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/19759完整後設資料紀錄
| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 蔡睿哲 | |
| dc.contributor.author | Shao-An Chien | en |
| dc.contributor.author | 簡紹安 | zh_TW |
| dc.date.accessioned | 2021-06-08T02:17:31Z | - |
| dc.date.copyright | 2015-10-12 | |
| dc.date.issued | 2015 | |
| dc.date.submitted | 2015-09-30 | |
| dc.identifier.citation | [1] T. Brosnihan, R. Payne, J. Gandhi, S. Lewis, L. Steyn, M. Halfman, and N. Hagood, 'Pixtronix digital micro shutter display technology – A MEMS display for low power mobile multimedia displays,' Proc. of SPIE 7594, MOEMS and Miniaturized Systems, 759408, pp. 1-9, Feb. (2010) [2] N. Hagood, R. Barton, T. Brosnihan, J. Fijol, J. Gandhi, M. Halfman, R. Payne, and J. L. Steyn, 'A direct-view MEMS display for mobile applications,' SID Symposium Digest of Technical Papers, vol. 38, pp. 1278-1281, Jul. (2007) [3] J. Gandhi, J. H. Kim, N. Hagood, L. Steyn, J. Fijol, T. Brosnihan, S. Lewis, G. Fike, R. Barton, and M. Halfman, R. Payne, 'High image quality of ultra-low power digital micro-shutter based display technology,' SID Symposium Digest of Technical Papers, vol. 40, pp. 532-535, Jul. (2009) [4] J. L. Steyn, T. Brosnihan, J. Fijol, J. Gandhi, N. Hagood, M. Halfman, S. Lewis, R. Payne, and J. Wu, 'A MEMS digital microshutter (DMS™) for low-power high brightness displays,' Proc. Opt. MEMS Nanophoton, pp. 73-74, Aug. (2010) [5] J. Gandhi, J. H. Kim, N. Hagood, L. Steyn, J. Fijol, T. Brosnihan, S. Lewis, G. Fike, M. Halfman, and R. Payne, 'Sunlight readability of digital micro shutter based display technology,' SID Symposium Digest of Technical Papers, vol. 41, pp. 834-837, May (2010) [6] E. Buckley, 'Pixtronix DMS technology for head-up displays,' SID Vehicles and Interfaces Conference, Oct. (2011) [7] D. Shim, 'MEMS based micro optical switch for display devices,' Proc. of SPIE 8475, Liquid Crystals, 84750L, pp. 1-6, Oct. (2012) [8] D. Shim, W. Kim, and H. Choi, 'Fabrication of vertical moving micro-optical switch for display applications,' Proc. of SPIE 8616, MOEMS and Miniaturized Systems, 86160J, pp.1-6, Mar. (2013) [9] Toni Järvenpää, 'Measuring color breakup of stationary image in field-sequential-color displays,' Journal of the Society for Information Display, Vol. 13, No. 2, pp. 139-144, Feb. (2005) [10] Y. K. Cheng, Y. P. Huang, Y. R. Cheng, and H. P. D. Shieh, 'Two-field scheme: spatiotemporal modulation for field sequential color LCDs,' Journal of Display Technology, Vol. 5, No. 10, pp. 385-390, Oct. (2009) [11] C. H. Chen, F. C. Lin, Y. T. Hsu, Y. P. Huang, H. P. D. Shieh, 'A field fequential color LCD based on color fields arrangement for color breakup and flicker reduction,' Journal of Display Technology, Vol. 5, No. 1, pp. 34-39, Feb. (2009) [12] F. C. Lin, Y. Zhang, and E. H. A. Langendijk, 'Color breakup suppression by local primary desaturation in field-sequential color LCDs,' Journal of Display Technology, Vol. 7, No. 2, pp. 55-61, Feb. (2011) [13] A. Q. Liu, X. M. Zhang, V. M. Murukeshan, Q. X. Zhang, Q. B. Zou, and S. Uppili, 'An optical crossconnect (OXC) using drawbridge micromirrors,' Sensors and Actuators a-Physical, vol. 97-8, pp. 227-238, Apr. (2002) [14] C. A. Chen, and Y. Chiu, 'Flip-Up micro scanning mirror with vertical comb drive assembled by simple push operations,' Proc. Optical MEMS and Nanophotonics, Istanbul, Turkey, 2011, pp. 189-190, Aug. (2011) [15] Y. Kogita, Y. Hirai, O. Tabata, and T. Tsuchiya, 'Double-side-drive electrostatic optical chopper for time-resolved Raman spectroscopy,' Proc. 2014 International Conference on Optical MEMS and Nanophotonics (OMN), Glasgow, Scotland, UK, 2014, pp. 65-66, Aug. (2014) [16] S. Pal and H. Xie, 'Distributed and lumped element models for a bimorph-actuated micromirror,' Journal of Micromechanics and Microengineering, vol. 20, pp. 1-11, Apr. (2010) [17] M. J. Sinclair, 'A high force low area MEMS thermal actuator,' Proc. Thermal and Thermomechanical Phenomena in Electronic Systems Intersociety Conference, Las Vegas, U.S.A., 2000, pp. 127-132, May (2000) [18] D. Girbau, A. Lkaro, and L. Pradell, 'RF MEMS switches based on the buckle-beam thermal actuator,' Proc. Microwave Conference, Munich, Germany, 2003, pp. 651-654, Oct. (2003) [19] L. Que, J. S. Park, and Y. B. Gianchandani, 'Bent-beam electro-thermal actuators for high force applications,' Proc. Micro Electro Mechanical Systems, Orlando, U.S.A., 1999, pp. 31-36, Jan. (1999) [20] J. H. Comtois, V. M. Bright, and M. W. Phipps, 'Thermal microactuators for surface-micromachining processes,' Proc. of SPIE 2624, Micromachined Devices and Components, pp.10-21, Sept. (1995) [21] J. R. Reid, V. M. Bright, and J. H. Comtois, 'Force measurements of a polysilicon thermal micro-actuator,' Proc. SPIE 2882, Micromachined Devices and Components II, pp.296-306, Sept. (1996) [22] D. L. Wilcox, and L. L. Howell, 'Fully compliant tensural bistable micromechanisms (FTBM),' Journal of Microelectromechanical Systems, Vol. 14, No. 6, pp. 1223-1235, Dec. (2005) [23] D. Zhu, and S. P. Beeby, 'A coupled bistable structure for broadband vibration energy harvesting,' The 17th International Conference Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2013 EUROSENSORS XXVII), 2013, pp. 446-449, Jun. (2013) [24] E. J. Garcia, M. A. Polosky, T. P. Swiler, R. J. Shul, and D. L. Luck , 'Design and development of a latching micro optical switch,' Design, Test, Integration and Packaging of MEMS/MOEMS, 2009, pp. 353-358, Apr. (2009) [25] A. Cowen, G. Hames, D. Monk, S. Wilcenski, and B. Hardy, 'SOIMUMPs Design Handbook,' Rev. 8.0：MEMSCAP Inc.. [26] C. C. Wu, 'Fabrication, testing and characterization on micro compliant bistable micromechanism and study on properties of microspring,' Ph.D. dissertation, National Tsing Hua University, 2013. [27] K. E. Petersen, 'Silicon as a mechanical material,' Proceedings of the IEEE, Vol. 70, No. 5, pp. 420-457, May (1982) [28] D. A. Wang, H. T. Pham, and Y. H. Hsieh, 'Dynamical switching of an electromagnetically driven compliant bistable mechanism,' Sensors and Actuators A: Physical, Vol. 149, pp. 143-151, Jan. (2009) [29] C. Lee, and C. Y. Wu, 'Study of electrothermal V-beam actuators and latched mechanism for optical switch,' Journal of Micromechanics and Microengineering, Vol. 15, pp. 11-19, Jan. (2005) [30] S. A. Chien, Y.H. Liang, and J. C. Tsai, 'Miniature optical switches for flat-panel displays,' Proc. 2015 International Conference on Optical MEMS and Nanophotonics (OMN), Jerusalem, Israel, 2015, Mo5.09-1- Mo5.09-2, Aug. (2015) | |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/19759 | - |
| dc.description.abstract | 在這篇論文中將展示一個透過SOIMUMPs製程製作的雙穩態光學微機電開關晶片，此製程是由美國MEMSCAP公司提供。此光學微機電開關晶片預期應用於平面顯示器，取代目前液晶顯示器中的液晶調光層。晶片中包含光學微機電開關中不同功能的測試性元件、栓鎖卡榫式微機電開關及雙穩態結構樑式微機電開關。不同功能的測試性元件所量測之特性將是未來整合微機電開關的基礎；栓鎖卡榫式微機電開關已成功展示出其具有雙穩態特性，不須提供任何能量即可保持於穩定平衡狀態，而能量的消耗僅用於穩態間的切換；雙穩態結構樑式微機電開關目前則不具有雙穩態特性。此光學微機電開關分別在全開與全關的狀態下量測到的光功率為32.26 μW及5.842 μW，對比度達5.522。 | zh_TW |
| dc.description.abstract | In this thesis, we will demonstrate a bistable optical MEMS switch fabricated with the SOIMUMPs process. The process is developed by MEMSCAP Inc.. The bistable optical MEMS switch will be used in flat display panel to replace the liquid crystal layer which currently used in liquid crystal display. The different functional testing components, latching optical switch and bistable optical switch are included in this research. The test result of different functional components are the foundation of integrating all testing components to optical switch in the future. Latching optical switch has demonstrated the concept of bistable effect. It requires no power input at the stable position The power will be consumed only when the stable state being changed. In the experiment, bistable optical switch have not shown the concept of bistable effect. The optical power of the optical switch is evaluated at 32.26 μW when switched on and 5.842 μW when switched off. The contrast ratio is 5.522. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-08T02:17:31Z (GMT). No. of bitstreams: 1 ntu-104-R02941024-1.pdf: 4049037 bytes, checksum: 202451ae76010331041e6aa3b3b004d8 (MD5) Previous issue date: 2015 | en |
| dc.description.tableofcontents | 口試委員會審定書 # 誌謝 i 中文摘要 ii ABSTRACT iii 目錄 iv 圖目錄 vii 表目錄 xi Chapter 1 前言 1 1.1 微機電系統 1 1.2 應用於顯示技術之光學微機電開關 1 1.2.1 Digital Micro Shutter (DMS) 1 1.2.2 Micro-optical switch (MOS) 3 1.3 場序式顯示技術(Field Sequential Color, FSC) 4 1.4 微機電開關驅動方法 6 1.4.1 靜電驅動 6 1.4.2 電熱驅動 7 1.5 雙穩態結構 8 1.6 研究動機 9 Chapter 2 光學微機電開關原理分析及設計 10 2.1 微型開關出光原理分析及設計 10 2.2 微機電開關驅動原理分析及設計 11 2.2.1 V字型電熱驅動器設計原理分析 11 2.2.2 U字型電熱驅動器設計原理分析 13 2.3 雙穩態結構分析及設計 13 2.3.1 雙穩態結構樑設計原理分析 14 2.3.2 栓鎖卡榫式結構設計原理分析 15 2.4 設計及製程 15 Chapter 3 測試性元件量測 18 3.1 V字型電熱驅動器測試元件 18 3.2 U字型電熱驅動器測試元件 20 3.3 雙穩態結構樑測試元件 21 3.4 位移放大結構測試性元件 23 3.4.1 夾具式位移放大結構 24 3.4.2 斜面式位移放大結構 25 Chapter 4 實驗及結果 26 4.1 微機電開關之雙穩態特性結果呈現 26 4.1.1 探針驅動之栓鎖卡榫式微機電開關 26 4.1.2 探針驅動之雙穩態結構樑式微機電開關 27 4.2 微機電開關光功率量測 28 Chapter 5 結論與未來工作及建議 34 5.1 結論 34 5.2 未來工作及建議 35 5.2.1 具雙穩態特性的雙穩態結構樑 35 5.2.2 新的驅動方式 35 5.2.3 新形式之微機電開關 37 5.2.4 微機電開關設計建議 38 REFERENCES 40 | |
| dc.language.iso | zh-TW | |
| dc.title | 應用於顯示器之電熱驅動雙平衡位置光學微機電開關的設計與量測 | zh_TW |
| dc.title | Electrothermally Actuated Micro Electro Optical Switches with Double Equilibrium Positions for Displays － Designs and Measurement | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 104-1 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 孫家偉,呂志偉 | |
| dc.subject.keyword | 微機電系統,光開關,栓鎖卡榫,雙穩態結構樑,電熱驅動, | zh_TW |
| dc.subject.keyword | Microelectromechanical systems,optical switch,latching mechanism,bistable beam structure,electrothermal actuation, | en |
| dc.relation.page | 43 | |
| dc.rights.note | 未授權 | |
| dc.date.accepted | 2015-10-01 | |
| dc.contributor.author-college | 電機資訊學院 | zh_TW |
| dc.contributor.author-dept | 光電工程學研究所 | zh_TW |
| 顯示於系所單位： | 光電工程學研究所 | |
文件中的檔案：
| 檔案 | 大小 | 格式 | |
|---|---|---|---|
| ntu-104-1.pdf 未授權公開取用 | 3.95 MB | Adobe PDF |
系統中的文件，除了特別指名其著作權條款之外，均受到著作權保護，並且保留所有的權利。