長行程閉迴路雙軸奈米定位平台之開發

Abstract

在奈米定位技術領域中，如何實現精確的長行程位移控制能力是一個重要的研究方向，相關技術可應用於高解析度顯微鏡成像、精密零件組裝、以及先進製造技術等不同領域。慣性摩擦式壓電致動器透過黏滑驅動機制可實現長行程且高精度之位移，但需要配合精密之位移感測器方能實現精密且準確之定位。本論文提出了一種新型的XY軸奈米定位平台。不同於以往的設計，此定位平台之X與Y軸分別具有60 mm與100 mm的長行程定位能力，並可透過光學編碼器進行即時位置回饋控制，顯著提高了系統的控制準確性。此外，本研究開發了一種三段式的移動控制策略，結合了全速步進、慢速步進以及閉回路定位控制。此控制策略使得定位平台在保持長行程位移能力的同時，亦能達到400 nm的重複定位精度與4 nm的解析度。

In the field of nanopositioning technology, precise long-travel displacement control is a significant research direction with various applications such as high-resolution imaging, precision assembly, and advanced manufacturing. By utilizing the stick-slip driving mechanism, inertia friction piezoelectric actuators can achieve both long-range and high-precision displacement. However, a precise displacement sensor is required to achieve accurate positioning. This thesis introduced a novel XY-axis nanopositioning stage, which had equipped long travel ranges of 60 mm and 100 mm for the X and Y axes, respectively. Moreover, optical encoders were adopted to complete real-time position feedback control, which significantly improved the positioning accuracy. Furthermore, a three-stage motion control strategy including full-speed stepping, slow-speed stepping, and closed-loop positioning modes was developed. This control strategy enabled the stage to achieve a repeatability of 400 nm and a resolution of 4 nm.