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http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/93993完整後設資料紀錄
| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 廖先順 | zh_TW |
| dc.contributor.advisor | Hsien-Shun Liao | en |
| dc.contributor.author | 陳泓升 | zh_TW |
| dc.contributor.author | Hong-Sheng Tan | en |
| dc.date.accessioned | 2024-08-14T16:08:41Z | - |
| dc.date.available | 2024-08-15 | - |
| dc.date.copyright | 2024-08-13 | - |
| dc.date.issued | 2024 | - |
| dc.date.submitted | 2024-08-07 | - |
| dc.identifier.citation | [1] PiezoDrive, “Piezoelectric tube scanners,” PiezoDrive. [Online]. Available: https://www.piezodrive.com/actuators/piezoelectric-tube-scanners/. [Accessed: Jun. 24, 2024].
[2] Physik Instrumente, “Displacement Modes,” Physik Instrumente.[Online]. Available:https://www.pi-usa.us/en/expertise/technology/piezo-technology/properties-piezo-actuators/displacement-modes. [Accessed: Jun. 24, 2024]. [3] Physik Instrumente (PI), "P-111 to P-153 PICA Shear Actuators," Datasheet, Apr.2018.[Online].Available:https://www.physikinstrumente.com/fileadmin/user_upload/physik_instrumente/files/datasheets/P-111-P-153-Datasheet.pdf. [Accessed: Jun. 24, 2024]. [4] H. S. Liao, Z. R. Guo, H. S. Tan, K. Y. Huang, I. S. Hwang and E. T. Hwu, "Astigmatic detection system with feedback mechanism for calibrating driving Waveform of Piezoelectric Actuators," IEEE Transactions on Instrumentation and Measurement, vol. 72, pp. 1-7, 2023 [5] L. Ma, J. Xiao, S. Zhou, L. Sun, "A piezoelectric inchworm actuator of linear type using symmetrical lever amplification," Proceedings of the Institution of Mechanical Engineers, Part N: Journal of Nanoengineering and Nanosystems, vol. 229, no. 4, pp. 172-179, 2015. [6] S. W. Lee, K.G. Ahn, and J. Ni, "Development of a piezoelectric multi-axis stage based on stick-and-clamping actuation technology," Smart materials and structures, vol. 16, pp. 2354-2367, Oct. 2007. [7] P. Sun, H. Yu, and H. Zhang, "A Novel Piezo Inertia Actuator Inspired by Motion Mode of Steam Train’s Transmission Mechanism," IEEE Access, vol. 11, pp. 54388-54392, 2023. [8] H.S. Liao, C. Werner, R. Slipets, P. E. Larsen, I.S. Hwang, T.J. Chang, H. U. Danzebrink, K.Y. Huang, and E.T. Hwu, "Low-cost, open-source XYZ nanopositioner for high-precision analytical applications," HardwareX, vol. 11, p. e00317, 2022. [9] A. Stephens, “How does hysteresis affect piezo actuator performance?,” Linear Motion Tips, Aug. 7, 2019. [Online]. Available:https://www.linearmotiontips.com/how-does-hysteresis-affect-piezo-actuator-performance/. [Accessed: Jun. 24, 2024]. [10] HLSensor, “Piezoelectric Actuators: Principles and Applications,” HLSensor, [Online]. Available: https://www8.hlsensor.com/index.php/article/detail-96. [Accessed: Jun. 24, 2024]. [11] Quantum Devices, “Incremental Encoder Output,” Quantum Devices, [Online]. Available: https://www.quantumdev.com/incremental-encoder-output/. [Accessed: Jun. 24, 2024]. [12] I.S. Hwang, E.T. Hwu, K.Y. Huang, C.S. Chang, H.S. Liao, W.M. Wang, Y.H. Chen, C.H. Chen, C.H. Cheng, and H.F. Huang., “Astigmatic Detection System: New Tool for Precision Measurements,” TIRI, vol. 200, pp. 46-62, Sep. 2014. [Online]. Available: https://www.tiri.narl.org.tw/Files/Doc/Publication/InstTdy/200/02000460.pdf. [Accessed: Jun. 24, 2024]. [13] National Instruments, “NI sbRIO-9637 Specifications,” National Instruments, [Online].Available:https://www.ni.com/docs/zh-TW/bundle/sbrio-9637-specs/page/specs.html. [Accessed: Jun. 24, 2024]. [14] Celera Motion, “Mercury II MII6000 Encoder Datasheet,” Celera Motion, [Online]. Available:https://www.celeramotion.com/optical-sensors/wp-content/uploads/sites/2/2019/04/Data_Sheet-Mercury_II_MII6000.pdf. [Accessed: Jun. 24, 2024]. [15] Thorlabs, “R2L2S1N1 Dimensions Drawing,” Thorlabs, [Online]. Available: https://www.thorlabs.com/drawings/7d871058f7918b66-DC2F26FD-9008-2E12-D79076B170D6D094/R2L2S1N1-AutoCADPDF.pdf. [Accessed: Jun. 24, 2024]. [16] UIP International, “Flange Bolt Torque Sequence,” [Online]. Available: https://www.uipintl.com/products/gaskets/flange-bolt-torque-sequence/. [Accessed: Jun. 24, 2024]. | - |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/93993 | - |
| dc.description.abstract | 在奈米定位技術領域中，如何實現精確的長行程位移控制能力是一個重要的研究方向，相關技術可應用於高解析度顯微鏡成像、精密零件組裝、以及先進製造技術等不同領域。慣性摩擦式壓電致動器透過黏滑驅動機制可實現長行程且高精度之位移，但需要配合精密之位移感測器方能實現精密且準確之定位。本論文提出了一種新型的XY軸奈米定位平台。不同於以往的設計，此定位平台之X與Y軸分別具有60 mm與100 mm的長行程定位能力，並可透過光學編碼器進行即時位置回饋控制，顯著提高了系統的控制準確性。此外，本研究開發了一種三段式的移動控制策略，結合了全速步進、慢速步進以及閉回路定位控制。此控制策略使得定位平台在保持長行程位移能力的同時，亦能達到400 nm的重複定位精度與4 nm的解析度。 | zh_TW |
| dc.description.abstract | In the field of nanopositioning technology, precise long-travel displacement control is a significant research direction with various applications such as high-resolution imaging, precision assembly, and advanced manufacturing. By utilizing the stick-slip driving mechanism, inertia friction piezoelectric actuators can achieve both long-range and high-precision displacement. However, a precise displacement sensor is required to achieve accurate positioning. This thesis introduced a novel XY-axis nanopositioning stage, which had equipped long travel ranges of 60 mm and 100 mm for the X and Y axes, respectively. Moreover, optical encoders were adopted to complete real-time position feedback control, which significantly improved the positioning accuracy. Furthermore, a three-stage motion control strategy including full-speed stepping, slow-speed stepping, and closed-loop positioning modes was developed. This control strategy enabled the stage to achieve a repeatability of 400 nm and a resolution of 4 nm. | en |
| dc.description.provenance | Submitted by admin ntu (admin@lib.ntu.edu.tw) on 2024-08-14T16:08:41Z No. of bitstreams: 0 | en |
| dc.description.provenance | Made available in DSpace on 2024-08-14T16:08:41Z (GMT). No. of bitstreams: 0 | en |
| dc.description.tableofcontents | 致謝 I
摘要 II Abstract III 目次 IV 圖次 VI 表次 IX 一、 緒論 1 1.1 研究背景 1 1.2 文獻回顧 2 1.2.1壓電致動器之類型 2 1.2.2壓電致動器的延伸機構 4 1.2.3慣性摩擦致動器 5 1.3 研究目的 7 1.4 内容簡介 8 二、壓電致動器平台原理 9 2.1 壓電特性 9 2.2 慣性壓電致動器原理 10 2.3 增量式光學編碼器原理 11 2.4 像散式光學讀取頭 13 三、實驗架構 15 3.1 系統架構 15 3.2 實驗儀器 16 3.2.1 嵌入式控制器 17 3.2.2 高壓放大器 18 3.2.3 積層式壓電塊 18 3.2.4 光學編碼器 19 3.2.5 雷射位移量測儀 20 3.2.6 光學讀取頭以及其訊號處理電路板 21 3.2.7 R2L2S1N1 標準片 22 3.3 壓電平台之構成組裝圖 23 3.4 壓電平台之組裝 26 3.4.1 致動機構之組裝流程 26 3.4.2 致動機構之安裝 28 3.5 對角交叉鎖緊法 31 3.5.1 Y 軸機構鎖固注意事項 32 3.5.2 X 軸機構鎖固注意事項 33 3.6 軟體架構 34 3.6.1 FPGA 功能 36 3.6.2 電腦端 39 3.7 定位邏輯 40 3.8 掃描邏輯 43 四、實驗結果與討論 46 4.1 壓電致動器的非缐性 46 4.2 XY 軸三角波不同驅動頻率對比 48 4.3 XY 軸鋸齒波不同驅動頻率對比 50 4.4 XY 軸鋸齒波不同驅動電壓對比 52 4.5 最小步進量討論 56 4.6 步進10 mm 來回對比 58 4.7 壓電平台應用於大範圍光學輪廓掃描儀 62 五、結論與未來展望 65 參考文獻 66 附錄A sbRIO-9637規格表 68 附錄B Mercury II 6000規格表 70 附錄C LK-H052規格表 74 附錄D PCQ4M規格表 78 | - |
| dc.language.iso | zh_TW | - |
| dc.subject | 長行程位移 | zh_TW |
| dc.subject | 慣性摩擦機制 | zh_TW |
| dc.subject | 光學編碼器 | zh_TW |
| dc.subject | XY軸奈米定位平台 | zh_TW |
| dc.subject | XY-axis nanopositioning stage | en |
| dc.subject | inertial friction mechanism | en |
| dc.subject | long-travel displacement | en |
| dc.subject | optical encoder | en |
| dc.title | 長行程閉迴路雙軸奈米定位平台之開發 | zh_TW |
| dc.title | Development of a Long-Range Closed-Loop XY Nanopositioning Stage | en |
| dc.type | Thesis | - |
| dc.date.schoolyear | 112-2 | - |
| dc.description.degree | 碩士 | - |
| dc.contributor.oralexamcommittee | 胡恩德;高豐生 | zh_TW |
| dc.contributor.oralexamcommittee | En-Te Hwu;Feng-Sheng Kao | en |
| dc.subject.keyword | XY軸奈米定位平台,慣性摩擦機制,長行程位移,光學編碼器, | zh_TW |
| dc.subject.keyword | XY-axis nanopositioning stage,inertial friction mechanism,long-travel displacement,optical encoder, | en |
| dc.relation.page | 78 | - |
| dc.identifier.doi | 10.6342/NTU202402947 | - |
| dc.rights.note | 同意授權(限校園內公開) | - |
| dc.date.accepted | 2024-08-09 | - |
| dc.contributor.author-college | 工學院 | - |
| dc.contributor.author-dept | 機械工程學系 | - |
| dc.date.embargo-lift | 2029-07-31 | - |
| 顯示於系所單位： | 機械工程學系 | |
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