基於CMOS-MEMS共振開關之接收信號強度指示器之檢測區域提升

Abstract

本論文提出一個基於輕敲模式之共振開關之無限信號強度接收指示器（Resoswitch based Received Signal Strength Indicator, RSSI），利用共振開關待機零功耗的特性與操作在輕敲模式下其輕敲帶寬（Tapping bandwidth）之大小與輸入電壓有線性關係之效果，建立一套事件觸發的定位系統，為特定情況發生時使用。此外為了使該系統有較大的偵測範圍，本研究使用弧形樑作為阻擋塊窄化共振開關器之梭子與阻擋塊之間的間隙，以增加無限信號強度接收指示的偵測範圍。 本論文所使用的測試元件為委託國家晶片中心在CMOS-MEMS 0.35 µm 2P4M製程平台製作，晶片製作完成後在國立臺灣大學工學院暨電機資訊學院奈米機電系統研究中心完成晶片的後製程（濕蝕刻），並於完成後製程後交由則葳實業有限公司進行陶瓷封裝。此外本研究也利用環形天線與LabView 軟體驗證無限信號強度接收指示系統之系統功能。最後本論文將於最後討論基於共振開關之無限信號強度接收指示符之系統目前的問題與未來研究發展方向。

This thesis presents a Resoswitch-based Received Signal Strength Indicator (RSSI) system utilizing the characteristics of zero quiescent power of the resoswitch and the linear relationship between tapping bandwidth and input voltage in tapping mode. This system is designed for event-triggered positioning in specific situations. Additionally, to achieve a larger detection region, an arc-beam structure is used as a stopper to narrow the gap spacing between the shuttle of resoswitch and the stopper. The chip fabrication was supported by Taiwan Semiconductor Research Institute (TSRI) and realized on a 0.35-µm 2-polu-4-metal (2P4M) CMOS-MEMS process platform. The post-processing (wet etching) was completed at the NEMS Research Center at National Taiwan University (NTU). The chip was sent to SensorMate enterprise CO., LTD. for ceramic packaging after the post-processing. In addition, a loop antenna and LabView software were developed for verify the functionality of the resoswitch-based RSSI system. Finally, this thesis concludes by discussing the current issues and future research directions of the resoswitch-based RSSI system.