圖案化金屬氧化物/多孔碳複合材料之建造基於氣相昇華與沉積

Abstract

本研究結合氣相昇華與沉積製程和高溫燒結製程，將parylene 薄膜與3D 多孔parylene 分別轉化為保形碳膜和三維多孔碳材，經拉曼光譜和X 光繞射光譜證實碳化結果。其中孔洞結構為透過操控熱力學環境，控制冰塊模板昇華與對二甲苯自由基沉積之質傳而獲得。因此本製程無須任何毒性化學物質作為致孔劑，甚至可透過操縱載台溫度控制冰塊昇華速率，製造不同孔徑大小之多孔碳材。各種冰塊模板的製造方式，使300μm╳300μm╳300μm方塊陣列多孔碳材和多層結構之多孔碳材得以實現。最後，本研究使用氧化鈰、四氧化三鐵和氧化鋅之懸浮液製造厚度1mm 之三層金屬氧化物/多孔碳複材，經能量色散X 射線分析得知金屬氧化物之分界清晰。本研究提供綠色、簡單且創新之多孔碳複材製程，在吸附材、汙染物降解、光觸媒、傳感器、超級電容等領域發展有巨大的潛力。

This study utilized vapor sublimation & deposition, and high-temperature annealing to convert parylene films and 3D porous parylene into conformal carbon films and 3D porous carbon materials, confirmed via Raman spectroscopy and X-ray diffraction spectroscopy. The porous structure was achieved by manipulating the thermodynamic environment to control ice template sublimation and the deposition of p-xylene free radicals. Consequently, this process eliminated the need for toxic chemicals as porogen and enabled the production of porous carbon materials with varying pore sizes through substrate temperature manipulation to control ice sublimation rates. Various creative ice templates could be generated, including porous carbon materials in cube arrays with dimensions of 300μm╳300μm╳300μm or with multi-layered structure. In this study, three suspensions were employed to fabricate a 1mm-thick three-layered metal oxides/porous carbon composite with well-defined interfaces. The research presented an environmentally friendly, straightforward, and innovative method for manufacturing porous carbon composites, which exhibited substantial potential for advancements in adsorbents, pollutant degradation, photocatalysis, sensors, and supercapacitors.