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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 李世光許聿翔 | zh_TW |
dc.contributor.advisor | Chih-Kung LeeYu-Hsiang Hsu | en |
dc.contributor.author | 蕭博元 | zh_TW |
dc.contributor.author | Po-Yuan Hsiao | en |
dc.date.accessioned | 2023-03-19T21:07:46Z | - |
dc.date.available | 2023-11-10 | - |
dc.date.copyright | 2022-10-12 | - |
dc.date.issued | 2022 | - |
dc.date.submitted | 2002-01-01 | - |
dc.identifier.citation | [1] E. R. Kandel, J. H. Schwartz, T. M. Jessell, S. Siegelbaum, A. J. Hudspeth, and S. Mack, "Principles of neural science," vol. 4: McGraw-hill New York, 2000, pp. 1077-1079.
[2] J. W. Kalat, "Biological psychology," Cengage Learning, 2015, pp. 205-209. [3] E. B. Goldstein and L. Cacciamani, "Sensation and perception," Cengage Learning, 2021, pp. 329-332. [4] Å. Vallbo and K.-E. Hagbarth, "Activity from skin mechanoreceptors recorded percutaneously in awake human subjects," Experimental neurology, vol. 21, no. 3, pp. 270-289, 1968. [5] R. S. Johansson, U. Landstro, and R. Lundstro, "Responses of mechanoreceptive afferent units in the glabrous skin of the human hand to sinusoidal skin displacements," Brain research, vol. 244, no. 1, pp. 17-25, 1982. [6] K. A. Kaczmarek, J. G. Webster, P. Bach-y-Rita, and W. J. Tompkins, "Electrotactile and vibrotactile displays for sensory substitution systems," IEEE transactions on biomedical engineering, vol. 38, no. 1, pp. 1-16, 1991. [7] S. Bolanowski Jr and J. J. Zwislocki, "Intensity and frequency characteristics of Pacinian corpuscles. I. Action potentials," Journal of neurophysiology, vol. 51, no. 4, pp. 793-811, 1984. [8] W. Dangxiao, G. Yuan, L. Shiyi, Y. Zhang, X. Weiliang, and X. Jing, "Haptic display for virtual reality: progress and challenges," Virtual Reality & Intelligent Hardware, vol. 1, no. 2, pp. 136-162, 2019. [9] K. Yatani and K. N. Truong, "SemFeel: a user interface with semantic tactile feedback for mobile touch-screen devices," in Proceedings of the 22nd annual ACM symposium on User interface software and technology, 2009, pp. 111-120. [10] I. Poupyrev, J. Rekimoto, and S. Maruyama, "TouchEngine: A tactile display for handheld devices," in CHI'02 Extended Abstracts on Human Factors in Computing Systems, 2002, pp. 644-645. [11] Y. Hashimoto, S. Nakata, and H. Kajimoto, "Novel tactile display for emotional tactile experience," in Proceedings of the International Conference on Advances in Computer Enterntainment Technology, 2009, pp. 124-131. [12] H. Iwata, H. Yano, F. Nakaizumi, and R. Kawamura, "Project FEELEX: adding haptic surface to graphics," in Proceedings of the 28th annual conference on Computer graphics and interactive techniques, 2001, pp. 469-476. [13] C. Harrison and S. E. Hudson, "Providing dynamically changeable physical buttons on a visual display," in Proceedings of the SIGCHI Conference on Human Factors in Computing Systems, 2009, pp. 299-308. [14] T. Carter, S. A. Seah, B. Long, B. Drinkwater, and S. Subramanian, "UltraHaptics: multi-point mid-air haptic feedback for touch surfaces," in Proceedings of the 26th annual ACM symposium on User interface software and technology, 2013, pp. 505-514. [15] K. A. Kaczmarek, K. Nammi, A. K. Agarwal, M. E. Tyler, S. J. Haase, and D. J. Beebe, "Polarity effect in electrovibration for tactile display," IEEE Transactions on Biomedical Engineering, vol. 53, no. 10, pp. 2047-2054, 2006. [16] technavio. "Haptics Market by Application, Component, and Geography - Forecast and Analysis 2021-2025." https://www.technavio.com/report/haptics-market-industry-analysis (accessed. [17] M. Lee, T. Kim, C. Bae, H. Shin, and J. Kim, "Fabrication and applications of metal-oxide nano-tubes," Jom, vol. 62, no. 4, pp. 44-49, 2010. [18] L. L. Hench and J. K. West, "The sol-gel process," Chemical reviews, vol. 90, no. 1, pp. 33-72, 1990. [19] T. Morita, T. Kanda, Y. Yamagata, M. K. M. Kurosawa, and T. H. T. Higuchi, "Single process to deposit lead zirconate titanate (PZT) thin film by a hydrothermal method," Japanese journal of applied physics, vol. 36, no. 5S, p. 2998, 1997. [20] T. Morita, "Piezoelectric materials synthesized by the hydrothermal method and their applications," Materials, vol. 3, no. 12, pp. 5236-5245, 2010. [21] K. Tsuchiya, T. Kitagawa, and E. Nakamachi, "Development of RF magnetron sputtering method to fabricate PZT thin film actuator," Precision engineering, vol. 27, no. 3, pp. 258-264, 2003. [22] A. A. Tomchenko, "Printed Chemical Sensors: From Screen-Printing to Microprinting∗," Encycl. Sens, vol. 10, pp. 279-290, 2006. [23] J. Akedo, "Aerosol deposition of ceramic thick films at room temperature: densification mechanism of ceramic layers," Journal of the American Ceramic Society, vol. 89, no. 6, pp. 1834-1839, 2006. [24] S.-C. Lin and W.-J. Wu, "Fabrication of PZT MEMS energy harvester based on silicon and stainless-steel substrates utilizing an aerosol deposition method," Journal of Micromechanics and Microengineering, vol. 23, no. 12, p. 125028, 2013. [25] H. Jaffe, "Piezoelectric ceramics," Journal of the American Ceramic Society, vol. 41, no. 11, pp. 494-498, 1958. [26] E. Fukada and I. Yasuda, "On the piezoelectric effect of bone," Journal of the physical society of Japan, vol. 12, no. 10, pp. 1158-1162, 1957. [27] 吳朗, 電子陶瓷: 壓電陶瓷. 全欣, 1994. [28] 溫志偉, "以溶-凝膠法製備之層狀鋯鈦酸薄膜微結構分析及生物相容性評估," 2005. [29] J. Yang, "An introduction to the theory of piezoelectricity," vol. 9: Springer, 2005, pp. 53-60. [30] C.-K. Lee, "Theory of laminated piezoelectric plates for the design of distributed sensors/actuators. Part I: Governing equations and reciprocal relationships," The Journal of the Acoustical Society of America, vol. 87, no. 3, pp. 1144-1158, 1990. [31] A. Meitzler, H. Tiersten, A. Warner, D. Berlincourt, G. Couqin, and F. Welsh III, "IEEE Standard on Piezoelectricity (ANSI/IEEE Std 176–1987)," The Institute of Electrical and Electronics Engineers Inc, 1987. [32] A. Leissa, "Vibration of plates, NASA SP-160," National Aeronautics and Space Administration, Washington DC, 1969. [33] G. Wang, N. M. Wereley, and D.-C. Chang, "Analysis of bending vibration of rectangular plates using two-dimensional plate modes," Journal of aircraft, vol. 42, no. 2, pp. 542-550, 2005. | - |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/83447 | - |
dc.description.abstract | 隨著物聯網的來臨,越來越多裝置強調數位化感官體驗,因此消費性電子產品或穿戴式裝置對於高性能且輕薄的觸覺回饋技術具高度的需求。傳統透過機械振動提供觸覺回饋的致動器多數為透過電流磁效應推動負載產生振動,造成振動強度與轉速難以分開設計外,裝置體積也較難微小化。然而,利用壓電材料作為致動源可以有效的解決上述之問題。因此本研究的目標為開發一輕薄、低能耗、高性能的壓電致動器用於觸覺回饋裝置。本研究目標讓使用者在觸壓按鍵或是個人裝置的介面時,致動器能夠產生不同程度的振動量或是產生具區域性的振動,期望透過上述之觸覺回饋以提升操作者與裝置間的互動性,製程上以不鏽鋼為基板並利用化學氣膠沉積法及微機電製程設計開發壓電式致動器元件,作為觸覺回饋裝置之致動源,壓電式致動器元件由四個壓電振動單元組成,可透過改變不同的驅動組合,讓使用者能夠在平板上感受到空間上不同程度的觸覺回饋。本研究透過雷射測振儀實際量測壓電振動單元及觸覺回饋致動器的振動位移量,在250Hz的驅動頻率下,以9mm長x 4mm寬x 71μm厚的壓電振動單元,其電極長度2mm,驅動45V可以產生約0.9μm之最大振幅;而觸覺回饋致動器中的四個壓電振動單元同時以30V驅動可使平板產生約0.4μm之最大振幅。最後透過改變不同的驅動組合使系統最上層的玻璃平板具有區域性的振動現象,同時驅動三個壓電振動單元時,在斜對角兩區域之最大振幅比為5.375,相較於僅驅動單個壓電振動單元在斜對角兩區域之最大振幅比為1.8,有較大的振幅比;而驅動長邊上兩個壓電振動單元產生之最大振幅比為5,高於驅動短邊上兩個壓電振動單元產生之最大振幅比4.2,驗證本研究的構設計具有產升空間識別度的觸覺回饋之能力。 | zh_TW |
dc.description.abstract | With the popularity of the Internet of Things, more and more devices emphasize digital sensory experiences. Thus, consumer electronics or wearable devices highly demand. Most traditional actuators that provide haptic feedback are based on mechanical vibrations. It often uses magnetism to vibrate a proof mass, but this design makes it hard to independently control vibration strength and speed. However, this design makes it difficult to miniaturize the device's size. In contrast, using a piezoelectric material as the actuator can effectively solve this issue. Therefore, this study aims to develop a lightweight, low-power, high-performance haptic feedback device. The second aim of this study is to enable regional vibrations to enhance the interaction between the operator and the device. The haptic actuator is constructed by a stainless-steel sheet embedded with four sets of piezoelectric actuators using a chemical aerosol deposition. The MEMS process is developed to fabricate a 2-by-2 piezoelectric vibrator array. Activating different combinations of these 4 piezoelectric actuators, different haptic sensations can be generated. Using a laser vibrometer, it is verified that a maximum amplitude of 0.9μm can be achieved using a 9mm long by 4mm wide by 71μm thick piezoelectric vibrator driven under 45V at 250Hz conditions. The maximum amplitude of 0.4μm can be achieved by activating all 4 actuators at 30V. Regional activating can also be achieved by selectively activating different actuators. An amplitude ratio of 5.375 and 1.8 are observed by activating 3 and 1 of the 4 actuators, respectively. On the other hand, an amplitude ratio of 5 and 4.2 are achieved by activating two actuators on the long and short sides, respectively. These experimental results verify the performance of the spatial activation of this 2-by-2 piezoelectric array for haptic feedback applications. | en |
dc.description.provenance | Made available in DSpace on 2023-03-19T21:07:46Z (GMT). No. of bitstreams: 1 U0001-1309202214060800.pdf: 7212650 bytes, checksum: 59df5fed5da46270f9fd031e8876f0bb (MD5) Previous issue date: 2022 | en |
dc.description.tableofcontents | 口試委員審定書 i
誌謝 ii 中文摘要 iii ABSTRACT iv 目錄 v 圖目錄 viii 表目錄 xii 第1章 緒論 1 1.1 研究背景與動機 1 1.2 觸覺感知機制與觸覺受器 2 1.2.1 人體皮膚觸覺感知機制 2 1.2.2 皮膚觸覺受器 3 1.3 觸覺回饋裝置文獻回顧 7 1.3.1 機械振動 8 1.3.2 表面形貌改變 9 1.3.3 摩擦力調變 10 1.3.4 各類觸覺回饋裝置之比較 12 1.3.5 觸覺回饋市場趨勢 12 1.4 壓電膜製備技術 13 1.4.1 溶膠凝膠法(Sol-gel) 14 1.4.2 水熱合成法(Hydrothermal) 14 1.4.3 濺鍍法(Sputtering) 15 1.4.4 網版印刷法(Screen Printing) 16 1.4.5 氣膠沉積法(Aerosol Deposition) 16 1.4.6 壓電膜製備技術比較 18 1.5 論文架構 19 第2章 壓電式觸覺回饋致動器之結構設計 20 2.1 研究架構 20 2.2 壓電振動單元設計 20 2.3 觸覺回饋致動器結構設計 22 第3章 壓電材料介紹與理論推導 26 3.1 材料介紹 26 3.1.1 起源 26 3.1.2 壓電效應 26 3.1.3 壓電材料種類 27 3.2 理論推導 29 3.2.1 壓電組成律方程式 29 3.2.2 壓電薄板物性方程式 33 3.2.3 壓電致動器統御方程式 38 3.3 壓電致動器振動單元尺寸設計 49 3.3.1 壓電薄膜厚度設計 49 3.3.2 電極位置設計 50 第4章 觸覺回饋致動器之製程開發與實驗架設 53 4.1 壓電致動器製程 53 4.1.1 壓電微機電製程 53 4.1.2 壓電薄膜退火 55 4.1.3 壓電薄膜極化 56 4.2 裝置組裝 57 4.3 實驗架設 59 第5章 有限元素模擬分析 60 5.1 有限元素模型之建立與參數設定 60 5.1.1 壓電振動單元 61 5.1.2 觸覺回饋振動 63 5.2 壓電振動單元 65 5.2.1 不同驅動電壓分析 65 5.2.2 不同電極長度分析 67 5.3 觸覺回饋致動器 69 5.3.1 不同驅動電壓分析 69 5.3.2 不同驅動組合分析 71 5.3.3 頻域特性 77 第6章 實驗結果與討論 78 6.1 壓電振動單元 78 6.1.1 不同驅動電壓分析 78 6.1.2 不同電極長度分析 81 6.2 觸覺回饋致動器 84 6.2.1 不同驅動電壓分析 84 6.2.2 不同驅動組合分析 86 6.2.3 頻域特性 93 第7章 結論與未來展望 94 7.1 結論 94 7.2 未來展望 95 REFERENCES 96 | - |
dc.language.iso | zh_TW | - |
dc.title | 開發用於觸覺回饋裝置之壓電致動器 | zh_TW |
dc.title | Development of a Piezoelectric Actuator for Haptic Feedback Device | en |
dc.type | Thesis | - |
dc.date.schoolyear | 110-2 | - |
dc.description.degree | 碩士 | - |
dc.contributor.oralexamcommittee | 宋家驥;吳光鐘;謝志文 | zh_TW |
dc.contributor.oralexamcommittee | Gu-Chi Song;Kuang-Chong Wu;Chih-Wen Hsieh | en |
dc.subject.keyword | 觸覺回饋裝置,氣膠沉積法,壓電材料,致動器,壓電薄膜製程, | zh_TW |
dc.subject.keyword | haptic feedback device,aerosol deposition,piezoelectric material,actuator,fabrication of piezoelectric film, | en |
dc.relation.page | 99 | - |
dc.identifier.doi | 10.6342/NTU202203346 | - |
dc.rights.note | 未授權 | - |
dc.date.accepted | 2022-09-15 | - |
dc.contributor.author-college | 工學院 | - |
dc.contributor.author-dept | 工程科學及海洋工程學系 | - |
顯示於系所單位: | 工程科學及海洋工程學系 |
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