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標題: | 開發用於觸覺回饋裝置之壓電致動器 Development of a Piezoelectric Actuator for Haptic Feedback Device |
作者: | 蕭博元 Po-Yuan Hsiao |
指導教授: | 李世光許聿翔 Chih-Kung LeeYu-Hsiang Hsu |
關鍵字: | 觸覺回饋裝置,氣膠沉積法,壓電材料,致動器,壓電薄膜製程, haptic feedback device,aerosol deposition,piezoelectric material,actuator,fabrication of piezoelectric film, |
出版年 : | 2022 |
學位: | 碩士 |
摘要: | 隨著物聯網的來臨,越來越多裝置強調數位化感官體驗,因此消費性電子產品或穿戴式裝置對於高性能且輕薄的觸覺回饋技術具高度的需求。傳統透過機械振動提供觸覺回饋的致動器多數為透過電流磁效應推動負載產生振動,造成振動強度與轉速難以分開設計外,裝置體積也較難微小化。然而,利用壓電材料作為致動源可以有效的解決上述之問題。因此本研究的目標為開發一輕薄、低能耗、高性能的壓電致動器用於觸覺回饋裝置。本研究目標讓使用者在觸壓按鍵或是個人裝置的介面時,致動器能夠產生不同程度的振動量或是產生具區域性的振動,期望透過上述之觸覺回饋以提升操作者與裝置間的互動性,製程上以不鏽鋼為基板並利用化學氣膠沉積法及微機電製程設計開發壓電式致動器元件,作為觸覺回饋裝置之致動源,壓電式致動器元件由四個壓電振動單元組成,可透過改變不同的驅動組合,讓使用者能夠在平板上感受到空間上不同程度的觸覺回饋。本研究透過雷射測振儀實際量測壓電振動單元及觸覺回饋致動器的振動位移量,在250Hz的驅動頻率下,以9mm長x 4mm寬x 71μm厚的壓電振動單元,其電極長度2mm,驅動45V可以產生約0.9μm之最大振幅;而觸覺回饋致動器中的四個壓電振動單元同時以30V驅動可使平板產生約0.4μm之最大振幅。最後透過改變不同的驅動組合使系統最上層的玻璃平板具有區域性的振動現象,同時驅動三個壓電振動單元時,在斜對角兩區域之最大振幅比為5.375,相較於僅驅動單個壓電振動單元在斜對角兩區域之最大振幅比為1.8,有較大的振幅比;而驅動長邊上兩個壓電振動單元產生之最大振幅比為5,高於驅動短邊上兩個壓電振動單元產生之最大振幅比4.2,驗證本研究的構設計具有產升空間識別度的觸覺回饋之能力。 With the popularity of the Internet of Things, more and more devices emphasize digital sensory experiences. Thus, consumer electronics or wearable devices highly demand. Most traditional actuators that provide haptic feedback are based on mechanical vibrations. It often uses magnetism to vibrate a proof mass, but this design makes it hard to independently control vibration strength and speed. However, this design makes it difficult to miniaturize the device's size. In contrast, using a piezoelectric material as the actuator can effectively solve this issue. Therefore, this study aims to develop a lightweight, low-power, high-performance haptic feedback device. The second aim of this study is to enable regional vibrations to enhance the interaction between the operator and the device. The haptic actuator is constructed by a stainless-steel sheet embedded with four sets of piezoelectric actuators using a chemical aerosol deposition. The MEMS process is developed to fabricate a 2-by-2 piezoelectric vibrator array. Activating different combinations of these 4 piezoelectric actuators, different haptic sensations can be generated. Using a laser vibrometer, it is verified that a maximum amplitude of 0.9μm can be achieved using a 9mm long by 4mm wide by 71μm thick piezoelectric vibrator driven under 45V at 250Hz conditions. The maximum amplitude of 0.4μm can be achieved by activating all 4 actuators at 30V. Regional activating can also be achieved by selectively activating different actuators. An amplitude ratio of 5.375 and 1.8 are observed by activating 3 and 1 of the 4 actuators, respectively. On the other hand, an amplitude ratio of 5 and 4.2 are achieved by activating two actuators on the long and short sides, respectively. These experimental results verify the performance of the spatial activation of this 2-by-2 piezoelectric array for haptic feedback applications. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/83447 |
DOI: | 10.6342/NTU202203346 |
全文授權: | 未授權 |
顯示於系所單位: | 工程科學及海洋工程學系 |
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ntu-110-2.pdf 目前未授權公開取用 | 7.04 MB | Adobe PDF |
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