最佳化光柵結構與二維材料增益多彩量子井與超晶格感測器之探討

Abstract

紅外線偵測器舉凡在軍事夜視系統、醫學醫療儀器、通訊系統、天文觀測，扮演重要的角色。本論文結合量子井及超晶格，透過光柵結構與二維材料來提升量子井紅外線的吸收率。 光柵結構可以使光場在元件主動區內有效集中。我們利用本實驗室研發的模擬方法，針對特定的波段進行設計，找出效率最佳化的光柵結構。對於室溫的特徵波長(波長為9.5微米)而言，光柵在週期是4.5微米、深度為3微米和佔空比40%，能使元件有最有效的增益。此光柵的響應度與沒有光柵結構的元件相比，有5.5倍的增益，偵測度可以提高25倍，且最高可以操作在96K的環境下。 石墨烯能提升光電子的產生。放置石墨烯在光柵表面後，比較於未經處理的元件，響應度有8倍的增益，且偵測度可以提高70倍，石墨烯明顯增益感測器的元件表現。

The infrared detectors play an important role in the military night vision system, medical instruments, communication systems and astronomical observations. This paper combines the quantum well and the superlattice, through the grating structure and two-dimensional materials to enhance the infrared absorption of quantum wells. The grating structure can effectively focus the light field in the component active region. We use the simulation method developed by our laboratory to design a specific, to find the grating structure with efficiency optimization. For the characteristic wavelength at room temperature (9.5 microns), the grating is 4.5 microns in duration, 3 microns in depth and a duty ratio of 40%, which gives the component the most effective gain. The response of this grating is 5.5 times compare with the gain of the component without the grating structure, the detection degree can be increased 25 times and the maximum can operate in 96K environment. Graphene can enhance the production of photoelectron. After placing the graphene on the grating surface, compared to the untreated components, the response has a gain of 8 times, and the detection degree can be increased by 70 times, the graphene is obviously gain the component performance of the sensor.