可調變微形扇片組凹面鏡之研析

Abstract

本研究提出了具有變焦及非對稱式照明功能的微型扇片組凹面鏡，元件製作方面，使用MEMSCAP Inc提供的表面微加工技術PolyMUMPs製程代工服務，再經由後段製程將其釋放完成，驅動元件時，可藉由對電極多段及分區式的控制，使扇片狀鏡面產生相應的形變，達到改變焦距和形成非對稱光強度分布的能力。 在本論文中將會探討不同的元件設計及後段製程處理結果，首先分析不同設計的扇片組在不同熱烘烤溫度下的翹曲情況，接下來利用光學軟體模擬在理想的觀測距離下，不同形狀的電極對於反射光結果的影響，此處我們針對直徑為500 m、由12片鍍金比例100%的扇片所組成的鏡面，設計了四種電極，分別為圓形、半圓形、六片形和十二片形，最後將編號1-3的元件實際施加電壓驅動，並斜向打入綠光雷射，觀察鏡面結構的機械變化和屏幕上反射光的光學變化。

In our study, we propose a multiple-sector concave micromirrors which can change the position of focus and has the function of asymmetric illumination. Device is fabricated by MEMSCAP Inc. with the surface-micromachined PolyMUMPS process and released by back-end process. The fan-shaped mirror can generate different deformation to achieve the ability of optical zoom and asymmetric light intensity distribution with multi-stage and multi-section electrode control simultaneously. This thesis will discuss different device design and back-end process. We investigate the warping of multiple-sector with different temperature of hot baking and use optical simulation to analyze how the different shapes of electrode to affect reflected light at ideal distance. In optical simulation, mirror with the structure of diameter 500 m, twelve sectors and 100% gold area is adopted. The different shapes of electrode are circle, semicircle, six-section and twelve-section. At last we apply the voltage and laser on device to observe the variety of mechanical structure and reflected light.