適用於掃描探針顯微術之掃描範圍可調蜂鳴片壓電致動裝置之研發

Abstract

掃描探針顯微術已是探討微奈米科學的重要利器之一。然而，儀器本身的不普及性與高居不下的持有成本導致許多欲運用此技術進行研究的人員望而卻步。因此，除了持續增進掃描探針顯微術的功能與能力外，如何讓其進一步普及化也已成為一道重要議題。若以掃描探針顯微術本身功能來歸類，可概略地將其分為偵測模組與掃描致動模組。偵測模組對被測物運動的量測解析度、訊號頻寬與其本身的雷射光點尺寸等，將大幅地影響其系統性能與應用範圍。無論如何，性能優異的偵測模組仍然需要一個精準穩定的掃描致動模組進行整合。此時，偵測模組將乘載被測物進行各種模式的運動，一套完整的掃描探針顯微儀器則得以實現。 本論文使用壓電陶瓷蜂鳴片做為致動核心，設計開發出一款使用磁石堆疊產生行程可調的旗桿式結構蜂鳴片掃描器來取代傳統的掃描模組。此掃描器驅動核心使用金屬薄片當做基底，可以提供更高的結構韌性與可靠度。透過理論計算分析，可精準地得知設計時須注意的元件尺寸與掃描行程間的關係。此掃描器具備極高的行程控制電壓比率、高設計彈性與相對強韌的結構。其運動特性也透過實驗驗證，於線性度、磁滯現象、XY軸運動正交性與動態特性皆可與傳統掃描致動技術媲美。最後整合可與傳統偵測模組匹敵的像散式偵測模組進行掃圖，實際解析單層石墨台階以此驗證本蜂鳴片掃描器亦具備次奈米級的空間解析度。

Scanning probe microscopy (SPM) is one of the crucial techniques for studying micro/nano science. However, the non-popularity of them and the high cost inducing many people to quit even though they want to use this technology for their studies. Therefore, in addition to keeping improving the functions and the capabilities of SPM, how to enhance its popularity has also become an important issue. If classified by the internal functions of SPM, it can be generally divided into 'detection module' and 'scan-actuation module'. The system performances and application fields are dramatically influenced by the measurement resolution, signal bandwidth, and laser spot size...etc. of the detection module to the motion of the targets. No matter what, a high performance detection module still needs to be integrated with a precise and stable scan-actuation module. At the moment, the specimen is carried by the scan-actuation module to achieve various motion and able to realize a complete SPM instrument. A range-adjustable, which is realized by magnet-stacking, flagpole buzzer scanner is designed and developed to replace the traditional scanning module in this dissertation. The actuation core is constructed on the metal diaphragm, which provides higher structure toughness and reliability. According to the theoretical analysis, the relation between the size of elements and the scan ranges can be precisely acquired. This scanner provides high design flexibility, relative tough structure and can be driven in low-voltage. Its motion properties are also verified by experiments. Its linearity, hysteresis, orthogonality of XY-axis, and dynamic property are comparable with the traditional techniques. Finally, the sub-nano spacial resolution of this buzzer scanner is verified by resolving the single atomic steps on graphite by integrating with the astigmatic detection module.