雙光子聚合技術應用於曲面上微電路製造

Abstract

本論文之研究目的為利用雙光子聚合 (Two-photon Polymerization, TPP) 原理，在曲面上製作高精密之3D微型電路。實驗中所使用的雙光子聚合製造系統整合了飛秒雷射、xy掃描振鏡、z軸壓電平台、F-theta物鏡、xy平面調整平台、傾斜校正平台等。並且利用CMOS相機及移動平台，可實現此雙光子聚合製造系統定位及觀測功能。透過這方式，能在曲面上定位最高點以定義坐標系，然後以特定之加工參數進行微電路製作。本論文已經成功在曲面上製作了電容及導線等微線路，可以製作微線路之最大投影面積為6 mm × 6 mm，最小線寬為15 µm。

The purpose of this thesis is to use the principle of two-photon polymerization (TPP) technology to manufacture high-precision 3D microcircuits on curvilinear surfaces. The TPP fabrication system integrates femtosecond laser, XY-galvanometer scanner, Z-axis piezo translation stage, F-theta lens, XY-plane adjustment platform, tilt correction platform, etc. On the other hand, with CMOS camera and planar translation stage, we can make the TPP fabrication system have the ability of observation and positioning. By this feature, we can locate the highest point on curvilinear surface to define the coordinate system then fabricate microcircuits on it. After that, microcircuits and micro capacitors on curvilinear surfaces can be successfully manufactured with 6 mm × 6 mm projection area and 15 µm minimum wire width.