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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 鍾添東(Tien-Tung Chung) | |
| dc.contributor.author | Chin-Chieh Hsu | en |
| dc.contributor.author | 許晉杰 | zh_TW |
| dc.date.accessioned | 2021-06-17T03:33:23Z | - |
| dc.date.available | 2020-08-24 | |
| dc.date.copyright | 2020-08-24 | |
| dc.date.issued | 2020 | |
| dc.date.submitted | 2020-08-19 | |
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| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/69905 | - |
| dc.description.abstract | 本論文之研究目的為利用雙光子聚合 (Two-photon Polymerization, TPP) 原理，在曲面上製作高精密之3D微型電路。實驗中所使用的雙光子聚合製造系統整合了飛秒雷射、xy掃描振鏡、z軸壓電平台、F-theta物鏡、xy平面調整平台、傾斜校正平台等。並且利用CMOS相機及移動平台，可實現此雙光子聚合製造系統定位及觀測功能。透過這方式，能在曲面上定位最高點以定義坐標系，然後以特定之加工參數進行微電路製作。本論文已經成功在曲面上製作了電容及導線等微線路，可以製作微線路之最大投影面積為6 mm × 6 mm，最小線寬為15 µm。 | zh_TW |
| dc.description.abstract | The purpose of this thesis is to use the principle of two-photon polymerization (TPP) technology to manufacture high-precision 3D microcircuits on curvilinear surfaces. The TPP fabrication system integrates femtosecond laser, XY-galvanometer scanner, Z-axis piezo translation stage, F-theta lens, XY-plane adjustment platform, tilt correction platform, etc. On the other hand, with CMOS camera and planar translation stage, we can make the TPP fabrication system have the ability of observation and positioning. By this feature, we can locate the highest point on curvilinear surface to define the coordinate system then fabricate microcircuits on it. After that, microcircuits and micro capacitors on curvilinear surfaces can be successfully manufactured with 6 mm × 6 mm projection area and 15 µm minimum wire width. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-17T03:33:23Z (GMT). No. of bitstreams: 1 U0001-1708202022440800.pdf: 4896596 bytes, checksum: 8cd4815eb506057beca44ae17e405f25 (MD5) Previous issue date: 2020 | en |
| dc.description.tableofcontents | 口試委員審定書 I 致謝 II 中文摘要 III Abstract IV CONTENTS V LIST OF FIGURES VII LIST OF TABLES XI Chapter 1 Introduction 1 1.1 Background 1 1.2 Literature review 4 1.3 Research motivation 14 1.4 Thesis outline 14 Chapter 2 Principle and fabrication process of TPP 16 2.1 Fundamental principle of TPP process 16 2.2 The fabrication process of TPP 20 2.3 NTUMFS CAM system for TPP micro fabrication 22 2.4 Plasma treatments in TPP fabrication process 23 2.5 Supercritical point drying process 25 2.6 Scanning electronic microscope image 28 Chapter 3 Experimental setup and material employed of TPP micro fabrication 29 3.1 Experimental setup of TPP micro fabrication system 29 3.2 NTUMFS CAM system for TPP micro fabrication 33 3.3 Material of TPP micro fabrication 34 Chapter 4 Fabrication of microcircuits on curvilinear surfaces by TPP 37 4.1 Fabrication of curvilinear surfaces 37 4.2 Design and projection of microcircuits CAD model on curvilinear surfaces 40 4.3 Fabrication of microcircuits on curvilinear surfaces by TPP 45 Chapter 5 Conclusions and Suggestions 56 5.1 Conclusions 56 5.2 Suggestions 57 References 58 | |
| dc.language.iso | en | |
| dc.subject | 雙光子吸收 | zh_TW |
| dc.subject | 雙光子聚合 | zh_TW |
| dc.subject | 微製造 | zh_TW |
| dc.subject | 微線路 | zh_TW |
| dc.subject | 微電容 | zh_TW |
| dc.subject | 曲面 | zh_TW |
| dc.subject | two-photon absorption | en |
| dc.subject | two-photon polymerization | en |
| dc.subject | microcircuit | en |
| dc.subject | curvilinear surface | en |
| dc.subject | micro capacitor | en |
| dc.subject | micro manufacturing | en |
| dc.title | 雙光子聚合技術應用於曲面上微電路製造 | zh_TW |
| dc.title | Fabrication of microcircuits on curvilinear surfaces by two-photon polymerization technology | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 108-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 廖運炫(Yunn-Shiuan Liao),廖英志(Ying-Chih Liao),王安邦(An-Bang Wang) | |
| dc.subject.keyword | 雙光子聚合,雙光子吸收,微製造,微線路,微電容,曲面, | zh_TW |
| dc.subject.keyword | two-photon polymerization,two-photon absorption,micro manufacturing,microcircuit,micro capacitor,curvilinear surface, | en |
| dc.relation.page | 63 | |
| dc.identifier.doi | 10.6342/NTU202003879 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2020-08-19 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
| 顯示於系所單位： | 機械工程學系 | |
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