微晶矽非晶矽薄膜太陽能疊電池

Abstract

在本論文中，首先探討使用熱線化學氣相沉積法成長之微晶矽的結構、光學及電學特性以便選擇適當的成長參數來製作微晶矽太陽能電池。在順利製作微晶矽太陽能電池之後，為了提昇微晶矽太陽能電池的開路電壓，我們使用了非晶矽材料來做為太陽能電池的n 層與p層。隨後我們比較非晶矽太陽能電池與微晶矽太陽能電池的外部量子效率，並為了獲得更高的開路電壓以及較寬的光吸收頻譜而製造了雙層之非晶矽微晶矽堆疊結構的太陽能電池。最佳參數下的堆疊太陽能電池之開路電壓達到0.95伏特，光轉換效率為2.70%。

The properties of hydrogenated microcrystalline silicon thin films, including structure, optical and electrical properties, are investigated first in order to choose the proper HWCVD deposition parameters for solar cell fabrications in this thesis. Then microcrystalline silicon solar cells are fabricated, and in order to increase the open-circuit voltage of solar cells, heavily doping amorphous silicon are used as n+ and p+ layers. Besides, the fabrication and characteristics of amorphous silicon solar cells are also investigated, and the external quantum efficiency of amorphous and microcrystalline silicon solar cells are compared. Finally, in order to obtain much higher open-circuit voltage and wider light absorption spectra, the micromorph tandem solar cell is fabricated. The open-circuit voltage of the tandem solar cell achieved is 950 mV with wider absorption spectra comparing to single junction a-Si:H solar cell and total efficiency is 2.70%.