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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 郭錦龍 | |
| dc.contributor.author | Sheng-Shin Lin | en |
| dc.contributor.author | 林聖欣 | zh_TW |
| dc.date.accessioned | 2021-06-16T16:34:37Z | - |
| dc.date.available | 2015-11-23 | |
| dc.date.copyright | 2012-11-23 | |
| dc.date.issued | 2012 | |
| dc.date.submitted | 2012-11-14 | |
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| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/63318 | - |
| dc.description.abstract | 本研究結合古典力場方法與分子動態模擬建立一套能夠有效建立有機矽酸鹽玻璃模型的計算程序。藉由此程序,我們得以建構不同尺寸、密度、網狀聯結度、或帶有不同末端基之非晶質二氧化矽與有機矽酸鹽玻璃材料之原子模型。經由本程序建立之非晶質二氧化矽,其結構特徵與前人文獻中使用其他方法產生之原子模型相符,證明此程序之合理性。
根據我們對建構出之有機矽酸鹽模型的計算結果發現,pcff力場模型對性質之預測與第一原理計算的結果相近。從機械性質的分析中我們推測:有機矽酸鹽系統之剛性未必隨含碳量增加而上升;在介電性質方面,我們認為雖然於結構中加入碳原子可降低系統內之離子極化程度,但同時也使電子極化程度增加,因此碳原子的取代未必能如前人所述般有效地提升系統之剛性並降低系統介電常數。此外我們也發現,系統之機械強度會隨孔隙率增加而下降,而在有機矽酸鹽玻璃材料內之孔隙率會受到結構內部末端基種類的影響。我們預測,若使用多孔非晶質二氧化矽作為絕緣層材料,其介電常數之下限約為1.7。 | zh_TW |
| dc.description.abstract | In this thesis, we combined classical force field methods and molecular dynamics simulations to establish an effective organosilicate glasses (OSGs) models developing process. By this procedure, amorphous silica and OSGs with various sizes, density, or with different terminal groups could be constructed. The structural characteristic of amorphous silica generated by this procedure is consistent with those generated by other methods in previous literatures, which proved the reliability of the procedure.
According to our calculation, the properties of amorphous silica and OSG can be well-predicted by pcff force field since the results were strongly consistent with those calculated by first-principles calculations. From the analysis of mechanical properties of OSGs, we found that the mechanical strength may not be enhanced by adding carbon-bridged, which contradicted to the results in previous studies. From the analysis of dielectric properties of OSGs, we found that adding carbon-bridged decreased the ionic polarization of OSGs. However, the dielectric constant might not be reduced because it increased the electronic polarization at the same time. In addition, we found that the mechanical strength of materials would decrease with the increasing porosity and that porosity would be influenced by the type of terminal groups of OSGs. In our prediction, as insulator materials, the limit of the dielectric constant of amorphous silica should be around 1.7. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-16T16:34:37Z (GMT). No. of bitstreams: 1 ntu-101-R99527044-1.pdf: 12802040 bytes, checksum: cd43e1da92ca931a56c6c87e6511768f (MD5) Previous issue date: 2012 | en |
| dc.description.tableofcontents | 誌謝 i
摘要 ii Abstract iii 目錄 v 圖目錄 viii 表目錄 xiv 第一章 緒論 1 1.1 研究背景 1 1.2 研究目的與方向 2 第二章 文獻回顧 5 2.1 發展低介電常數材料的目的 5 2.2 低介電常數材料必須具備之條件 5 2.3 低介電常數材料 7 2.4 低介電常數材料應用在積體電路製程上的困難 8 2.5 有機矽酸鹽之建模方法 9 2.6 有機矽酸鹽材料之性質 13 第三章 理論基礎 15 3.1 分子動態模擬(molecular dynamic simulation) 15 3.1.1 Verlet algorithm 15 3.1.2 Nose-Hoover thermostat 16 3.2 古典作用力場(Classical Force Field) 17 3.2.1 pcff力場模型 17 3.2.2 Buckingham位能 20 3.3 材料之機械性質 20 3.3.1 Voigt近似法 21 3.3.2 Reuss近似法 21 3.3.3 Hill近似法 22 3.4 孔隙率(Porosity) 22 3.5 凡德瓦體積(van der Waals volume) 22 3.6 網狀聯結度(network connectivity) 24 第四章 非晶質模型之建構方法與驗證 27 4.1 研究使用之軟體與參數 27 4.2 非晶質二氧化矽結構 27 4.2.1 非晶質二氧化矽結構的產生流程 27 4.2.2 非晶質二氧化矽之結構分析 31 4.2.3 非晶質二氧化矽之環結構分析 37 4.2.4 非晶質二氧化矽的孔隙率及孔徑分佈分析 43 4.2.5 非晶質二氧化矽的電子性質分析 46 4.2.6 非晶質二氧化矽結構的振動態密度分析 48 4.2.7 非晶質二氧化矽之機械性質 50 4.2.8 非晶質二氧化矽之介電性質 51 4.3 含有碳橋的有機矽酸鹽結構 53 4.3.1 含有碳橋的有機矽酸鹽結構之產生流程 53 4.3.2 含碳橋的有機矽酸鹽結構之結構性質 56 4.3.3 含碳橋之有機矽酸鹽的振動態密度分析 61 4.4 含有甲基末端基的有機矽酸鹽結構 65 4.4.1 含有甲基末端基的有機矽酸鹽結構之產生流程 65 4.4.2 含有甲基末端基的有機矽酸鹽結構之結構性質 68 4.4.3 含甲基末端基的有機矽酸鹽結構之振動態密度分析 69 4.5 大型的非晶質二氧化矽結構 71 第五章 有機矽酸鹽玻璃材料與矽酸鹽材料之性質 75 5.1 有機矽酸鹽結構的孔隙率與密度隨碳濃度變化之分析 75 5.2 有機矽酸鹽結構的機械性質隨碳濃度變化之分析 77 5.2.1 pcff力場模型之預測 77 5.2.2 COMPASS力場模型之預測 79 5.2.3 量子理論之預測與古典力場模型之驗證 83 5.3 有機矽酸鹽結構的電子性質隨碳濃度變化之分析 92 5.4 有機矽酸鹽結構的介電性質隨碳濃度變化之分析 94 5.5 有機矽酸鹽材料在外加應力下的變形機制 96 5.6 網狀聯結度對有機矽酸鹽材料機械性質之影響 106 5.7 孔隙率對矽酸鹽類結構之性質影響 115 第六章 結論 127 參考文獻 129 | |
| dc.language.iso | zh-TW | |
| dc.subject | 低介電常數材料 | zh_TW |
| dc.subject | 分子動態模擬 | zh_TW |
| dc.subject | 第一原理計算 | zh_TW |
| dc.subject | first principle | en |
| dc.subject | molecular dynamic simulation | en |
| dc.subject | low-k | en |
| dc.title | 運用分子模擬探討二氧化矽與有機-無機混成矽酸鹽玻璃材料之結構與基本性質 | zh_TW |
| dc.title | Atomic-Scale Modeling of the Structures and Mechanical Properties of Amorphous Silica and Organosilicates | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 101-1 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 林祥泰,謝宗霖,黃慶怡 | |
| dc.subject.keyword | 第一原理計算,分子動態模擬,低介電常數材料, | zh_TW |
| dc.subject.keyword | first principle,molecular dynamic simulation,low-k, | en |
| dc.relation.page | 131 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2012-11-15 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 材料科學與工程學研究所 | zh_TW |
| 顯示於系所單位: | 材料科學與工程學系 | |
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