色素細胞C特性應用於微測輻射熱儀

Abstract

從第二次世界大戰，熱成像所用的主要是光子檢測感測器陣列，由於必須使用又貴又笨重的致冷設備，使得它的應用限制於軍事上。直到1980年代，出現了微機械精密加工技術，使得非致冷式熱感測器陣列得以發展。因為熱感測器不需致冷設備，有著低價和高攜帶性等優點。熱感測器被期待發掘出越來越多的應用於商業運用。 微測輻射熱儀是熱感測器的一種，對於微測輻射熱儀，重要的有紅外線的吸收、高電阻溫度係數和的1/f雜訊。在這裡，我們提出新的材料-色素細胞c，並且由傅立葉變換紅外光譜儀量測紅外線吸收，證明色素細胞c在8-14μm波長有著高紅外線吸收，並模擬其熱平衡的狀態。利用緩衝溶液調配出不同的濃度所製作的色素細胞c薄膜，藉由量測電阻對溫度的變化，證明色素細胞c薄膜有高電阻溫度係數。然後量測色素細胞c薄膜的穩定度，在不同溫度和真空的環境下，電阻隨時間的變化，了解溫度和空氣對色素細胞c薄膜的損害。藉由封裝加強穩定度的實驗。最後所量到1/f noise值的範圍為1.63×10-9V2/Hz到2.44×10-8V2/Hz在1Hz時。我們相信這個方法可以提供一個全新的高紅外線吸收、高效能和低雜訊的微測輻射熱儀。

From World War II, photon detector arrays have reigned over the thermal imaging. They have been used for military applications. Due to the cooling requirement, they are expensive and bulky systems. The emergence of micromachining techniques have allowed for the development of uncooled thermal detector arrays in the 1980s. Thermal detectors do not require cryogenic equipments, which significantly reduce their cost and increase their portability. Thermal detectors are expected to find out more and more applications, especially in the commercial products. Microbolometer is one kind of the thermal detectors. It is important for a microbolometer to have good infrared (IR) absorption, a high temperature coefficient of resistance (TCR) and low 1/f noise. Here we present a novel material - cytochrome c. By Fourier transform infrared spectroscopy (FTIR) measuring the IR absorption, we proved the high IR absorption in the region of 8-14μm and simulated the thermal equilibrium state. The thin films were made by different ratios of cytochrome c to phosphate buffer solution. By measuring the resistance varies with temperature, we showed the high TCR of cytochrome c thin films. Next, we tested the stability of the cytochrome c thin film and measured the resistance changed over time at different temperatures or a vacuum environment. In the experiments, we found out that the temperature and the air degrade the cytochrome c thin film. Then, the package improved the stability of the cytochrome c thin film. Finally, the measured values of 1/f noise were 1.63×10-9V2/Hz to 2.44×10-8V2/Hz, at 1 Hz. We believe this method can provide a new high IR absorption, high efficiency and low noise microbolometer.