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  1. NTU Theses and Dissertations Repository
  2. 電機資訊學院
  3. 光電工程學研究所
請用此 Handle URI 來引用此文件: http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/62821
完整後設資料紀錄
DC 欄位值語言
dc.contributor.advisor蘇國棟(Guo-Dung J. Su)
dc.contributor.authorBo-Yu Laien
dc.contributor.author賴柏宇zh_TW
dc.date.accessioned2021-06-16T16:11:28Z-
dc.date.available2018-03-15
dc.date.copyright2013-03-15
dc.date.issued2013
dc.date.submitted2013-02-19
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dc.identifier.urihttp://tdr.lib.ntu.edu.tw/jspui/handle/123456789/62821-
dc.description.abstract從第二次世界大戰,熱成像所用的主要是光子檢測感測器陣列,由於必須使用又貴又笨重的致冷設備,使得它的應用限制於軍事上。直到1980年代,出現了微機械精密加工技術,使得非致冷式熱感測器陣列得以發展。因為熱感測器不需致冷設備,有著低價和高攜帶性等優點。熱感測器被期待發掘出越來越多的應用於商業運用。
微測輻射熱儀是熱感測器的一種,對於微測輻射熱儀,重要的有紅外線的吸收、高電阻溫度係數和的1/f雜訊。在這裡,我們提出新的材料-色素細胞c,並且由傅立葉變換紅外光譜儀量測紅外線吸收,證明色素細胞c在8-14μm波長有著高紅外線吸收,並模擬其熱平衡的狀態。利用緩衝溶液調配出不同的濃度所製作的色素細胞c薄膜,藉由量測電阻對溫度的變化,證明色素細胞c薄膜有高電阻溫度係數。然後量測色素細胞c薄膜的穩定度,在不同溫度和真空的環境下,電阻隨時間的變化,了解溫度和空氣對色素細胞c薄膜的損害。藉由封裝加強穩定度的實驗。最後所量到1/f noise值的範圍為1.63×10-9V2/Hz到2.44×10-8V2/Hz在1Hz時。我們相信這個方法可以提供一個全新的高紅外線吸收、高效能和低雜訊的微測輻射熱儀。
zh_TW
dc.description.abstractFrom World War II, photon detector arrays have reigned over the thermal imaging. They have been used for military applications. Due to the cooling requirement, they are expensive and bulky systems. The emergence of micromachining techniques have allowed for the development of uncooled thermal detector arrays in the 1980s. Thermal detectors do not require cryogenic equipments, which significantly reduce their cost and increase their portability. Thermal detectors are expected to find out more and more applications, especially in the commercial products.
Microbolometer is one kind of the thermal detectors. It is important for a microbolometer to have good infrared (IR) absorption, a high temperature coefficient of resistance (TCR) and low 1/f noise. Here we present a novel material - cytochrome c. By Fourier transform infrared spectroscopy (FTIR) measuring the IR absorption, we proved the high IR absorption in the region of 8-14μm and simulated the thermal equilibrium state. The thin films were made by different ratios of cytochrome c to phosphate buffer solution. By measuring the resistance varies with temperature, we showed the high TCR of cytochrome c thin films. Next, we tested the stability of the cytochrome c thin film and measured the resistance changed over time at different temperatures or a vacuum environment. In the experiments, we found out that the temperature and the air degrade the cytochrome c thin film. Then, the package improved the stability of the cytochrome c thin film. Finally, the measured values of 1/f noise were 1.63×10-9V2/Hz to 2.44×10-8V2/Hz, at 1 Hz. We believe this method can provide a new high IR absorption, high efficiency and low noise microbolometer.
en
dc.description.provenanceMade available in DSpace on 2021-06-16T16:11:28Z (GMT). No. of bitstreams: 1
ntu-102-R99941031-1.pdf: 3301312 bytes, checksum: 886f34c6e09a4d8e084e9c74c30d4592 (MD5)
Previous issue date: 2013
en
dc.description.tableofcontents口試委員會審定書 #
致謝 i
中文摘要 ii
ABSTRACT iii
CONTENTS v
LIST OF FIGURES viii
LIST OF TABLES xi
Chapter 1 Introduction of Infrared Detectors 1
1.1 Infrared and Applications 1
1.2 Photon Detectors 3
1.3 Thermal Detectors 4
1.3.1. Thermopiles 4
1.3.2. Pyroelectric Detectors 5
1.3.3. Microbolometer 6
Chapter 2 Microbolometer 7
2.1 Microbolometer 7
2.2 Black Radiation and Atmosphere Window 9
2.3 Infrared Absorption 12
2.4 Materials Used in Microbolometer 13
2.4.1. Vanadium Oxide (VOx) 13
2.4.2. Amorphous Silicon (α-Si) 13
2.4.3. Titanium (Ti) 14
2.4.4. Yttrium Barium Copper Oxide (YBaCuO) 14
2.4.5. Protein 14
2.5 SU-8 for Thermal Insulation 15
2.6 Readout Integrated Circuits 16
2.7 Packaging Materials 17
2.8 Some Important Equation for Microbolometer 17
Chapter 3 IR Absorption results and simulation 19
3.1 Measuring Equipment and Material 19
3.1.1. Fourier Transform Infrared Spectroscopy 19
3.1.2. Cytochrome c 21
3.1.3. Preparation Process 22
3.2 Experiment Result 23
3.3 Radiation Heat Transfer 24
3.3.1. The Heat Balance Equation 25
3.3.2. Planck’s law 26
3.3.3. Atmospheric Transmission 27
3.3.4. Stefan-Boltzmann’s law 28
3.3.5. Intensity 28
3.3.6. Thermal Conductance and Heat Capacitance Calculation 30
3.3.7. Simulation Results 32
3.4 Vibrational Frequencies in Gaussian and GaussView 37
3.4.1. Gaussian and GaussView 37
3.4.2. Molecular Structure & Bonding 38
3.4.3. Computational Chemistry Theory of Gaussian 39
3.4.4. Simulation Results 41
Chapter 4 Experimental Setup & Results 44
4.1 Experimental Setup 44
4.1.1. Materials 44
4.1.2. Fabrication Process 47
4.1.3. Measurement Setup 49
4.2 Experimental Results 50
4.3 1/f Noise 56
4.3.1. Measurement Setup 56
4.3.2. Results 57
Chapter 5 Conclusion and Future Work 58
Reference 60
Appendix A Gaussian input file 67
dc.language.isoen
dc.subject微測輻射熱儀zh_TW
dc.subject1/f雜訊zh_TW
dc.subject電阻溫度係數zh_TW
dc.subject色素細胞czh_TW
dc.subject熱影像zh_TW
dc.subjectThermal Imageen
dc.subjectTemperature Coefficient of Resistanceen
dc.subject1/f Noiseen
dc.subjectMicrobolometeren
dc.subjectCytochrome cen
dc.title色素細胞C特性應用於微測輻射熱儀zh_TW
dc.titleCharacterization of Cytochrome c for Microbolometer Applicationsen
dc.typeThesis
dc.date.schoolyear101-1
dc.description.degree碩士
dc.contributor.oralexamcommittee蔡睿哲(Jui-Che Tsai),黃鼎偉(Ding-Wei Huang)
dc.subject.keyword微測輻射熱儀,熱影像,色素細胞c,電阻溫度係數,1/f雜訊,zh_TW
dc.subject.keywordMicrobolometer,Thermal Image,Cytochrome c,Temperature Coefficient of Resistance,1/f Noise,en
dc.relation.page70
dc.rights.note有償授權
dc.date.accepted2013-02-19
dc.contributor.author-college電機資訊學院zh_TW
dc.contributor.author-dept光電工程學研究所zh_TW
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