雷射振鏡掃描系統與平台運動系統同步之路徑規劃研究

Abstract

隨著短脈衝雷射技術的進步，雷射已可應用於許多微細加工上。為了快速控制雷射至所需的位置，目前常使用振鏡掃描系統來進行加工。但受限於透鏡焦距和工作距離的限制，雷射可加工的範圍較小，如何解決工作視野小的問題，同時維持雷射加工精度是目前重要的課題。 為了擴大加工區域，目前常使用之Step-and-Scanning Method常出現拼接誤差，造成不連續的斷點，因此期望能同步控制工作平台及掃描系統的運動，達到連續不間斷的加工成果。目前在市面上可達到此效果的商用機台十分稀少，且價格昂貴。故本研究希望透過平台路徑規劃，將加工路徑依照長度和運動方向角度變化量，依照振鏡系統與平台系統運動的特性，做出適當的分工，規劃出平滑且適當的平台路徑與振鏡系統同步，藉此增加雷射可加工範圍，提高整體工作效率，又可維持雷射加工品質，之後便可將此結果應用於實際加工上。

With the progress of short pulse lasers, laser can be applied in many micromachining areas. We use the galvanometric scanner to move laser pointer to the wanted place. The working area of the scanner is limited by the F-theta lens’ focal length and working distance. So expanding the working area and keeping the laser processing accuracy simultaneously is an important topic. Step-and-Scanning Method is often used to expand the working area, but this method often causes stitching error and discontinuous points. Therefore, we attempt to synchronize the scanner and table motion to make the processing continuously. Currently in the market, the commercial machines which can achieve this effect are extremely rare and the expensive. This thesis attempts to develop a smooth stage path planning method and combines it with the marking on the fly function provided from scanner control broad. Divide the process path with path length and moving direction exchange by galvanometric scanning system and stage system motion characteristics. Attempt to make an appropriate division of work, expand the working area, improve the overall processing efficiency and keep the laser process quality. Finally hope the result can be applied to the actual process.