即時光纖直徑量測技術及折射率分布量測技術應用於微奈米導光線製作

Abstract

當半導體元件愈來愈小，傳輸的速度愈來愈快，微小化的光通訊系統及光電基板可望成為未來發展的方向之一。我們實驗室以改良的微小化抽絲塔，在可控制的條件之下成功製作出數十微米至數百奈米等級的微奈米導光線。因應抽絲塔的製程需求，我們開發出一套即時直徑量測系統，用來即時檢測並對製程系統做調整。量測方法使用雷射側向入射、觀測散射條紋的方式，並對此量測方法的精確度做了驗證。此外，為了確認製造出的微奈米導光線之導光性質，有必要了解其纖核及纖殼的變化狀態。我們使用一個基於定量相位顯微術的方法，藉由觀察光纖側面亮場成像之方式，檢測光纖的截面折射率分布。基於此方法，可以了解光纖的性質，也對各種不同種類的光纖分別做了檢測及分析。

With semiconductor devices become smaller and the transmission speed becomes faster, minimized optical transmission system and the optical integrated circuit are the candidates for future application and development. We utilized a modified-miniature fiber drawing tower to fabricate micro-nano optical wires (MNOWs) from few tens of micrometers down to few hundreds of nanometers scale under controllable conditions. For the necessity of the fiber drawing fabrication process, we develop a real-time diameter measurement system for in situ detecting and adjusting the fabrication parameters. The method is to pass a laser beam through a fiber and characterize its scattering pattern from which the diameter of the fiber is determined. The verification of accuracy and precision was also done. Furthermore, to confirm the light propagation property of the fabricated MNOWs, it is necessary to examine the variation of core and cladding. We utilized a method based on quantitative phase microscopy (QPM), which observe the bright field images of side view of a fiber to measure the refractive index profile along the cross section. From this approach, we can examine the fiber property, and measurements to a few kinds of fibers were done and analyzed.