利用金屬表面電漿共振現象之感測器最佳化設計

Abstract

本論文介紹許多金屬表面電漿共振現象的發展與研究，並針對利用金屬表面電漿共振性感測器作進一步的理論分析及最佳化設計。利用多層鍍膜理論解釋在介電材質和金屬間電磁場的實際分佈現象，同時也藉由在傳統的Krestchmann’s Geometry結構加上一層奈米等級的高折射率介電材質薄膜，分析在不同材料折射率與厚度參數組合之下每層材料的電磁場的分佈狀況，進而得到優於傳統Krestchmann’s Geometry結構的敏感度。我們使用RSoft、COMSOL等模擬軟體來模擬前人相關的研究，使用MathCAD來輔助理論推導過程，並將結果與本篇論文結構比較。最後試著透過不同材質薄膜間的厚度分配找出折射率變化對入射光角度達到最高敏感度的設計並歸納出透過稜鏡耦合的表面電漿感測器的設計原則。

In this thesis, we introduce the history of Surface plasmon resonance, and its development in recent years. Focusing on theoretical derivation and electromagnetic wave field analysis of the surface plasmon based sensor to obtain the principle for figuring out the effect of each parameters. Including thickness, refractive index, and corresponding incident angle of each layer. Furthermore, analysis about the TM polarized electromagnetic wave distribution between dielectric material and metal by using waveguide theory and couple mode theory. Based on above approaching to analyze the structure adding dielectric nano-layer with high refractive index on conventional Krestchmann’s geometry. We obtain much better sensitivity results than convention one and the principle might be applied in other application. Here the simulation software we use the software including RSoft, COMSOL and MathCAD to repeat the research done by former then compare with the design of this paper. Finally, we conclude the optimal design principle that most sensitive in change of refractive index respect to incident angle under different thickness layers and materials.