單邊擺動壓電式無閥薄膜泵之數值模擬

Abstract

本文乃根據過去本研究團隊所設計的單邊擺動方法進行無閥式壓電薄膜微泵之研發，利用壓電片改變薄膜形狀以驅動流體，並設計各式流向元件取代傳統壓電式薄膜微泵內之閥體。本研究是以商用數值套裝軟體作為單邊擺動壓電式無閥薄膜微泵之分析工具，模擬薄膜微泵需要設定移動邊界條件，故本文分析與比較使用兩種移動邊界方法之薄膜微泵主腔室。文中接著探討單邊擺動壓電式無閥薄膜微泵加入各種流向元件之效應，流向元件包括副腔室、漸縮/漸擴管與U型流道，最後設計性能參數比較各式薄膜微泵之表現。另外，本研究亦以主腔搭配副腔之微泵進行實驗驗證，其中發現數值結果於頻率150Hz下可得到最大流量1.25ml/s，而最大揚程為1318 Pa，與實驗量測結果相當接近。

In this study, a novel valveless diaphragm micropump based on one-side actuation has been successfully developed. A three-dimension, transition numerical model of the micropump established by commercial CFD software was employed to analyze the performance. A primary chamber with the dimensions of 45 mm×28mm×4mm is designed in the micropump. A 37.5 mm×20 mm piezoelectric device fixed on the one side of the primary chamber was seen as a driving device and drains liquid in one-direction. The moving boundary was studied with two methods to simulate the flow field of the primary chamber in the micropump. In addition, the several components, including secondary chamber, nozzle/diffuser and U-channel, were individually designed to connect the primary chamber as the flow-direction devices. The simulation results show that the micropumps were strongly affected by the frequencies, flow-direction devices, and applied force. Finally, the performance of the valveless micropump with secondary chamber numerical model was selected to compare with the experimental results. The maximum flow rate and pump head of numerical results were 1.25ml/s and 1318Pa under the force of 0.28 N at the frequency of 150Hz, which were also close to the results of experimental work.