創新噴墨系統在全有機電子元件之研發與應用

Abstract

目前產業上的電子元件、IC晶片與印刷電路板的製作方式主要都是以半導體製程為主，包含了曝光顯影、化學蝕刻、電鍍、高溫長晶和薄膜沉積等製程。雖然這樣的製程方式已經發展的相當成熟，並且不斷有新的突破，但他仍然有先天上的缺點存在。 半導體製程的方式往往步驟繁雜，完成一片IC晶圓就得花上數百道的製程，因而降低了產品的良率。並且在製程中，許多步驟對於材料來說都相當浪費，像是塗佈旋轉、薄膜沉積等，製作在元件上的材料與所使用的材料比例相當小，也因此大幅增加了製程的成本。 有鑑於此，噴墨製程的發展就相當具有潛力，只要能夠適當的處理材料可溶性，找到適當的溶劑，維持材料原有的半導體特性，配合基板的控制及自動化的噴墨控制系統，便可獲得精準且迅速的製程。在製程步驟來說，單一的噴墨方式搭配溶液處理與其他溶液製程，步驟相當簡單，可大幅改善產品良率的問題；並且由於噴墨先天的可即時性修改特性，也大大的增加了製程的彈性。而材料上的使用，噴墨製程可以完全的將材料運用於元件上，不會造成浪費而減省了製程的成本。 此外，噴墨所需的工作環境需求相對半導體製程更為降低，不需高的真空度與高溫環境，對於設備的條件與環境的潔淨狀況需求更為簡易。尤其是噴墨只需低溫製程的高度優勢，能夠將其應用與軟性電子基板上，由於塑膠基板對於溫度的忍耐度不高，因此噴墨製程對於可撓性電子產品，像是軟性螢幕、RFID TAG等發展上，將更具有潛力。

Semiconductor manufacturing process is the main fabricating method for today’s electronic device, such as IC chips and motherboards of personal computers. Although semiconductor manufacturing process is highly matured nowadays, there is still some inherent deficiency. The way to semiconductor manufacturing process usually contains many fabricating steps, which limited its throughput in many cases. Furtheremore, too much material was wasted during the fabrication process, for example, spin-coating, and thin film epitoxy, increases the costs. It is based on the above-mentioned discussions that to develop an inkjet printing process to print semiconctoring material becomes more and more attractive. All solution-based material can be used in an automatically manufacturing inkjet printing system, and fortunately, preparation of solution based semiconductoring material is very easy. In addition, inkjet printing system eliminates the waste of material with high patterning precision without the help of mask, which potentially brings us a very low cost and easily adaptable fabricating process. Besides the virtue of low material cost, the inkjet manufacturing process requires less stringent fabricating environment, which may include lower vacuum condition and lower temperature condition. With the ease of adaption to any environment, it’s possible to design some new fabricating methodology and associated instrument with lower energy consumtion.Since plastic substrates are easily damaged by heating, the low temperature inkjet printing process thus exhibits the potentials to various applications such as plastic displays and flexible RFID tags, and so on.