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Title: | 尖峰式退火之模擬與熱積存控制 Control of spike annealing in a RTP-thermal budget based approach |
Authors: | Bo-Chi Li 李柏齊 |
Advisor: | 余政靖(Cheng-Ching Yu) |
Keyword: | 熱積存, thermal budget, |
Publication Year : | 2007 |
Degree: | 碩士 |
Abstract: | 近年來,半導體產業的驅勢大多以單晶圓、大尺寸製程以及線寬之窄化。而由於快速熱製程(rapid thermal process,簡稱RTP)的處理時間較短,熱效率高且為單晶製程,近年來已被廣泛使用在半導體工業上。特別因積體電路線寬窄化,在快速升溫退火製程(rapid thermal annealing,簡稱RTA)中漸漸以尖峰式退火(spike annealing)來取代浸入式退火(soak annealing)。換句話說,是以一個如同三角形的溫度設定方式,並以相當快速的升溫(200~350 Continuing downsizing of the integrated circuit (IC) critical dimension (CD) leads to stringent requirement in temperature control of rapid thermal processor (RTP). In particular, for rapid thermal annealing, the spike annealing becomes the standard practice instead of soak temperature program. In other words, a triangular type of temperature program is executed with extremely fast ramp-up (200~350 |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/28478 |
Fulltext Rights: | 有償授權 |
Appears in Collections: | 化學工程學系 |
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ntu-96-1.pdf Restricted Access | 1.49 MB | Adobe PDF |
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