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Title: | 壓電式薄膜微型泵的發展與應用 Development and Application of A Diaphragm Micro-pump with Piezoelectric Device |
Authors: | Hong-Yun Wu 吳鴻昀 |
Advisor: | 馬小康 |
Keyword: | 微型泵,薄膜式泵,壓電,PDMS,液冷式散熱系統, Micro-pump,diaphragm-pump,piezoelectric,PDMS,liquid cooling system, |
Publication Year : | 2008 |
Degree: | 碩士 |
Abstract: | 在本研究中,成功的開發出一種簡單輕薄的微型泵,這種微型泵是利用壓電片與PDMS薄膜去驅動流體,並利用兩片PDMS閥體控制流體流向。在本研究中,微型泵的鋁製腔體是利用高精密CNC加工而成,其截面積為5mm×28mm。由於壓電片的震動會帶動PDMS薄膜與鋁製腔體間的容積改變,因此在本研究中利用一連串的參數改變去量測本微型泵的流量表現與變異參數的關係,並固定參數在此流量表現下去量測一個採用本微型泵的水冷式散熱系統的散熱效能。本微型泵的一般工作頻率為70~180Hz,最佳的流量表現為輸入電壓50V頻率為100Hz時流量為72 ml/min。 In this study, a new type of thin, compact, and light weighed diaphragm micro-pump has been successfully developed to actuate the liquid by the vibration of a diaphragm. The micro-diaphragm pump with two valves is fabricated in an aluminum case by using highly accurate CNC machine, and the cross-section dimension is 5mm×28mm. Both valves and diaphragm are manufactured from PDMS. The amplitude of vibration by a piezoelectric device produces an oscillating flow which may change the chamber volume by changing the curvature of a diaphragm. Several experimental set-ups for performance test in a single micro-diaphragm pump, isothermal flow open system, and a closed liquid cooling system is designed and implemented. The performance of one-side actuating micro-diaphragm pump is affected by the design of check valves, diaphragm, piezoelectric device, chamber volume, input voltage and frequency. The measured maximum flow rate of present design is 72 ml/min at zero total pump head in the range of operation frequency 70-180 Hz. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/27335 |
Fulltext Rights: | 有償授權 |
Appears in Collections: | 機械工程學系 |
Files in This Item:
File | Size | Format | |
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ntu-97-1.pdf Restricted Access | 1.92 MB | Adobe PDF |
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