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標題: | 可攜式常壓介電質放電電漿於鈣鈦礦太陽能電池製程之應用 Application of portable atmospheric-pressure dielectric barrier discharge plasma to the fabrication process of perovskite solar cell |
作者: | Jui-Hsuan Tsai 蔡睿軒 |
指導教授: | 陳建彰 |
關鍵字: | 常壓噴射電漿,常壓介電質放電電漿,鈣鈦礦太陽能電池,表面處理, atmospheric-pressure plasma jet,atmospheric-pressure dielectric barrier discharge,perovskite solar cell,surface treatment, |
出版年 : | 2018 |
學位: | 碩士 |
摘要: | 本研究導入可攜式常壓介電質放電(dielectric barrier discharge plasma, DBD)電漿於鈣鈦礦太陽能電池之製程中。研究中所使用的介電質放電電漿系統擁有可攜式與低溫之特性,可以全程於充滿氮氣之手套箱內操作,並透過WIFI模組和手套箱外的電腦做連接,進行水氧敏感材料的製程。本研究則應用於鈣鈦礦太陽能電池的材料改質。 本論文分為兩部分。第一部分為運用可攜式常壓介電質放電系統於參雜氟氧化錫透明導電基板之有機物污染物清除,並用於正規結構(regular structure)平面式鈣鈦礦太陽能電池。透過水接觸角與X射線能譜 (XPS) 分析可以得知,在經過電漿的處理過後,其表面的汙染物被去除,而使其形成一較親水之表面,進而增加後續製成薄膜之附著。在基板經由電漿清潔後,二氧化鈦以溶膠凝膠法旋轉塗佈於基板上,透過掃描式電子顯微鏡 (SEM) 影像可以觀察到,基板透過電漿處理過後,可以形成較為緻密之二氧化鈦薄膜,進而降低載子複合機率,因而增加太陽能電池的效率。 第二部分為使用可攜式常壓介電質放電電漿對鈣鈦礦 (CH3NH3PbI3, Perovskite) 薄膜進行處理,並製作成倒置結構(Inverted structure)平面式鈣鈦礦太陽能電池。由SEM俯視影像可以觀察到,鈣鈦礦之表面結晶顆粒大小隨著常壓介電質放電電漿之處理逐漸增加,較大的結晶顆粒可為電池帶來更好的開路電壓 (open circuit voltage, VOC) 與填充因子 (fill factor, FF),進而提升電池之轉換效率 (power conversion efficiency, PCE)。此外藉由X射線能譜 (XPS) 分析可以得知,常壓介電質放電電漿處理會將鈣鈦礦中的有機部分去除,留下富含鉛之表面,而其表面可以被富勒烯(Fullerene)或其衍生物更有效的保護,而降低載子複合機率,因此增加太陽能電池的效率。 常壓介電質放電電漿成功引進鈣鈦礦太陽能電池之製程中改善與提升電池之效率,在正規結構中,將效率最高提升至14.6%;在倒置結構中,效率最高提升至9.8%。在原本效率較低的太陽能電池,具有較顯著的改善效果,原因可能和低效能太陽能電池原本材料的缺陷密度較高有關。 Portable atmospheric-pressure dielectric barrier discharge (DBD) plasma system is applied to the fabrication processes of the perovskite solar cells. The DBD system is used inside a nitrogen-filled glove box to process oxygen- and water vapor-sensitive materials. The optical emission spectrometer is equipped with a WIFI module to communicate with the computer outside the glove box. In this study, the DBD system is applied to the material modification the perovskite layer of the perovskite solar cell and to decontamination of the glass substrate. In the first part of this thesis, the DBD system is used to clean the organic contaminationon fluorine doped tin oxide (FTO) substrates prior to the fabrication of regular structure planar perovskite solar cells (PSCs). Water contact angle measurement and X-ray photoelectron spectroscopy (XPS)indicate that the surface contamination is eliminated, leading to improved hydrophilicity of the FTO substrates, which thereby improves the adhesion of the follow-up deposited film. The follow-up deposited TiO2 can form a more compact layer on the substrate with the DBD treatment; this suppresses the charge recombination and raise the power conversion efficiency (PCE) of the PSCs. In the second portion, the DBD system is operated to treat the CH3NH3PbI3 (perovskite) films for inverted structure planar PSCs. The perovskite crystallinity increases after DBD treatments to reduce recombination and to improve the PCE of the PSCs.In addition, the XPS results show that the DBD treatment might remove the organic component (CH3NH3I) of the perovskite and produce a lead-rich surface, which shows a self-passivation effect and has better interaction with the fullerene layer, leading to improved PCE of the PSCs. The portable atmospheric DBD plasma system is successfully introduced into the fabrication process of the PSCs.For the regular structure, the highest PCE achieved is 14.6%; for the inverted structure, the highest PCE achieved is 9.8%. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/22171 |
DOI: | 10.6342/NTU201801909 |
全文授權: | 未授權 |
顯示於系所單位: | 應用力學研究所 |
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