結合磁性粒子磁驅動之45°組裝鞦韆式微鏡面

Abstract

在這篇論文中，我們提出了一個透過SOIMUMPs製程的磁驅動45°組裝鞦韆式微鏡面結構，這項製程技術是由MEMSCAP公司發展完成。元件製作過程中透過顯微注射器將不同體積的磁性粒子附著在鏡面背後，此步驟是在元件經過無塵室製程的曝光及顯影之後完成。藉由此方法我們可以精準地控制磁性材料的體積和位置。磁驅動微鏡面在外加磁鐵的影響下達到很大的擺動角度，當背面磁性粒子體積為46 nL和69 nL時分別得到擺動角度16.9°和9.8°。我們整合兩顆鞦韆微鏡面發展出兩種光連結系統，藉由雷射光取代真實光訊號量測，結果顯示設計的元件可以成功地運用於光連結和光通訊領域。

In this thesis, we present a magnetically actuated 45°-assembled swing-type micromirror fabricated with the SOIMUMPs process. The process is developed by MEMSCAP, Inc. In our device fabrication, magnetic-bead suspension droplets of controlled volume are dispensed over the back of the mirror using a nanoliter injector; this is done after all the clean room processes have been finished and the mirror has been released. With this approach, we are able to precisely control the amount and location of the magnetic material. The magnetically-actuated micromirror provides a wide swing angle under influence of an external permanent magnet. With 46 nL and 69 nL magnetic bead suspension applied to the backside, the swing angles are 16.9° and 9.8° respectively. We develope two light-connecting systems by integrating two swing-type micromirrors and replace the light signal with laser. The result shows that our device can be used successfully in optical interconnects and optical communications.