雙線圈電磁感應架構於非接觸式奈米粒子檢測技術之開發

Abstract

現今半導體製程對化學品純度的要求日益嚴格，然而現行液體純度的檢測方法多屬離線分析，不僅無法即時監控產線上化學品的品質，取樣過程亦可能造成二次污染。為解決此問題，本研究旨在開發一套非接觸式電磁感測系統，用於檢測液體樣品中奈米級之不純物。該系統採用同軸雙層螺線管線圈作為感測元件，當樣品置於線圈中心時，其電磁特性的差異將改變線圈等效電路中之參數，包含電感與電容值，此參數的改變會直接影響線圈的阻抗與相位特性，透過量測系統的頻率響應圖即可觀測此變化。本研究即是透過分析相位響應的變化，來推估樣品中不純物是否存在及其濃度差異。 基於上述原理，為了驗證感測系統之可行性，本研究首先使用去離子水與異丙醇混合溶液進行實驗，觀察到相位圖之頻率偏移與理論預期一致，證實感測元件之有效性。後續研究中選用三種性質不同的奈米粒子作為樣本，包括具鐵磁性的四氧化三鐵奈米粒子、具導電性但無磁性的金奈米粒子，以及不具導電性與磁性的聚苯乙烯奈米粒子，並以去離子水為溶劑製成懸浮液，探討不同類型與濃度的奈米粒子對螺線管電路相位特性的影響。實驗結果顯示，雙層螺線管感測系統能有效偵側不同濃度下的單一奈米級不純物。該技術未來有望應用於半導體製程中化學品管線的即時污染物檢測，有助於提高製程良率與產品品質。 總結而言，本研究證實雙層螺線管感測機制於液體中不純物濃度檢測之可行性。未來研究可著重於提升系統的檢測靈敏度與準確性，並進一步探討外線圈在不同激發條件下，對感測效能之影響。

In semiconductor manufacturing, the demand for high-purity chemicals has become increasingly critical. However, most current liquid purity inspection techniques rely on offline analysis, which not only prevents real-time monitoring but also carries the risk of contamination during sampling. To address this issue, this study proposes a non-contact electromagnetic sensing system for detecting nanoscale impurities in liquid samples. The sensing element is designed as a coaxial double-layer solenoid coil. When a sample is placed at the center of the coil, variations in its electromagnetic properties alter the equivalent circuit parameters, including inductance and capacitance. These parameter changes directly influence the coil’s impedance and phase characteristics, which can be observed through the frequency response of the system. By analyzing shifts in the phase response, the presence and concentration differences of impurities in the liquid can be evaluated. Based on this principle, preliminary experiments were carried out using mixtures of deionized water and isopropanol. The observed frequency shifts in the phase spectra were consistent with theoretical expectations, confirming the effectiveness of the sensing element. In the following experiments, three types of nanoparticles with distinct physical properties were chosen as test samples: ferromagnetic Fe₃O₄ nanoparticles, conductive but non-magnetic gold nanoparticles, and non-conductive, non-magnetic polystyrene nanoparticles. These were dispersed in deionized water to form suspensions, enabling the investigation of how different particle types and concentrations influence the phase characteristics of the solenoid circuit. The experimental results demonstrate that the double-layer solenoid sensing system can effectively detect nanoscale impurities of various concentrations. This technique shows potential for real-time monitoring of chemical contamination in semiconductor manufacturing pipelines, thereby contributing to improved process yield and product quality. In conclusion, this study has demonstrated the feasibility of using a double-layer solenoid sensing mechanism for detecting impurity concentrations in liquids. Future work may focus on improving the sensitivity and accuracy of the system, as well as further investigating how variations in the excitation conditions of the outer coil influence the overall sensing performance.