高解析度之一微米子畫素單色量子點顏色轉換層製作

Abstract

隨著科技的持續進步，顯示技術不斷邁向更高解析度、更廣色域與更小型化的發展目標，特別是在穿戴式裝置、微型顯示與近眼顯示（如AR/VR）等應用中，對高畫質與精確的色彩的需求日益提升。本研究針對此趨勢，開發出一套基於量子點的高解析度單色量子點色彩轉換層（monochromatic Quantum Dot Color Conversion Layer, QD CCL）製程技術。 我們利用玻璃基板搭配AZ-5214E光阻作為製程基底，成功製作出畫素尺寸為1.1 µm、間距1.1 µm的高密度量子點像素陣列，整體解析度高達12545 PPI，遠超過現有主流顯示器之規格。在色彩表現方面，導入量子點作為色彩轉換材料，充分展現其窄頻、高飽和度的光譜特性，有效實現廣色域的顯示需求。經光譜量測與效率分析，所製作之紅色量子點（RQD）與綠色量子點（GQD）分別達到最高41.5%與20.4%的色彩轉換效率（Color Conversion Efficiency, CCE），展現良好的轉換能力。 此外，我們進一步導入多層布拉格反射鏡（Distributed Bragg Reflector, DBR）結構，藉由反射未被吸收的UV激發光回至CCL層，提升激發效率。實驗結果顯示，紅光強度相較原始提升了1.174倍，綠光更提升至1.592倍，顯示DBR在提升輻射效率上的關鍵作用。

With the continuous advancement of technology, display systems are evolving toward higher resolution, wider color gamut, and greater miniaturization. In particular, emerging applications such as wearable devices, micro displays, and near-eye displays (AR/VR) demand high image quality and accurate color reproduction. In response to these trends, this study presents the development of a fabrication process for high-resolution monochromatic quantum dot color conversion layers (QD CCLs). Using glass substrates coated with the AZ-5214E photoresist as the base structure, we successfully fabricated a quantum dot pixel array with a pixel size and pitch of 1.1 µm, achieving an ultra-high resolution of 12545 PPI—well beyond the specifications of current mainstream displays. In terms of color performance, quantum dots were employed as the color conversion material, demonstrating narrow spectral bandwidths and high color saturation, which are essential for wide color gamut applications. Spectral and efficiency measurements show that the fabricated red and green quantum dots (RQD and GQD) achieved peak color conversion efficiencies (CCE) of 41.5% and 20.4%, respectively, indicating excellent conversion capability. Furthermore, we integrated multilayer distributed Bragg reflector (DBR) structures to reflect unabsorbed UV excitation light back into the CCL, thereby enhancing excitation efficiency. Experimental results showed that the emission intensity of RQD was increased by a factor of 1.174, while that of GQD was enhanced by 1.592, confirming the crucial role of DBRs in improving radiative output.