表面增強型拉曼感測晶片與微波感測器於液體樣品中的應用與分析

Abstract

本研究提出一種整合表面增強拉曼散射(Surface-Enhanced Raman Scattering, SERS)技術與微波平面天線感測器(Microwave Planar Antenna Sensor)的高靈敏度雙模式檢測平台，特別針對液體樣品的準確量測。我們利用蟬翼的天然奈米結構作為 SERS 基底，透過濺鍍(Sputtering)與電子束蒸鍍(Electron Beam Evaporation, E-beam Evaporation)技術沉積銀薄膜，研究不同製程對 SERS 增強效應的影響。結果顯示，濺鍍沉積可形成均勻的柱狀奈米結構，可實現高達 10⁷ 倍的 SERS 增強因子，有助於提升微量分析的靈敏度與準確性。 除此之外，我們也開發了一種低成本、量測均勻性佳的 SERS 晶片，其製作方式結合化學合成法與纖維紙張基材，透過控制化學藥品濃度以調控奈米顆粒的形貌與尺寸，進而最佳化 SERS 熱點 (hotspots) 的形成與分布。此方法不僅無須花費大量時間及資源使用半導體製程機台，材料取得容易，適合用於快速篩檢與實地檢測的應用。 在微波感測技術方面，本研究設計並製作了一款以平面天線為基礎的液體介電常數感測器，其外觀尺寸為2.5 cm × 2.5 cm，操作頻率中心約落在 4.906 GHz。此感測器可透過量測反射參數S11的頻譜變化，精準分析液體樣品的電磁響應特性。由於液體的介電特性與其成分密切相關，透過該感測器能有效辨識不同濃度下的液體摻雜比例，顯示其在液體組成分析上具有高度靈敏度。整體而言，此感測器具備結構簡單、體積小巧、響應快速以及可即時輸出數據等優點，非常適合應用於食品安全領域中液體摻雜偵測的智慧化與自動化系統。 本研究能同時利用SERS技術提供高選擇性分子識別，並透過微波感測器快速分析液體介電常數變化，實現更全面的樣品檢測能力。此技術可進一步應用於食品安全檢測、環境污染監測、半導體原料品質管控以及生物醫學分析，為多功能感測平台的發展奠定基礎，提供低成本、高效能的創新檢測解決方案。

This study presents a highly sensitive dual-mode detection platform that integrates SERS with a microwave planar antenna sensor for accurate analysis of liquid samples. Natural nanostructures from cicada wings were used as SERS substrates, with silver films deposited via sputtering and electron beam evaporation. The results show that sputtering forms uniform columnar nanostructures, optimizing LSPR at 633 nm and achieving a SERS enhancement factor up to 167, significantly improving trace detection sensitivity. Additionally, we developed a low-cost, high-sensitivity SERS chip by combining chemically synthesized nanoparticles with fiber paper substrates. By adjusting reagent concentrations, the morphology and size of nanoparticles can be controlled to optimize SERS hotspot formation. This approach avoids complex semiconductor processes, uses accessible materials, and is suitable for rapid and on-site detection. For microwave sensing, a planar antenna-based dielectric sensor (2.5 cm × 2.5 cm, ~4.906 GHz) was designed. By monitoring changes in the S11 parameter, the sensor can detect subtle variations in liquid dielectric properties and distinguish different adulteration levels. It provides accurate, real-time data to support automated food adulteration detection. This study demonstrates the complementarity of SERS and microwave sensing, offering both molecular selectivity and rapid dielectric analysis. The platform shows great potential for applications in food safety, environmental monitoring, semiconductor quality control, and biomedical analysis, providing a low-cost and efficient sensing solution.