平板式雙壓電致動器應用於觸覺回饋裝置之開發

Abstract

本研究之目標為開發輕薄、低功率及高性能之雙壓電觸覺回饋致動器，透過雙壓電致動器的設計以及開發製程技術，有效改善單壓電致動器之殘留應力所導致薄膜的彎曲問題，並使用觸覺驅動板結合壓力感測器產生觸覺回饋的驅動。本研究所開發的雙壓電觸覺回饋致動器製程技術是以不鏽鋼作為基材，並利用化學氣膠沉積法及微機電製程技術在不鏽鋼的上下兩面上製作觸覺回饋裝置致動源的壓電致動器元件，並以對稱層狀結構排除殘留應力所造成的結構彎曲問題。為驗證所開發的雙壓電觸覺回饋致動器的致動特性，本研究透過雷射測振儀實際量測振動單元及壓電致動器之振幅響應，驗證前者在驅動電壓為45V時，頻率 500Hz 時，最大位移量可以達到1μm，後者在驅動電壓為30V時，頻率500Hz時，最大位移量可達1.54μm，且在同一頻率下，發現隨著連接體長度的增加，振幅會明顯下降、隨著連接體厚度的增加，振幅則不太會有變化，驗證透過壓電致動器之結構變化可以使位移量大大提升。

This study aims to develop lightweight, low-power consumption, and highly efficient haptic actuator using a piezoelectric bimorph. By developing a new design and fabrication method, the warpage due to residual stress of the piezoelectric layer is successfully minimized. Integrating a touch sensor and the developed haptic feedback actuator, the haptic feedback is achieved by using a haptic feedback circuit. The developed haptic feedback actuator is constructed by depositing piezoelectric actuators symmetrically on two sizes of a stainless-steel plate using chemical aerosol deposition and microfabrication process. The symmetric design largely reduced the influence of the residual stress in the deposited piezoelectric layer. The performance of this haptic feedback actuator is verified using a Scanning Vibrometer. It verifies that the former can achieve a maximum displacement of 1μm at a driving voltage of 45V and a frequency of 500Hz. The latter can achieve a maximum displacement of 1.54μm at a driving voltage of 30V and a frequency of 500Hz. Furthermore, at the same frequency, it is found that the amplitude decreases significantly with an increase in the length of the connector, while the amplitude does not vary much with an increase in the thickness of the connector. This study demonstrates that the displacement of the haptic feedback actuator can be enhanced by controlling the actuator structure design.