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標題: | 磁控濺鍍CrN薄膜提升CoCrNiSi₀.₁₅中熵合金抗磨耗性能之研究 Study on the Improvement of Wear Resistance Performance of CoCrNiSi₀.₁₅ MEA by Magnetron Sputtered CrN Thin Film |
作者: | 吳尚澂 Shang-Cheng Wu |
指導教授: | 林新智 Hsin-Chih Lin |
關鍵字: | 中熵合金,磁控濺鍍,耐磨耗,氮化鉻鍍層,物理氣相沉積, medium-entropy alloy,magnetron sputtering,wear resistance,chromium nitride coating,PVD, |
出版年 : | 2024 |
學位: | 碩士 |
摘要: | 由多元主元素形成的高熵合金和中熵合金在近年來因擁有出色的綜合機械性能如高抗拉強度、高韌性以及優異的高溫強度等而引起了廣泛的關注,在這其中系中熵合金無疑是最吸睛的合金,因其除了高溫外,在低、中溫範圍內也有其他合金無法比擬的卓越性能,而添加了Si的CoCrNiSi_0.15中熵合金能解決CoCrNi合金降伏強度較低的缺點。
為了進一步提升CoCrNiSi_0.15中熵合金的使用壽命,本實驗利用射頻磁控濺鍍法沉積CrN薄膜於其表面,改變濺鍍時的氣體比例與濺鍍功率,並透過顯微組織的觀察、磨耗試驗來檢驗CrN薄膜沉積於CoCrNiSi_0.15表面對其抗磨耗性能的影響,並試圖找出最佳之濺鍍參數。 經由實驗發現沉積柱狀晶之CrN薄膜於CoCrNiSi_0.15中熵合金表面確實能提升其抗磨耗性能,且越厚的鍍層表現出越優異的抗磨耗性,在2N荷重下進行4000圈的磨耗試驗中,沉積CrN薄膜的CoCrNiSi_0.15磨耗率最高可減少98%。 In recent years, high-entropy alloys (HEAs) and medium-entropy alloys (MEAs) composed of multi-principal elements have attracted widespread attention due to their outstanding mechanical properties, including high tensile strength, high ductility, and excellent high-temperature strength. Among these, medium-entropy alloys, especially those with a single face-centered cubic (FCC) phase like CoCrNi alloy, have shown exceptional performance at both cryogenic and medium temperatures compared to other MEAs and conventional alloys. Similar to other FCC-structured MEA alloys, CoCrNi alloy exhibits lower yield strength, prompting research on increasing its yield strength. To further enhance the lifespan of CoCrNiSi_0.15 medium-entropy alloy, this study employs radio frequency magnetron sputtering to deposit CrN thin films on its surface. By varying the gas ratio and sputtering power during deposition, the impact of CrN film deposition on the wear resistance of CoCrNiSi_0.15 is examined through microstructural observations and wear tests. The goal is to identify the optimal sputtering parameters. Experimental results indicate that the deposition of columnar crystal CrN films on the surface of CoCrNiSi_0.15 medium-entropy alloy indeed improves its wear resistance. In a wear test conducted under a 2N load for 4000 cycles, the wear rate of CoCrNiSi_0.15 with deposited CrN film can be reduced by up to 98%. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/91783 |
DOI: | 10.6342/NTU202400353 |
全文授權: | 未授權 |
顯示於系所單位: | 材料科學與工程學系 |
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